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US5033299A Expired / Lapsed US ⏱️ 0.0 years remaining

Flow sensor

Assignee: Sharp Corp
•
Filing: 1989-08-01
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Granted: 1991-07-23
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Expires: 2009-08-01
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Abstract

Abstract A flow sensor comprising a heating unit and a fluid temperature detecting unit, the heating unit including a heat element, the fluid temperature detecting unit including a fluid temperature detecting element, the elements being formed on at least one substrate made of zirconia that is a heat insulating material having low thermal conductivity, great mechanical strength, and high heat-resistance.

Inventors

  • 👤 Junichi Tanaka
  • 👤 Akihito Jinda
  • 👤 Nobuyuki Tanaka
  • 👤 Yasuhiko Inami

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 19:02
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692; G01F1/696; G01F1/698; G01F1/699

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 104 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate and a fluid temperature detecting element deposited on the surface of said second substrate, at least one of said first and second substrates being made of zirconia.
Claim 2
Dependent Claim 104 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate and a fluid temperature detecting element deposited on the surface of said second substrate, at least one of said first and second substrates being made of zirconia.
Claim 3
Dependent Claim 17 words
A flow sensor according to claim 1, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 4
Dependent Claim 36 words
A flow sensor according to claim 2, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO, to said pure zirconia.
Claim 5
Dependent Claim 49 words
A flow sensor according to claim 2, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia to pure zirconia.
Claim 6
Dependent Claim 97 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate made of zirconia, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate made of zirconia and a fluid temperature detecting element deposited on the surface of said second substrate.
Claim 7
Dependent Claim 97 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate made of zirconia, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate made of zirconia and a fluid temperature detecting element deposited on the surface of said second substrate.
Claim 8
Dependent Claim 17 words
A flow sensor according to claim 5, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 9
Dependent Claim 35 words
A flow sensor according to claim 6, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO to pure zirconia.
Claim 10
Dependent Claim 49 words
A flow sensor according to claim 6, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition to pure zirconia of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia.
Claim 11
Dependent Claim 48 words
A flow sensor comprising a flat substrate made of zirconia, a heating element formed on one end of said substrate, and a fluid temperature detecting element formed on the other end of said substrate, said heating element and fluid temperature detecting element being thermally isolated from each other.
Claim 12
Dependent Claim 48 words
A flow sensor comprising a flat substrate made of zirconia, a heating element formed on one end of said substrate, and a fluid temperature detecting element formed on the other end of said substrate, said heating element and fluid temperature detecting element being thermally isolated from each other.
Claim 13
Dependent Claim 39 words
A flow sensor according to claim 9, further comprising a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being formed on said substrate in the vicinity of said heating element.
Claim 14
Dependent Claim 17 words
A flow sensor according to claim 9, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 15
Dependent Claim 35 words
A flow sensor according to claim 11, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO to pure zirconia.
Claim 16
Dependent Claim 49 words
A flow sensor according to claim 11, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition to pure zirconia of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia.

References Cited (Backward Citations)

US4304130A Cited
US4399697A Cited
US4559814A Cited
US4549433A Cited
US4761995A Cited
US4881407A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-22 1995-01-21 1995-07-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-22 1999-01-21 1999-07-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-22 2003-01-21 2003-07-23 $7700.00 Window Closed / Lapsed

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