Gas flow measuring apparatus

Claim 2

A gas flow measuring apparatus comprising: a flow measuring tube through which gas to be measured flows; a first support member made of electrical insulating material provided in said flow measuring tube; an electrical heater resistive film member which is deposited on said first supporting member; an electrical insulating material covering said electrical heater resistive member and consisting of a thin, insulating layer; a first temperature dependent resistive means provided on said electrical insulating material covering said electric heater resistive member; a second support member made of electrical insulating material disposed at a location little influenced by the heat from said electrical heater resistive member; a second temperature dependent resistive member wound around said second support member; and a measuring circuit which applies voltage to said electrical heater resistive member, and said first and second temperature dependent resistive members for measuring a flow rate of said gas.

Claim 3

A gas flow measuring apparatus according to claim 1, wherein said heater resistive member is formed in said support member by an evaporation depositing process.

Claim 4

A gas flow measuring apparatus according to claim 1, wherein said heater resistive film member is deposited on said first support member by a printing process member.

Claim 5

A gas flow measuring apparatus according to claim 2 or 3, wherein said heater resistive film member is of rectangular shape.

Claim 6

A gas flow measuring apparatus according to claim 1, 2 or 3, wherein said heater resistive film member is shaped in a polygonal line.

Claim 7

A gas flow measuring apparatus according to claim 1, wherein said first temperature dependent resistive means is a wire, and said wire is wound around said electrical insulating material.

Claim 8

A gas flow measuring apparatus comprising: a flow measuring tube through which gas to be measured flows; a first support board made of electrical insulating material provided in said flow measuring tube; a film-like electrical heater resistive member which is formed on said first support board; thin electrical insulating material covering said film-like electrical heater resistive member; a film-like first temperature dependent resistive member deposited on said electrical insulating material covering said heater resistive member; a second support board made of electrical insulating material disposed at a location little influenced by the heat from said electrical heater resistive member; a film-like second temperature dependent resistive member formed on said second support board; and a measuring circuit which applies voltage to said electrical heater resistive member, and said first and second temperature dependent resistive members for measuring a flow rate of said gas.

Claim 9

A gas flow measuring apparatus comprising: a flow measuring tube through which gas to be measured flows; a first support board made of electrical insulating material provided in said flow measuring tube; a film-like electrical heater resistive member which is formed on said first support board; thin electrical insulating material covering said film-like electrical heater resistive member; a film-like first temperature dependent resistive member deposited on said electrical insulating material covering said heater resistive member; a second support board made of electrical insulating material disposed at a location little influenced by the heat from said electrical heater resistive member; a film-like second temperature dependent resistive member formed on said second support board; and a measuring circuit which applies voltage to said electrical heater resistive member, and said first and second temperature dependent resistive members for measuring a flow rate of said gas.

Claim 10

A gas flow measuring apparatus according to claim 7, wherein said heater resistive member is formed on said first support board, said first resistive member is formed on said electrical insulating material, and said second resistive member is formed on said second support board by an evaporation depositing process.

Claim 11

A gas flow measuring apparatus according to claim 7, wherein said heater resistive member is formed on said first support board, said first resistive member is formed on said electrical insulating material and said second resistive member is deposited on said second support board by a printing process.

Claim 12

A gas flow measuring apparatus according to claim 7, 8 or 9, wherein said heater resistive member is of rectangular shape.

Claim 13

A gas flow measuring apparatus according to claim 7, 8 or 9, wherein said heater resistive member is shaped in a polygonal line.

Claim 14

A gas flow measuring apparatus according to claim 7, 8 or 9, wherein said first and second resistive members are covered with electrical insulating material.

Claim 15

A gas flow measuring apparatus comprising: a flow measuring tube through which gas to be measured flows; a first support member made of electrical insulating material provided in said flow measuring tube; an electrical heater resistive film member which is deposited on said first supporting member, said electrical heater resistive member being shaped a polygonal line; a thin layer of electrical insulating material covering said electrical heater resistive member; a first temperature dependent resistive member on said electrical insulating material covering said electric heater resistive member; a second support member made of electrical insulating material disposed at a location little influenced by the heat from said electrical heater resistive member; a second temperature dependent resistive member wound around said second support member; and a measuring circuit which applies voltage to said electrical heater resistive member, and said first and second temperature dependent resistive members for measuring a flow rate of said gas, said measuring circuit including: a reference resistor circuit having a pair of resistors forming a voltage divider, said reference resistor circuit forming a bridge with said first and second temperature dependent resistive members, a first differential amplifier for differentially amplifying a voltage divider output of said reference resistor circuit and an output of another voltage divider including a series connection of said temperature dependent resistive members, a second differential amplifier for differentially amplifying a difference between a predetermined reference voltage and an output of said first differential amplifier, and a power amplifier for power amplifying an output of said second differential amplifier to generate a voltage corresponding to the voltage thereof and apply the same to said reference resistors voltage divider and said another voltage divider, and also apply to said electric heater resistive member through an output resistor, whereby generating a terminal voltage of said output resistor as an output voltage.

Claim 16

A gas flow measuring apparatus comprising: a flow measuring tube through which gas to be measured flows; a first support member made of electrical insulating material provided in said flow measuring tube; an electrical heater resistive film member which is deposited on said first supporting member, said electrical heater resistive member being shaped a polygonal line; a thin layer of electrical insulating material covering said electrical heater resistive member; a first temperature dependent resistive member on said electrical insulating material covering said electric heater resistive member; a second support member made of electrical insulating material disposed at a location little influenced by the heat from said electrical heater resistive member; a second temperature dependent resistive member wound around said second support member; and a measuring circuit which applies voltage to said electrical heater resistive member, and said first and second temperature dependent resistive members for measuring a flow rate of said gas, said measuring circuit including: a reference resistor circuit having a pair of resistors forming a voltage divider, said reference resistor circuit forming a bridge with said first and second temperature dependent resistive members, a first differential amplifier for differentially amplifying a voltage divider output of said reference resistor circuit and an output of another voltage divider including a series connection of said temperature dependent resistive members, a second differential amplifier for differentially amplifying a difference between a predetermined reference voltage and an output of said first differential amplifier, and a power amplifier for power amplifying an output of said second differential amplifier to generate a voltage corresponding to the voltage thereof and apply the same to said reference resistors voltage divider and said another voltage divider, and also apply to said electric heater resistive member through an output resistor, whereby generating a terminal voltage of said output resistor as an output voltage.

Claim 17

A gas flow measuring apparatus according to claim 13, wherein said first temperature dependent resistive member is a wire and said wire is wound around said electrical insulating material.