US5033299A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flow sensor
Assignee: Sharp Corp
•
Filing: 1989-08-01
•
Granted: 1991-07-23
•
Expires: 2009-08-01
Abstract
Abstract A flow sensor comprising a heating unit and a fluid temperature detecting unit, the heating unit including a heat element, the fluid temperature detecting unit including a fluid temperature detecting element, the elements being formed on at least one substrate made of zirconia that is a heat insulating material having low thermal conductivity, great mechanical strength, and high heat-resistance.
Inventors
- 👤 Junichi Tanaka
- 👤 Akihito Jinda
- 👤 Nobuyuki Tanaka
- 👤 Yasuhiko Inami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:47
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692; G01F1/696; G01F1/698; G01F1/699
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
104 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate and a fluid temperature detecting element deposited on the surface of said second substrate, at least one of said first and second substrates being made of zirconia.
Claim 2
Dependent Claim
104 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate and a fluid temperature detecting element deposited on the surface of said second substrate, at least one of said first and second substrates being made of zirconia.
Claim 3
Dependent Claim
17 words
A flow sensor according to claim 1, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 4
Dependent Claim
36 words
A flow sensor according to claim 2, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO, to said pure zirconia.
Claim 5
Dependent Claim
49 words
A flow sensor according to claim 2, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia to pure zirconia.
Claim 6
Dependent Claim
97 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate made of zirconia, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate made of zirconia and a fluid temperature detecting element deposited on the surface of said second substrate.
Claim 7
Dependent Claim
97 words
A flow sensor comprising a heating unit and a fluid temperature detecting unit, said heating unit including a first flat substrate made of zirconia, a heating element deposited on the surface of said first substrate, and a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being deposited on the surface of said first substrate in the vicinity of said heating element, said fluid temperature detecting unit including a second flat substrate made of zirconia and a fluid temperature detecting element deposited on the surface of said second substrate.
Claim 8
Dependent Claim
17 words
A flow sensor according to claim 5, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 9
Dependent Claim
35 words
A flow sensor according to claim 6, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO to pure zirconia.
Claim 10
Dependent Claim
49 words
A flow sensor according to claim 6, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition to pure zirconia of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia.
Claim 11
Dependent Claim
48 words
A flow sensor comprising a flat substrate made of zirconia, a heating element formed on one end of said substrate, and a fluid temperature detecting element formed on the other end of said substrate, said heating element and fluid temperature detecting element being thermally isolated from each other.
Claim 12
Dependent Claim
48 words
A flow sensor comprising a flat substrate made of zirconia, a heating element formed on one end of said substrate, and a fluid temperature detecting element formed on the other end of said substrate, said heating element and fluid temperature detecting element being thermally isolated from each other.
Claim 13
Dependent Claim
39 words
A flow sensor according to claim 9, further comprising a heating temperature detecting element for detecting the temperature of said heating element, said heating temperature detecting element being formed on said substrate in the vicinity of said heating element.
Claim 14
Dependent Claim
17 words
A flow sensor according to claim 9, wherein said zirconia is a pure zirconia or zirconia ceramic.
Claim 15
Dependent Claim
35 words
A flow sensor according to claim 11, wherein said zirconia ceramic is stabilized zirconia that is produced by the addition of a stabilizer of Y 2 O 3 , CaO, or MgO to pure zirconia.
Claim 16
Dependent Claim
49 words
A flow sensor according to claim 11, wherein said zirconia ceramic is partially-stabilized zirconia that is produced by the addition to pure zirconia of an amount of a stabilizer of Y 2 O 3 , CaO, or MgO less than the amount of stabilizer needed to produce stabilized zirconia.
References Cited (Backward Citations)
US4304130A
Cited
US4399697A
Cited
US4559814A
Cited
US4549433A
Cited
US4761995A
Cited
US4881407A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-22 | 1995-01-21 | 1995-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-22 | 1999-01-21 | 1999-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-22 | 2003-01-21 | 2003-07-23 | $7700.00 | Window Closed / Lapsed |