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US5030308A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of bonding a semiconductor chip to a substrate

Assignee: National Starch and Chemical Investment Holding Corp
•
Filing: 1988-07-28
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Granted: 1991-07-09
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Expires: 2008-07-28
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Abstract

Abstract The bonding of semiconductor chips to a substrate is described wherein the first step involves the bonding of a tacky, curable and partially cured chip bonding adhesive, which is releasably supported on a support film, to the surface of the chip intended to be bonded to the substrate. The second step involves the further partial heat curing of the adhesive to convert it to a non-tacky state so that the adhesive will not undesirably stick during handling and storage operations. Thereafter, the chip with its adherent adhesive can be mounted to a substrate at elevated temperature to convert the adhesive to a more tacky state. The final step involves the curing of the adhesive after it has been used to bond the chip to the substrate.

Inventors

  • 👤 Gregory M. Sheyon
  • 👤 Joseph A. Aurichio

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 19:10
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7402; H10P72/7416; H10W; H10W72/00; H10W72/01; H10W72/013; H10W72/01331; H10W72/071; H10W72/073; H10W72/07331; H10W72/07337; H10W72/07338; H10W72/30; H10W72/351; H10W72/353; H10W72/354; Y; Y10; Y10T; Y10T156/00; Y10T156/10; Y10T156/1052; Y10T156/1062; Y10T156/1064; Y10T156/1082

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 88 words
A method of bonding a semiconductor chip to a substrate which comprises: (a) bonding a tacky, curable and partially cured, non-viscous chip bonding adhesive, which is releasably supported on a support film containing a release coating, to the surface of the chip intended to be bonded to the substrate; (b) further partially heat curing the adhesive to convert it to a non-tacky state; (c) mounting the chip on the substrate at elevated temperature to change the adhesive to a more tacky state; and (d) curing of the adhesive.
Claim 2
Independent Claim 88 words
A method of bonding a semiconductor chip to a substrate which comprises: (a) bonding a tacky, curable and partially cured, non-viscous chip bonding adhesive, which is releasably supported on a support film containing a release coating, to the surface of the chip intended to be bonded to the substrate; (b) further partially heat curing the adhesive to convert it to a non-tacky state; (c) mounting the chip on the substrate at elevated temperature to change the adhesive to a more tacky state; and (d) curing of the adhesive.
Claim 3
Dependent Claim 16 words
A method as claimed in claim 1 wherein the chip is in a semiconductor wafer configuration.
Claim 4
Dependent Claim 28 words
A method as claimed in claim 1 wherein the chip bonding adhesive comprises an epoxy resin, a soluble polyimide resin, a reactive diluent, and a polyalkenylphenol crosslinking agent.
Claim 5
Dependent Claim 44 words
A method as claimed in claim 1 wherein the adhesive is transferred to the chip while the chip is in a semiconductor wafer configuration, and the wafer is scribed and then cracked into individual chips after conversion of the adhesive to a non-tacky state.
Claim 6
Dependent Claim 46 words
A method as claimed in claim 1 wherein the adhesive is transferred to the chip while the chip is in a semiconductor wafer configuration, and the wafer/adhesive composite is mounted on a tacky adhesive wafer dicing film after the adhesive is converted to a non-tacky state.
Claim 7
Dependent Claim 17 words
A method as claimed in claim 5 wherein the wafer is diced after mounting on the film.
Claim 8
Dependent Claim 19 words
A method as claimed in claim 5 wherein the wafer is scribed and cracked after mounting on the film.
Claim 9
Dependent Claim 24 words
The method of claim 4 wherein the adhesive comprises an epoxy resin, a soluble polyimide resin, a reactive diluent, and a polyalkenylphenol crosslinking agent.
Claim 10
Dependent Claim 24 words
The method of claim 5 wherein the adhesive comprises an epoxy resin, a soluble polyimide resin, a reactive diluent, and a polyalkenylphenol crosslinking agent.
Claim 11
Dependent Claim 24 words
The method of claim 6 wherein the adhesive comprises an epoxy resin, a soluble polyimide resin, a reactive diluent, and a polyalkenylphenol crosslinking agent.
Claim 12
Dependent Claim 24 words
The method of claim 7 wherein the adhesive comprises an epoxy resin, a soluble polyimide resin, a reactive diluent, and a polyalkenylphenol crosslinking agent.

References Cited (Backward Citations)

US3600246A Cited
US3554832A Cited
US4284457A Cited
JPS57145339A Cited
JPS5957438A Cited
US4606962A Cited
EP0134606A2 Cited
US4664739A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-08 1995-01-07 1995-07-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-08 1999-01-07 1999-07-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-08 2003-01-07 2003-07-09 $7700.00 Window Closed / Lapsed

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