US5016342A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing ultra small track width thin film transducers
Assignee: Ampex Corp
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Filing: 1989-06-30
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Granted: 1991-05-21
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Expires: 2009-06-30
Abstract
Abstract An ultra small track width magnetic transducer and manufacturing method. The transducer has two coplanar confronting magnetic poles provided by a thin film layer of magnetic material. The thickness of the layer defines a track width. A transducing gap is etched in the magnetic layer by utilizing focused ion beam milling technology. The thusly obtained gap has a predetermined length and depth and it separates the magnetic layer into two confronting coplaner magnetic poles. A layer of non-magnetic material is deposited over the magnetic layer to fill the transducing gap. The transducing gap may be etched in a plane extending orthogonally to the plane of the magnetic core layer. Alternatively, the transducing gap plane may extend at an oblique angle to the magnetic core layer to obtain a transducing gap useful in aszimuth recording/playback.
Inventors
- 👤 Raghavan K. Pisharody
- 👤 Beverley R. Gooch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:05
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3176; G11B5/3179; G11B5/3183; G11B5/3103; G11B5/3109; G11B5/3116; G11B5/313; G11B5/3163; G11B5/48; G11B5/52; G11B5/53; G11B5/531; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49043; Y10T29/49046; Y10T29/4906; Y10T29/49064
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
90 words
A method of providing a thin film magnetic transducer, comprising the steps of: depositing a layer of magnetic material on a non-magnetic substrate, said layer having a thickness defining a track width of said transducer; directing a focused ion beam on said layer of magnetic material to separate said layer by etching to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said tranducing gap having predetermined length and depth; and depositing a layer of non-magnetic material over said layer of magnetic material to fill said transducing gap.
Claim 2
Independent Claim
90 words
A method of providing a thin film magnetic transducer, comprising the steps of: depositing a layer of magnetic material on a non-magnetic substrate, said layer having a thickness defining a track width of said transducer; directing a focused ion beam on said layer of magnetic material to separate said layer by etching to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said tranducing gap having predetermined length and depth; and depositing a layer of non-magnetic material over said layer of magnetic material to fill said transducing gap.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein said layer of magnetic material is made of a highly permeable soft magnetic material.
Claim 4
Dependent Claim
16 words
The method of claim 1 wherein said non-magnetic substrate is made of an electrically insulating material.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein said layer of non-magnetic material deposited over said layer of magnetic material is made of an electrically insulating material.
Claim 6
Dependent Claim
29 words
The method of claim 1 wherein said layer separating step comprises directing said focused ion beam in a direction perpendicular to a plane of said layer of magnetic material.
Claim 7
Dependent Claim
29 words
The method of claim 1 wherein said layer separating step comprises directed said focused ion beam in an oblique direction to a plane of said layer of magnetic material.
Claim 8
Independent Claim
149 words
A method of making a thin film magnetic transducer, comprising the steps of: providing a plurality of first thin film conductor leads on a nonmagnetic, electrically insulating substrate; providing a first thin film layer of a non-magnetic, electrically insulating material extending over said first conductor leads; providing a second thin film layer of a magnetic material extending over said first layer said second layer having a thickness defining a track width of said transducers; etching said second layer by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; providing a third thin film layer of a non-magnetic, electrically insulating material extending over said second layer and filling said transducing gap; and providing a plurality of second thin film conductor leads and connecting said first and second conductor leads to complete a transducer winding.
Claim 9
Independent Claim
149 words
A method of making a thin film magnetic transducer, comprising the steps of: providing a plurality of first thin film conductor leads on a nonmagnetic, electrically insulating substrate; providing a first thin film layer of a non-magnetic, electrically insulating material extending over said first conductor leads; providing a second thin film layer of a magnetic material extending over said first layer said second layer having a thickness defining a track width of said transducers; etching said second layer by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; providing a third thin film layer of a non-magnetic, electrically insulating material extending over said second layer and filling said transducing gap; and providing a plurality of second thin film conductor leads and connecting said first and second conductor leads to complete a transducer winding.
Claim 10
Dependent Claim
34 words
The method of claim 7 of providing a thin film transducer, further comprising the step of providing a fourth thin film layer of a non-magnetic, electrically insulating material extending over said second conductor leads.
Claim 11
Dependent Claim
35 words
The method of claim 8 further comprising the steps of superposing and integrally joining at least two said thin film transducers with their respective transducing gaps aligned to obtain a multitrack thin film transducer assembly.
Claim 12
Independent Claim
222 words
A method of making a thin film multitrack magnetic transducer assembly having a plurality of thin film magnetic transducers, wherein a method of manufacturing each transducer comprises the steps of: providing a plurality of first thin film conductor leads on a nonmagnetic, electrically insulating substrate; providing a first thin film layer of a non-magnetic, electrically insulating material extending over said first conductor leads; providing a second thin film layer of a magnetic material extending over said first layer said second layer having a thickness defining a track width of said transducers; etching said second layer by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; providing a third thin film layer of a non-magnetic, electrically insulating material, extending over said second layer and filling said transducing gap; providing a plurality of second thin film conductor leads on said third layer and connecting said first and second conductor leads to complete a transducer winding; providing a fourth thin film layer of a non-magnetic, electrically insulating material, extending over said second conductor leads to obtain a thin film magnetic transducer; and superposing and integrally joining together a plurality of said thin film transducers with their respective transducing gaps aligned, to obtain a thin film multitrack magnetic transducer assembly.
Claim 13
Independent Claim
222 words
A method of making a thin film multitrack magnetic transducer assembly having a plurality of thin film magnetic transducers, wherein a method of manufacturing each transducer comprises the steps of: providing a plurality of first thin film conductor leads on a nonmagnetic, electrically insulating substrate; providing a first thin film layer of a non-magnetic, electrically insulating material extending over said first conductor leads; providing a second thin film layer of a magnetic material extending over said first layer said second layer having a thickness defining a track width of said transducers; etching said second layer by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; providing a third thin film layer of a non-magnetic, electrically insulating material, extending over said second layer and filling said transducing gap; providing a plurality of second thin film conductor leads on said third layer and connecting said first and second conductor leads to complete a transducer winding; providing a fourth thin film layer of a non-magnetic, electrically insulating material, extending over said second conductor leads to obtain a thin film magnetic transducer; and superposing and integrally joining together a plurality of said thin film transducers with their respective transducing gaps aligned, to obtain a thin film multitrack magnetic transducer assembly.
Claim 14
Independent Claim
123 words
A method of providing a thin film rotary scan magnetic transducer assembly having at least two thin film transducers spaced along a periphery of a disk shaped substrate, comprising the steps of: providing a disk shaped substrate of a non-magnetic material; depositing a layer of magnetic material in the form of spaced transducer cores on said substrate, said layer having a thickness defining a track width of said transducers; etching said layer of magnetic material of each said core by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; and depositing a layer of non-magnetic material over said layer of magnetic material to fill the transducing gaps.
Claim 15
Independent Claim
123 words
A method of providing a thin film rotary scan magnetic transducer assembly having at least two thin film transducers spaced along a periphery of a disk shaped substrate, comprising the steps of: providing a disk shaped substrate of a non-magnetic material; depositing a layer of magnetic material in the form of spaced transducer cores on said substrate, said layer having a thickness defining a track width of said transducers; etching said layer of magnetic material of each said core by a focused ion beam to obtain two coplanar confronting magnetic poles defining a transducing gap therebetween, said transducing gap having a predetermined length and depth; and depositing a layer of non-magnetic material over said layer of magnetic material to fill the transducing gaps.
Claim 16
Dependent Claim
48 words
The method of claim 11 wherein said step of depositing said layer of magnetic material comprises providing a plurality of equidistantly spaced coplanar magnetic transducer cores along the periphery of said substrate and wherein respective transducing gaps of each transducer are etched by the same focused ion beam.
References Cited (Backward Citations)
US3224074A
Cited
US3621153A
Cited
JPS53129017A
Cited
US4489484A
Cited
US4389105A
Cited
US4416056A
Cited
US4246620A
Cited
US4158213A
Cited
US4219853A
Cited
US4260450A
Cited
US4251910A
Cited
US4281357A
Cited
US4435900A
Cited
US4685014A
Cited
SU980145A1
Cited
US4418472A
Cited
US4804816A
Cited
US4670972A
Cited
US4550353A
Cited
US4701820A
Cited
JPS61142513A
Cited
JPS61160817A
Cited
US4677036A
Cited
JPS61210508A
Cited
US4727643A
Cited
JPS628320A
Cited
US4652954A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-20 | 1994-11-19 | 1995-05-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-20 | 1998-11-19 | 1999-05-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-20 | 2002-11-19 | 2003-05-21 | $7700.00 | Window Closed / Lapsed |