US5015493A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and apparatus for coating conducting pieces using a pulsed glow discharge
Assignee: Individual
•
Filing: 1988-01-11
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Granted: 1991-05-14
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Expires: 2008-01-11
Abstract
Abstract A process and apparatus for coating conductive workpieces by ionized vapors with the assistance of a glow discharge includes providing a periodically pulsed input of energy for the discharge so that stress on the parts is reduced and a smooth coating results. Either a constant or periodic magnetic field is superimposed to influence the coating process for better results and better handling.
Inventors
- 👤 Reinar Gruen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:25
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
132 words
A PVD coating process for covering conductive pieces, comprising: using an ionized vapor with reactive gases in a vacuum vessel; establishing a pressure of less than 100 Pascal in said vacuum vessel; connecting a conductive piece to a cathode connection of a pulsed DC energy supply; establishing a glow discharge around the conductive pieces by using the pulsed DC energy supply connected directly between a source and the conductive pieces; and applying DC pulses in a square wave form from said pulsed DC energy supply at a repetition frequency in a range of 0.1-100 kiloHertz and at a pulse to non-pulse ration in a range of 1:1-1:1000, each pulse of the pulsed DC energy supply having an amplitude of at least 100 volts and a duration of between 10 and 10,000 microseconds.
Claim 2
Dependent Claim
132 words
A PVD coating process for covering conductive pieces, comprising: using an ionized vapor with reactive gases in a vacuum vessel; establishing a pressure of less than 100 Pascal in said vacuum vessel; connecting a conductive piece to a cathode connection of a pulsed DC energy supply; establishing a glow discharge around the conductive pieces by using the pulsed DC energy supply connected directly between a source and the conductive pieces; and applying DC pulses in a square wave form from said pulsed DC energy supply at a repetition frequency in a range of 0.1-100 kiloHertz and at a pulse to non-pulse ration in a range of 1:1-1:1000, each pulse of the pulsed DC energy supply having an amplitude of at least 100 volts and a duration of between 10 and 10,000 microseconds.
Claim 3
Dependent Claim
27 words
A PVD coating process as claimed in claim 1, wherein said pulsed DC energy supply has a DC voltage of between 200 volts and 800 volts, inclusive.
Claim 4
Dependent Claim
46 words
A PVD coating process as claimed in claim 1, wherein each pulse of said pulsed DC energy supply has a current density of between 0.1 mA/cm 2 and 1 A/cm 2 inclusive and an energy density of between 1 W/cm 2 and 900 W/cm 2 .
Claim 5
Dependent Claim
84 words
A PVD coating process for covering conductive pieces, comprising: using an ionized vapor with reactive gases in a vacuum vessel; connecting a conductive piece to a cathode connection of a pulsed DC energy supply; establishing a glow discharge around the conductive pieces by using the pulsed DC energy supply connected directly between a source and the conductive pieces, each pulse of the pulsed DC energy supply having a duration of between 10 and 10,000 microseconds; and superimposing a magnetic field on said glow discharge.
Claim 6
Dependent Claim
84 words
A PVD coating process for covering conductive pieces, comprising: using an ionized vapor with reactive gases in a vacuum vessel; connecting a conductive piece to a cathode connection of a pulsed DC energy supply; establishing a glow discharge around the conductive pieces by using the pulsed DC energy supply connected directly between a source and the conductive pieces, each pulse of the pulsed DC energy supply having a duration of between 10 and 10,000 microseconds; and superimposing a magnetic field on said glow discharge.
Claim 7
Dependent Claim
16 words
A PVD coating process as claimed in claim 4, further comprising: pulsing said superimposed magnetic field.
Claim 8
Dependent Claim
19 words
A PVD coating process as claimed in claim 1, further comprising: providing auxiliary heat as a separate energy input.
Claim 9
Independent Claim
82 words
A method for coating a conductive workpiece, comprising the steps of: providing a partial vacuum in a vacuum vessel containing the conductive workpiece; vaporizing coating material from a source of coating material within the vacuum vessel; generating a plasma within the vacuum vessel; applying periodic voltage pulses between the source and the conductive workpiece, the voltage pulses being repeated every 10 to 10,000 microseconds and having a duration of no more than 100 microseconds; and applying a magnetic field to the plasma.
Claim 10
Independent Claim
82 words
A method for coating a conductive workpiece, comprising the steps of: providing a partial vacuum in a vacuum vessel containing the conductive workpiece; vaporizing coating material from a source of coating material within the vacuum vessel; generating a plasma within the vacuum vessel; applying periodic voltage pulses between the source and the conductive workpiece, the voltage pulses being repeated every 10 to 10,000 microseconds and having a duration of no more than 100 microseconds; and applying a magnetic field to the plasma.
Claim 11
Dependent Claim
16 words
A method as claimed in claim 7, further comprising the step of: pulsing the magnetic field.
Claim 12
Dependent Claim
36 words
A method as claimed in claim 7, wherein said step of applying a magnetic field comprises: applying the magnetic field parallel to an electric field generated by the voltage pulses at least near the conductive workpiece.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-13 | 1994-11-12 | 1995-05-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-13 | 1998-11-12 | 1999-05-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-13 | 2002-11-12 | 2003-05-14 | $7700.00 | Window Closed / Lapsed |