US4609564A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
Assignee: Vapor Technologies Inc
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Filing: 1983-05-13
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Granted: 1986-09-02
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Expires: 2003-05-13
Abstract
Abstract Complex shapes are coated with material at least in part evaporated from an elongated electrode shaped to conform to the substrate and juxtaposed therewith over the length of the electrode. An arc is struck at one end and depositions occur over a surface of the electrode which recedes from the arc. The other end of the electrode is heated to maintain the electrode during deposition at a constant temperature.
Inventors
- 👤 Eduard Pinkhasov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; C; C04; C04B; C04B41/00; C04B41/80; C04B41/81; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
131 words
A method of depositing a material upon a substrate which comprises the steps of: juxtaposing an elongated electrode composed of at least one component of said material with a surface of said substrate along the length of said electrode; evacuating the space in which said electrode is juxtaposed with said substrate to at most 10 -5 torr and maintaining the pressure in said space substantially no higher than 10 -5 torr during deposition; and striking an electrical arc with said electrode at one end thereof at a voltage of substantially 30 to 60 volts and with a current of substantially 50 to 90 amperes to evaporate said electrode over a length thereof receding from said arc and to deposit the material evaporated from said electrode on said substrate over said length.
Claim 2
Independent Claim
131 words
A method of depositing a material upon a substrate which comprises the steps of: juxtaposing an elongated electrode composed of at least one component of said material with a surface of said substrate along the length of said electrode; evacuating the space in which said electrode is juxtaposed with said substrate to at most 10 -5 torr and maintaining the pressure in said space substantially no higher than 10 -5 torr during deposition; and striking an electrical arc with said electrode at one end thereof at a voltage of substantially 30 to 60 volts and with a current of substantially 50 to 90 amperes to evaporate said electrode over a length thereof receding from said arc and to deposit the material evaporated from said electrode on said substrate over said length.
Claim 3
Dependent Claim
34 words
The method defined in claim 1, further comprising the step of monitoring the decay of said arc and restriking the arc upon such decay by contacting said electrode at said end with another electrode.
Claim 4
Dependent Claim
31 words
The method defined in claim 1, further comprising the step of controlling the temperature of said electrode to maintain said temperature in the range of substantially 800° F. to 1000° F.
Claim 5
Dependent Claim
37 words
The method defined in claim 1 wherein said substrate is a tube of complex contour, further comprising the step of shaping said elongated electrode in accordance with said contour and inserting the shaped electrode in said tube.
Claim 6
Dependent Claim
46 words
The method defined in claim 1, further comprising the step of heating the electrode which is evaporated at its end opposite the end at which said arc is struck to maintain the temperature thereof during deposition of said material at substantially 800° F. to 1000° F.
Claim 7
Dependent Claim
97 words
An apparatus for carrying out the method of claim 5 which comprises an elongated shaped electrode composed at least in part of a material to be deposited upon a substrate surface of complex shape, said electrode having a shape conforming to the complex shape of said substrate, means for striking an arc at one end of said electrode whereby material is evaporated from said electrode, means for heating said electrode at the opposite end thereof; and means for evacuating the space between said electrode and said substrate to a pressure of at most about 10 -5 torr.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-01 | 1990-03-03 | 1990-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-01 | 1994-03-03 | 1994-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-01 | 1998-03-03 | 1998-09-02 | $7700.00 | Window Closed / Lapsed |