Patent US4578547A successfully refreshed from Google Patents.
Patent US5009743A successfully refreshed from Google Patents.
US5009743A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemically-assisted ion beam milling system for the preparation of transmission electron microscope specimens
Assignee: GP ACQUISITION Corp
•
Filing: 1989-11-06
•
Granted: 1991-04-23
•
Expires: 2009-11-06
Abstract
Abstract An ion beam milling system for the preparation of transmission electron microscope specimens suitable for atomic resolution imaging, particularly of III-V and II-VI compound semiconductors and their alloys, is described. The system includes ion beam sources and reactive molecular gas jets which may be operated in combination or separately, as appropriate. A new heated specimen holder, giving greatly increased reaction rates with the molecular gas jet, allows milling angles very close to zero.
Inventors
- 👤 Peter R. Swann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; H01J37/3056; G; G01; G01N; G01N1/00; G01N1/28; G01N1/32
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
95 words
A method for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising the steps of: (i) mounting a specimen in a vacuum chamber, (ii) directing at the specimen an energetic, unfocused beam of ions neutrals, and (iii) simultaneously directing at the specimen a separate, independent low energy molecular beam, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 2
Independent Claim
95 words
A method for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising the steps of: (i) mounting a specimen in a vacuum chamber, (ii) directing at the specimen an energetic, unfocused beam of ions neutrals, and (iii) simultaneously directing at the specimen a separate, independent low energy molecular beam, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 3
Dependent Claim
131 words
Apparatus for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising: (i) a vacuum chamber, (ii) a pump for maintaining a vacuum within the chamber, (iii) a high voltage supply, (iv) a holder inside the chamber for holding the specimen, (v) a plurality of ion beam guns directing at the specimen an energetic beam of ions and neutrals generated by high voltage discharge through a gas, and (vi) a nozzle adjacent to the specimen, said nozzle directing at the specimen a low energy molecular beam, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 4
Dependent Claim
131 words
Apparatus for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising: (i) a vacuum chamber, (ii) a pump for maintaining a vacuum within the chamber, (iii) a high voltage supply, (iv) a holder inside the chamber for holding the specimen, (v) a plurality of ion beam guns directing at the specimen an energetic beam of ions and neutrals generated by high voltage discharge through a gas, and (vi) a nozzle adjacent to the specimen, said nozzle directing at the specimen a low energy molecular beam, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 5
Dependent Claim
68 words
The apparatus of claim 2 wherein said holder comprises (i) a pedestal, and (ii) specimen securing means, whereby said specimen may be securely seated on the top face of said pedestal, so permitting an ion beam to be directed at the specimen with an angle of between 0° and 10° between said ion beam and the specimen surface without any shadowing of the specimen by said specimen holder.
Claim 6
Dependent Claim
20 words
The apparatus of claim 3 wherein said securing means comprise a raised lip on the top surface of said pedestal.
Claim 7
Dependent Claim
68 words
A specimen holder for ion beam thinning systems comprising (i) a pedestal, and (ii) specimen securing means, whereby said specimen may be securely seated on the top face of said pedestal, so permitting an ion beam to be directed at the specimen with an angle of between 0° and 10° between said ion beam and the specimen surface without any shadowing of the specimen by said specimen holder.
Claim 8
Dependent Claim
68 words
A specimen holder for ion beam thinning systems comprising (i) a pedestal, and (ii) specimen securing means, whereby said specimen may be securely seated on the top face of said pedestal, so permitting an ion beam to be directed at the specimen with an angle of between 0° and 10° between said ion beam and the specimen surface without any shadowing of the specimen by said specimen holder.
Claim 9
Dependent Claim
20 words
The apparatus of claim 5 wherein said securing means comprise a raised lip on the top surface of said pedestal.
Claim 10
Independent Claim
83 words
A method for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising the steps of: (i) mounting a specimen in a vacuum chamber, and (ii) directing at the specimen an energetic, unfocused beam of ions and neutrals, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 11
Independent Claim
83 words
A method for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising the steps of: (i) mounting a specimen in a vacuum chamber, and (ii) directing at the specimen an energetic, unfocused beam of ions and neutrals, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 12
Dependent Claim
113 words
Apparatus for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising: (i) a vacuum chamber, (ii) a pump for maintaining a vacuum within the chamber, (iii) a high voltage supply, (iv) a holder inside the chamber for holding the specimen, and (v) a plurality of ion beam guns directing at the specimen an energetic beam of ions and neutrals generated by high voltage discharge through a gas, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 13
Dependent Claim
113 words
Apparatus for the preparation of high quality specimens free from artefacts and suitable for high resolution transmission electron microscopy comprising: (i) a vacuum chamber, (ii) a pump for maintaining a vacuum within the chamber, (iii) a high voltage supply, (iv) a holder inside the chamber for holding the specimen, and (v) a plurality of ion beam guns directing at the specimen an energetic beam of ions and neutrals generated by high voltage discharge through a gas, said specimen being positioned such that the angle between the specimen surface and said energetic ion beam is between 0° and 10°, whereby said specimens may be thinned to electron transparency without the production of thinning artefacts.
Claim 14
Dependent Claim
68 words
The apparatus of claim 8 wherein said holder comprises (i) a pedestal, and (ii) specimen securing means, whereby said specimen may be securely seated on the top face of said pedestal, so permitting an ion beam to be directed at the specimen with an angle of between 0° and 10° between said ion beam and the specimen surface without any shadowing of the specimen by said specimen holder.
Claim 15
Dependent Claim
20 words
The apparatus of claim 9 wherein said securing means comprise a raised lip on the top surface of said pedestal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-22 | 1994-10-22 | 1995-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-22 | 1998-10-22 | 1999-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-22 | 2002-10-22 | 2003-04-23 | $7700.00 | Window Closed / Lapsed |