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US5006370A Expired / Lapsed US ⏱️ 0.0 years remaining

Compositions for production of electronic coatings

Assignee: Albemarle Corp
•
Filing: 1990-06-22
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Granted: 1991-04-09
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Expires: 2010-06-22
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Abstract

Abstract In humid atmospheres (e.g., 55% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis [4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymers tend to be unstable in the sense that during spin coating operations undesirable precipitate formation may occur on the rotating surface of a semiconductor wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described are solutions of these polyamic acid polymers in a solvent containing at least 40% by weight of one or more liquid aromatic hydrocarbons having a boiling point of at least about 110° C. and at least 5% by weight of one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that the solution (a) contains on a weight basis from about 5% to about 40% of the polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.

Inventors

  • 👤 Allan A. Eisenbraun
  • 👤 Wesley C. Blocker

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 19:40
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1039; H; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/303

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 237 words
A method of forming a coating upon a planar substrate which comprises (a) applying to the central region of the planar surface a partially fluorinated polyamic acid composition, (b) rotating the substrate at a speed sufficient through centrifugal effect to cause the composition to flow outwardly toward the perimeter of the surface and form a substantially uniform liquid coating thereon, and (c) drying and curing the coating by heating the same to suitable elevated temperatures; said composition comprising a solution of (i) a 2,2-bis(3,4-dicarboxyphenyl)-hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymer having an inherent viscosity in the range of about 0.2 to about 1.5 dL/g (as measured in N-methylpyrrolidone at 25° C. at a concentration of 0.5 g/dL) in (ii) a solvent containing at least 40% by weight of one or more liquid aromatic hydrocarbons having a boiling point of at least about 110° C. and at least 5% by weight of one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that the solution (a) contains on a weight basis from about 5% to about 40% of such polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity; said method being further characterized in that it is conducted in an atmosphere having a relative humidity that does not result in such precipitate formation during the rotation in (b).
Claim 2
Independent Claim 237 words
A method of forming a coating upon a planar substrate which comprises (a) applying to the central region of the planar surface a partially fluorinated polyamic acid composition, (b) rotating the substrate at a speed sufficient through centrifugal effect to cause the composition to flow outwardly toward the perimeter of the surface and form a substantially uniform liquid coating thereon, and (c) drying and curing the coating by heating the same to suitable elevated temperatures; said composition comprising a solution of (i) a 2,2-bis(3,4-dicarboxyphenyl)-hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymer having an inherent viscosity in the range of about 0.2 to about 1.5 dL/g (as measured in N-methylpyrrolidone at 25° C. at a concentration of 0.5 g/dL) in (ii) a solvent containing at least 40% by weight of one or more liquid aromatic hydrocarbons having a boiling point of at least about 110° C. and at least 5% by weight of one or more dipolar aprotic solvents having a boiling point of at least about 150° C., such that the solution (a) contains on a weight basis from about 5% to about 40% of such polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity; said method being further characterized in that it is conducted in an atmosphere having a relative humidity that does not result in such precipitate formation during the rotation in (b).
Claim 3
Dependent Claim 28 words
A method of claim 1 wherein the dried coating in (c) is thereafter heated to a temperature in the range of about 200° C. to about 450° C.
Claim 4
Dependent Claim 23 words
A method of claim 1 wherein the dried coating in (c) is thereafter heated at a temperature of at least about 350° C.
Claim 5
Dependent Claim 22 words
A method of claim 1 wherein the rotational speed in (b) is in the range of about 1,000 to about 10,000 rpm.
Claim 6
Dependent Claim 17 words
A method of claim 1 wherein the substrate is in the form of a disc or wafer.
Claim 7
Dependent Claim 12 words
A method of claim 1 wherein the substrate is a semiconductor wafer.
Claim 8
Dependent Claim 47 words
A method of claim 1 wherein the 2,2-bis[4-(aminophenoxy)-phenyl]hexafluoropropane of said polyamic acid 2,2-bis[4-(4-aminophenoxy)phenyl]hexafluoropropane, wherein the solvent includes one or more methylbenzenes, wherein the dipolar aprotic solvent includes N-methylpyrrolidone, and wherein the dried coating in (c) is thereafter heated at a temperature of at least about 350° C.

References Cited (Backward Citations)

GB1062435A Cited
US4203922A Cited
US4172907A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-04-08 1994-10-08 1995-04-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-04-08 1998-10-08 1999-04-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-04-08 2002-10-08 2003-04-09 $7700.00 Window Closed / Lapsed

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