US5004399A — Robot slice aligning end effector

Claim 1

Independent Claim 73 words

Apparatus for positioning a semiconductor slice relative to a slice carrier, comprising: a horizontal platform for supporting a semiconductor slice thereon; means for tilting said platform away from the horizontal, thereby to cause sliding of said slice on said platform; and an indexer disposed laterally adjacent said platform, and positioned to receive at least one side of said slice thereagainst, such that said slice is positioned on said platform in a predetermined location.

Claim 2

Dependent Claim 73 words

Apparatus for positioning a semiconductor slice relative to a slice carrier, comprising: a horizontal platform for supporting a semiconductor slice thereon; means for tilting said platform away from the horizontal, thereby to cause sliding of said slice on said platform; and an indexer disposed laterally adjacent said platform, and positioned to receive at least one side of said slice thereagainst, such that said slice is positioned on said platform in a predetermined location.

Claim 3

Dependent Claim 17 words

The apparatus of claim 1, and further comprising means for releasably affixing the slice to the platform.

Claim 4

Dependent Claim 101 words

The apparatus of claim 2, and further comprising: means for extending said indexer from a rest position to an indexing position; means for releasing said slice from said platform, said platform having a remote end spaced from said indexer and a near end closer to said indexer than said remote end, said means for tilting said platform operable to raise said remote end respective to said near end such that said slice slides toward said indexer, said means for releasably affixing operable to reaffix said slice to said platform after said side of said slice has been received by said indexer.

Claim 5

Dependent Claim 59 words

The apparatus of claim 1, and further comprising: means for extending said indexer from a rest position to an indexing position; means for tilting said platform toward the horizontal after said side is received by said indexer; and means for retracting said indexer from said indexing position to said rest position subsequent to said indexing points receiving said side.

Claim 6

Dependent Claim 122 words

Apparatus for positioning a slice for integrated circuits relative to an end effector, comprising: a platform of said end effector for picking up an integrated circuit slice; a pivot coupled to said platform for tilting said platform to and from the horizontal; a catcher mounted on said end effector and having at least two indexing points, said pivot operable to tilt said platform such that the said slice slides toward said catcher, said indexing points being laterally spaced away from the center line of sliding motion; the slice sliding on said platform responsive to said tilting of said pivot until said slice abuts each of said indexing points, such that said slice is in a predetermined position relative to said end effector.

Claim 7

Dependent Claim 122 words

Apparatus for positioning a slice for integrated circuits relative to an end effector, comprising: a platform of said end effector for picking up an integrated circuit slice; a pivot coupled to said platform for tilting said platform to and from the horizontal; a catcher mounted on said end effector and having at least two indexing points, said pivot operable to tilt said platform such that the said slice slides toward said catcher, said indexing points being laterally spaced away from the center line of sliding motion; the slice sliding on said platform responsive to said tilting of said pivot until said slice abuts each of said indexing points, such that said slice is in a predetermined position relative to said end effector.

Claim 8

Dependent Claim 29 words

The apparatus of claim 5, and further comprising: a holder for releasably affixing the slice to said platform prior to and subsequent to sliding the slice toward said catcher.

Claim 9

Dependent Claim 94 words

The apparatus of claim 6, wherein said platform has an upper surface, the workpiece having a lower surface, said holder comprising a plurality of vacuum ports disposed in said upper surface, said vacuum ports operable to create a partial vacuum between the lower surface of the workpiece and said upper surface, a vacuum source in communication with said vacuum ports, said vacuum source operable to be switched off in order to release the slice from said platform, said vacuum source operable to be switched on in order to reaffix the slice to said platform.

Claim 10

Dependent Claim 67 words

The apparatus of claim 7, wherein said vacuum source is operable to be switched on prior to said pivot tilting the platform away from the horizontal, said vacuum source thereafter switched off to release the slice and allow the slice to slide toward and abut said catcher, said vacuum source operable to be switched back on once said side of said slice abuts against said indexing points.

Claim 11

Dependent Claim 37 words

The apparatus of claim 7, and further comprising a vacuum sensor coupled to said ports for sensing the presence of a partial vacuum thereat, such that the presence of a slice on said platform may be sensed.

Claim 12

Dependent Claim 48 words

The apparatus of claim 5, and further comprising: a slide for laterally sliding said catcher from a rest position to an indexing position, said slide operable to retract said catcher from said indexing position to said rest position subsequent to abutting the slice side against said indexing points.

Claim 13

Dependent Claim 22 words

The apparatus of claim 10, and further comprising a sensor for sensing the position of said slide relative to said end effector.

Claim 14

Dependent Claim 42 words

The apparatus of claim 10, wherein said catcher comprises an indexing surface that includes said indexing points, said indexing surface pushed forward toward said slice into said indexing position by said slide, said surface retracted to said rest position by said slide.

Claim 15

Dependent Claim 21 words

The apparatus of claim 12, wherein said indexing surface is a concave surface formed to match a sidewall of said slice.

Claim 16

Dependent Claim 62 words

The apparatus of claim 10, wherein said catcher comprises a plurality of calipers each having at least one indexing point, said calipers pivotally coupled to said slide, said calipers each operable to pivot forward to assume a respective indexing position when said slide is extended, each said caliper operable to pivot backward to a respective rest position when said slide is retracted.

Claim 17

Dependent Claim 46 words

The apparatus of claim 14, wherein said plurality of calipers comprise a pair of calipers each having a concave surface containing at least one indexing point, said concave surface adapted to match a portion of the slice when a respective caliper is in its indexing position.

Claim 18

Dependent Claim 113 words

The apparatus of claim 14, and further comprising: a yoke mounted to a remote end of said slide, said yoke having a first pin for a first caliper and a second pin for a second caliper, said pins laterally spaced from said side; an inner end of each said caliper pivotally mounted to said platform, an outer portion of each said caliper remote from said inner end and including at least one said indexing point; a laterally elongate orifice in each caliper disposed between said inner end and said outer portion for receiving a respective yoke pin, said yoke pin sliding within said elongate orifice during the extension or retraction of said catcher.

Claim 19

Dependent Claim 22 words

The apparatus of claim 5, wherein said platform includes a capacitive sensor for sensing the presence of a slice on said platform.

Claim 20

Dependent Claim 83 words

The apparatus of claim 5, wherein an end effector plate is formed to couple said pivot to said platform, said platform comprising an extension of said end effector plate remote from said pivot, an upper surface of said platform formed in raised relation above an upper surface of said effector plate, said upper surface of said platform dimensioned to be less than the diameter of said slice such that the sides of said slice will not be touched by the platform upper surface.

Claim 21

Dependent Claim 43 words

The apparatus of claim 5, wherein said platform comprises a pair of laterally spaced forks projecting away from said catcher, a space between said forks formed in said platform such that said forks may be placed around a post situated underneath the slice.

Claim 22

Dependent Claim 46 words

The apparatus of claim 5, wherein said platform comprises a pair of laterally spaced forks projecting away from said catcher, a space between said forks formed in said platform such that said forks may be placed at least partly around a disk disposed beneath the slice.

Claim 23

Independent Claim 197 words

A system for transferring a slice for integrated circuits from a first workstation to a second workstation, comprising: an end effector mounted on a manipulating arm by means of a pivot; a platform of said end effector disposed distally from said pivot for supporting a slice thereon, said arm and said effector operable to pick up a slice from said first workstation; said pivot operable to pivot said platform away from the horizontal subsequent to picking the slice up from the first workstation; a catcher of said end effector having at least two indexing points, said slice sliding towards said catcher along a center line of sliding motion on said platform responsive to the operation of said pivot, said indexing points spaced laterally from said center line; said slice abutting said indexing points at the terminus of its slide such that said slice is in a predetermined position relative to said end effector; said pivot operable to pivot said platform toward the horizontal after said slice abuts said catcher; said arm operable to travel from said first workstation to said second workstation with said slice; and said platform operable to place said slice at said second workstation.

Claim 24

Independent Claim 197 words

A system for transferring a slice for integrated circuits from a first workstation to a second workstation, comprising: an end effector mounted on a manipulating arm by means of a pivot; a platform of said end effector disposed distally from said pivot for supporting a slice thereon, said arm and said effector operable to pick up a slice from said first workstation; said pivot operable to pivot said platform away from the horizontal subsequent to picking the slice up from the first workstation; a catcher of said end effector having at least two indexing points, said slice sliding towards said catcher along a center line of sliding motion on said platform responsive to the operation of said pivot, said indexing points spaced laterally from said center line; said slice abutting said indexing points at the terminus of its slide such that said slice is in a predetermined position relative to said end effector; said pivot operable to pivot said platform toward the horizontal after said slice abuts said catcher; said arm operable to travel from said first workstation to said second workstation with said slice; and said platform operable to place said slice at said second workstation.

Claim 25

Independent Claim 87 words

A method for positioning an integrated circuit slice relative to an end effector, comprising the steps of: picking up the slice on a platform of the effector; tilting the platform away from the horizontal; sliding the slice toward a catcher responsive to said step of tilting, said catcher having at least two indexing points laterally spaced from the center line of sliding motion; and abutting a side of the slice against the indexing points such that the slice is in a predetermined position relative to the effector.

Claim 26

Independent Claim 87 words

A method for positioning an integrated circuit slice relative to an end effector, comprising the steps of: picking up the slice on a platform of the effector; tilting the platform away from the horizontal; sliding the slice toward a catcher responsive to said step of tilting, said catcher having at least two indexing points laterally spaced from the center line of sliding motion; and abutting a side of the slice against the indexing points such that the slice is in a predetermined position relative to the effector.

Claim 27

Dependent Claim 56 words

The method of claim 22, and further including the steps of: releasably affixing the slice to the platform prior to said step of tilting the platform away from the horizontal; and releasing the slice from the platform subsequent to said step of tilting the platform in order to cause the slice to slide toward the catcher.

Claim 28

Dependent Claim 56 words

The method of claim 23, wherein said step of releasably affixing the slice is performed by causing a partial vacuum between a lower surface of the slice and a plurality of vacuum ports disposed on an upper surface of the platform, said step of releasing the slice comprising the further step of switching off the vacuum.

Claim 29

Dependent Claim 35 words

The method of claim 23, and further including the step of releasably affixing the slice to the platform after said step of abutting the side of the slice against the indexing points of the catcher.

Claim 30

Dependent Claim 59 words

The method of claim 25, and further including the steps of: switching on a vacuum source in communication with the vacuum ports prior to said step of picking up the slice; and sensing the establishment of a vacuum between the lower surface of the slice and the vacuum ports to thereby sense that the slice is on the platform.

Claim 31

Dependent Claim 25 words

The method of claim 25, and further including the steps of: extending the catcher to an indexing position prior to causing the slice to slide.

Claim 32

Dependent Claim 28 words

The method of claim 27, and further including the step of: sensing the position of the catcher in order to determine if it has reached the indexing position.

Claim 33

Dependent Claim 28 words

The method of claim 22, and further including the steps of: extending the catcher toward the slice to an indexing position prior to causing the slice to slide.

Claim 34

Dependent Claim 27 words

The method of claim 29, and further including the step of sensing the position of the catcher to determine whether the catcher has reached the indexing position.

Claim 35

Dependent Claim 35 words

The method of claim 22, and further including the step of: sensing a change in capacitance using a capacitive sensor mounted on the platform in order to determine whether the slice is on the platform.

Claim 36

Independent Claim 140 words

A method for transferring a slice for integrated circuits from a first location to a second location by remote control, comprising the steps of: picking up the slice from the first location on a platform of an effector; withdrawing the effector from the first location; tilting the platform away from the horizontal; sliding the slice toward a catcher of the effector responsive to said step of tilting, said catcher having at least two indexing points laterally spaced from the center line of sliding motion; abutting a side of the slice against the indexing points such that the slice is in a predetermined position relative to the effector; tilting the platform toward the horizontal; moving the effector to the second location; and placing the slice precisely at the second location using the predetermined position of the slice relative to the effector

Claim 37

Independent Claim 140 words

A method for transferring a slice for integrated circuits from a first location to a second location by remote control, comprising the steps of: picking up the slice from the first location on a platform of an effector; withdrawing the effector from the first location; tilting the platform away from the horizontal; sliding the slice toward a catcher of the effector responsive to said step of tilting, said catcher having at least two indexing points laterally spaced from the center line of sliding motion; abutting a side of the slice against the indexing points such that the slice is in a predetermined position relative to the effector; tilting the platform toward the horizontal; moving the effector to the second location; and placing the slice precisely at the second location using the predetermined position of the slice relative to the effector

Claim 38

Dependent Claim 67 words

The method of claim 32, wherein either said first or said second location has a post extending upwardly into the path of movement of the end effector to the location, said step of picking up the slice or of placing the slice including the further step of moving a plurality of spaced forks of the platform around the post such that the forks are underneath the slice.

Claim 39

Dependent Claim 70 words

The method of claim 32, wherein either said first or said second location has a disk surface disposed for supporting the slice, the diameter of the surface less than the diameter of the slice, said step of picking up the slice or of placing the slice including the further steps of moving a pair of spaced forks of the platform around the disk and subsequently raising or lowering the platform.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1994-04-01	1994-10-01	1995-04-02	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1998-04-01	1998-10-01	1999-04-02	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2002-04-01	2002-10-01	2003-04-02	$7700.00	Window Closed / Lapsed

Robot slice aligning end effector

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