Patent US4997773A successfully refreshed from Google Patents.
US4997773A
Expired / Lapsed
US
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Method of fabricating an image sensor
Assignee: Fujifilm Business Innovation Corp
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Filing: 1989-10-27
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Granted: 1991-03-05
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Expires: 2009-10-27
Abstract
Abstract An elongated image sensor comprises a plurality of light receiving elements of a sandwich structure arranged in a row and wherein a photoconductive layer is sandwiched by a lower electrode and a light-permeable upper electrode. In the image sensor, an overlapped region of the lower and upper electrodes for each of the light receiving elements is made larger in area than a light reception region and the light reception area (sensor area) is defined by a light shielding means or an insulating film having an opening of a predetermined size.
Inventors
- 👤 Mamoru Nobue
- 👤 Sadahiro Tei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:27
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/191; H10F39/198; H10F39/80; H10F39/805; H10F39/8053; H10F39/8057
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
64 words
A method of fabricating an image sensor of a sandwich structure in which a lower electrode, a photoconductive layer and a light-permeable upper electrode are formed sequentially on a substrate in this order, said method comprising first and second steps of forming said photoconductive layer, and a step of forming a light shielding film pattern after said first step and before said second step.
Claim 2
Independent Claim
64 words
A method of fabricating an image sensor of a sandwich structure in which a lower electrode, a photoconductive layer and a light-permeable upper electrode are formed sequentially on a substrate in this order, said method comprising first and second steps of forming said photoconductive layer, and a step of forming a light shielding film pattern after said first step and before said second step.
Claim 3
Dependent Claim
29 words
A method as set forth in claim 1, further comprising a step of etching to purify a surface of said substrate after formation of said light shielding film pattern.
Claim 4
Independent Claim
82 words
A method of fabricating an image sensor of a sandwich type wherein a photoconductive layer is sandwiched by a lower electrode and a light-permeable upper electrode, said method comprising the steps of: dividedly forming said lower electrode in a desired configuration pattern on a substrate a step of forming an insulating film having an opening on the lower electrode to define a light reception region, forming an intermediate electrode on said insulating film, forming said photoconductive layer, and forming said upper electrode.
Claim 5
Independent Claim
82 words
A method of fabricating an image sensor of a sandwich type wherein a photoconductive layer is sandwiched by a lower electrode and a light-permeable upper electrode, said method comprising the steps of: dividedly forming said lower electrode in a desired configuration pattern on a substrate a step of forming an insulating film having an opening on the lower electrode to define a light reception region, forming an intermediate electrode on said insulating film, forming said photoconductive layer, and forming said upper electrode.
Claim 6
Dependent Claim
37 words
A method as set forth in claim 3, wherein said insulating-film forming step includes the step of forming an insulating film all over a surface of said substrate and the first step of patterning said insulating film.
Claim 7
Dependent Claim
37 words
A method as set forth in claim 3, wherein said intermediate-electrode forming step includes the step of forming a photoconductive layer all over a surface of said substrate and the second step of patterning said photoconductive layer.
Claim 8
Dependent Claim
41 words
A method as set forth in claim 3, wherein said insulating-film forming step comprises the step of selectively forming a film on said lower electrode and said insulating-film patterning step is carried out by masking said intermediate electrode after formation thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-04 | 1994-09-03 | 1995-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-04 | 1998-09-03 | 1999-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-04 | 2002-09-03 | 2003-03-05 | $7700.00 | Window Closed / Lapsed |