Process for fabricating a heterojunction bipolar transistor

Claim 1

A process for fabricating a bipolar transistor comprising the steps of: (a) forming a first semiconductor layer of a first conductivity type; (b) forming a second semiconductor layer of a second conductivity type, opposite to the first conductivity type, on the first semiconductor layer; (c) forming a third semiconductor layer of the first conductivity type on the second semiconductor layer, the third semiconductor layer comprising a semiconductor forming a heterojunction with the second semiconductor layer and having a bandgap wider than that of the second semiconductor layer; (d) selectively removing a portion of the third semiconductor layer so that a portion of the second semiconductor layer is exposed and out overlaid by the third semiconductor layer; (e) doping an impurity into a region of the third semiconductor layer extending along an entire boundary between the third semiconductor layer and the exposed portion of the second semiconductor layer to convert the conductivity type of that region into the second conductivity; (f) forming a first electrode electrically connected with the first semiconductor layer; (g) forming a second electrode above and in contact with the second semiconductor layer in the exposed region; and (h) forming a third electrode above the third semiconductor layer.