US4992152A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reducing hillocking in aluminum layers formed on substrates
Assignee: Eastman Kodak Co
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Filing: 1990-04-04
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Granted: 1991-02-12
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Expires: 2010-04-04
Abstract
Abstract A method of reducing hillocks in an aluminum layer sputtered onto a substrate includes depositing a layer of WSi 2 on the aluminum layer having a thickness of between 1500-2500 Å and then sintering these bilayers.
Inventors
- 👤 Madhav Mehra
- 👤 Tonya D. Binga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5806; C23C14/06; C23C14/0682; C23C14/14; C23C14/16; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/40; H10W20/41; H10W20/425; Y; Y10; Y10S; Y10S438/00; Y10S438/937
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
79 words
A method of reducing hillocks occurring in the layer of aluminum sputtered onto a substrate consisting essentially of the steps of: (a) sputtering aluminum from a target onto the surface of a substrate to deposit a single layer of aluminum on such substrate having a thickness of between 6000-9000Å; (b) depositing a single layer of WSi 2 on top of the aluminum layer having a thickness of between 1500-2500Å; and (c) sintering the deposited aluminum and WSi 2 layers.
Claim 2
Independent Claim
79 words
A method of reducing hillocks occurring in the layer of aluminum sputtered onto a substrate consisting essentially of the steps of: (a) sputtering aluminum from a target onto the surface of a substrate to deposit a single layer of aluminum on such substrate having a thickness of between 6000-9000Å; (b) depositing a single layer of WSi 2 on top of the aluminum layer having a thickness of between 1500-2500Å; and (c) sintering the deposited aluminum and WSi 2 layers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-11 | 1994-08-13 | 1995-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-11 | 1998-08-13 | 1999-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-11 | 2002-08-13 | 2003-02-12 | $7700.00 | Window Closed / Lapsed |