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US4983252A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for producing printed circuit board

Assignee: Mitsubishi Electric Corp
•
Filing: 1989-04-10
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Granted: 1991-01-08
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Expires: 2009-04-10
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Abstract

Abstract In a process for fabricating a printed circuit board, a positive resist layer is electrodeposited on a copper clad laminate to ensure that the walls of through-holes in the substrate are completely coated with the resist, or alternatively, a film having a positive resist layer coated thereon is thermocompressed onto the copper clad laminate with the film being in contract with the latter, so as to cover both top and bottom of each through-hole. By subsequent treatments including resist exposure, development, copper foil etching and resist stripping, a high-density wiring pattern can be formed on the substrate in a uniform and consistent way even if through-holes exist in the substrate.

Inventors

  • 👤 Katsue Masui
  • 👤 Isao Kobayashi
  • 👤 Shigeru Kubota
  • 👤 Toshimoto Moriwaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 15:47
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; G; G03; G03F; G03F7/00; G03F7/16; G03F7/168; G03F7/161; H05K3/02; H05K3/06; H05K3/061; H05K3/064; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09581; H05K2203/00; H05K2203/09; H05K2203/092; H05K2203/10; H05K2203/107; H05K2203/13; H05K2203/1333; H05K2203/135; H05K3/0094; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 90 words
A process for producing a printed circuit board which comprises the steps of: depositing a positive photoresist of a vinyl polymer on a copper clad laminate thereby forming a positive resist layer; exposing a predetermined area of the positive resist layer to actinic radiation without a photomask and removing the exposed positive resist layer, thereby forming a photoresist pattern; etching copper from the surface of the copper clad liminate using the photoresist pattern as an etching resist thereby producing a conductor circuit pattern; and removing the non-exposed positive resist layer.
Claim 2
Dependent Claim 90 words
A process for producing a printed circuit board which comprises the steps of: depositing a positive photoresist of a vinyl polymer on a copper clad laminate thereby forming a positive resist layer; exposing a predetermined area of the positive resist layer to actinic radiation without a photomask and removing the exposed positive resist layer, thereby forming a photoresist pattern; etching copper from the surface of the copper clad liminate using the photoresist pattern as an etching resist thereby producing a conductor circuit pattern; and removing the non-exposed positive resist layer.
Claim 3
Dependent Claim 49 words
A process as set forth in claim 1 wherein an electron beam or a laser light is used for exposing, having a wavelength in the range of 200-400 nm, and the positive photoresist comprises a vinyl polymer with a molecular weight ranging from 5×10 3 to 1×10 6 .
Claim 4
Dependent Claim 17 words
A process in accordance with claim 1 wherein the molecular weight of said vinyl polymer is 5,000-1,000,000.
Claim 5
Dependent Claim 14 words
A process in accordance with claim 1 wherein said copper clad laminate has through-holes.
Claim 6
Dependent Claim 98 words
A process for producing a printed circuit board which comprises the steps of: coating a polymeric positive resist layer of a vinyl polymer on a transparent or translucent film and thermocompressing the film onto a copper clad laminate with the positive photoresist layer contacting the latter; exposing a predetermined area of said photoresist layer to actinic radiation without a photomask; stripping said film; removing the exposed photoresist layer to form a photoresist pattern; etching copper from the surface of the copper clad laminate using the photoresist pattern as an etching resist; and removing the non-exposed positive resist layer.
Claim 7
Dependent Claim 98 words
A process for producing a printed circuit board which comprises the steps of: coating a polymeric positive resist layer of a vinyl polymer on a transparent or translucent film and thermocompressing the film onto a copper clad laminate with the positive photoresist layer contacting the latter; exposing a predetermined area of said photoresist layer to actinic radiation without a photomask; stripping said film; removing the exposed photoresist layer to form a photoresist pattern; etching copper from the surface of the copper clad laminate using the photoresist pattern as an etching resist; and removing the non-exposed positive resist layer.
Claim 8
Dependent Claim 49 words
A process as set forth in claim 5 wherein an electron beam or a laser light is used for exposing, having a wavelength in the range of 200-400 nm, and the positive photoresist comprises a vinyl polymer with a molecular weight ranging from 5×10 3 to 1×10 6 .
Claim 9
Dependent Claim 17 words
A process in accordance with claim 5 wherein the molecular weight of said vinyl polymer is 5,000-1,000,000.
Claim 10
Dependent Claim 14 words
A process in accordance with claim 5 wherein said copper clad laminate has through-holes.
Claim 11
Dependent Claim 74 words
A process for producing a printed circuit board which comprises the steps of: electrodepositing a solution containing vinyl polymer on a copper clad laminate thereby forming a positive resist layer; exposing a predetermined area of the positive resist layer to actinic radiation without a photomask thereby forming a photoresist pattern; etching copper from the surface of the copper clad laminate using the photoresist pattern as an etching resist thereby producing a conductor circuit pattern.
Claim 12
Dependent Claim 74 words
A process for producing a printed circuit board which comprises the steps of: electrodepositing a solution containing vinyl polymer on a copper clad laminate thereby forming a positive resist layer; exposing a predetermined area of the positive resist layer to actinic radiation without a photomask thereby forming a photoresist pattern; etching copper from the surface of the copper clad laminate using the photoresist pattern as an etching resist thereby producing a conductor circuit pattern.
Claim 13
Dependent Claim 77 words
A process for producing a printed circuit board which comprises the steps of: depositing a positive photoresist of a vinyl polymer on a copper clad laminate; exposing the positive photoresist to actinic radiation and developing it thereby directly forming the photoresist pattern without using negative masks; etching copper from the surface of the copper clad laminate with the photoresist pattern being used as an etching resist; and removing the photoresist pattern thereby forming a conductor circuit pattern.
Claim 14
Dependent Claim 77 words
A process for producing a printed circuit board which comprises the steps of: depositing a positive photoresist of a vinyl polymer on a copper clad laminate; exposing the positive photoresist to actinic radiation and developing it thereby directly forming the photoresist pattern without using negative masks; etching copper from the surface of the copper clad laminate with the photoresist pattern being used as an etching resist; and removing the photoresist pattern thereby forming a conductor circuit pattern.
Claim 15
Dependent Claim 94 words
A process for producing a printed circuit board which comprises the steps of: coating a positive photoresist of a vinyl polymer on a transparent or translucent film; thermocompressing the film onto the copper clad laminate with the coated positive photoresist contacting the latter; exposing the positive photoresist to actinic radiation and developing it thereby directly forming a photoresist pattern without using negative masks; etching copper from the surface of the copper clad laminate with the photoresist pattern being used as an etching resist; and removing the photoresist pattern thereby forming a conductor circuit pattern.
Claim 16
Dependent Claim 94 words
A process for producing a printed circuit board which comprises the steps of: coating a positive photoresist of a vinyl polymer on a transparent or translucent film; thermocompressing the film onto the copper clad laminate with the coated positive photoresist contacting the latter; exposing the positive photoresist to actinic radiation and developing it thereby directly forming a photoresist pattern without using negative masks; etching copper from the surface of the copper clad laminate with the photoresist pattern being used as an etching resist; and removing the photoresist pattern thereby forming a conductor circuit pattern.
Claim 17
Dependent Claim 32 words
A process as set forth in claim 1 wherein the step of exposing includes exposing with an electron beam or a laser light having a wavelength in the range of 200-400 nm.
Claim 18
Dependent Claim 19 words
A process as set forth in claim 12 wherein said wavelength range is in a range of 250-350 nm.
Claim 19
Dependent Claim 32 words
A process as set forth in claim 5 wherein the step of exposing includes exposing with an electron beam or a laser light having a wavelength in the range of 200-400 nm.
Claim 20
Dependent Claim 19 words
A process as set forth in claim 14 wherein said wavelength range is in a range of 250-350 nm.

References Cited (Backward Citations)

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US4521262A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-01-07 1994-07-09 1995-01-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-01-07 1998-07-09 1999-01-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-01-07 2002-07-09 2003-01-08 $7700.00 Window Closed / Lapsed

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