Patent US4982226A successfully refreshed from Google Patents.
US4982226A
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US
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Exposure device
Assignee: Mitsubishi Electric Corp
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Filing: 1988-09-20
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Granted: 1991-01-01
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Expires: 2008-09-20
Abstract
Abstract An exposure device includes a light source, means for transmitting radiation from the light source to the surface of a photosensitive film, and photosensitive information outputting means for measuring and outputting information which represents the state of exposure of the surface of the photosensitive film. A suitable exposure can be determined by detecting changes in the properties of the resist. In consequence, exposure can be adjusted to fit the exposed state of the photosensitive film which would be impossible in the prior art. Further, variations that occur in exposure can be decreased, and yield can be improved.
Inventors
- 👤 Katsunori Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/20
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
185 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having light reflective characteristics that change during the reaction, comprising: a first light source for emitting light for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light from the first light source; means for controllably transmitting the light from the first light source to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising a second light source for emitting light having a controlled characteristic for impinging upon and being reflected from the selected portion of the film and photosensor means for receiving light from said second light source and reflected from the film, for sensing changes in the controlled characteristic of the reflected light, and for actuating said means for controllably transmitting to terminate exposure of the film to the light from the first light source when the controlled characteristic of the reflected light from the second light source stablizes.
Claim 2
Independent Claim
185 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having light reflective characteristics that change during the reaction, comprising: a first light source for emitting light for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light from the first light source; means for controllably transmitting the light from the first light source to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising a second light source for emitting light having a controlled characteristic for impinging upon and being reflected from the selected portion of the film and photosensor means for receiving light from said second light source and reflected from the film, for sensing changes in the controlled characteristic of the reflected light, and for actuating said means for controllably transmitting to terminate exposure of the film to the light from the first light source when the controlled characteristic of the reflected light from the second light source stablizes.
Claim 3
Dependent Claim
22 words
The device according to claim 1 wherein the controlled characteristic is wavelength and the photosensor means is responsive to changes in wavelength.
Claim 4
Dependent Claim
22 words
The device according to claim 1 wherein the controlled characteristic is intensity and the photosensor means is responsive to changes in intensity.
Claim 5
Dependent Claim
49 words
The device according to claim 1 wherein said light transmitting means includes a mask and a lens system disposed on a side of said mask opposite said first light source, said lens system condensing and focusing the light from the first light source which has passed through said mask.
Claim 6
Independent Claim
172 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having ultrasonic wave characteristics that change during the reaction, comprising: a light source for emitting light for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light; means for controllably transmitting the light from the light source to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising ultrasonic wave source means for emitting ultrasonic waves having a controlled characteristic for impinging upon and being reflected from the selected portion of the film exposed to the light and ultrasonic wave detecting means for receiving ultrasonic waves reflected from the film, for sensing changes in the controlled characteristic of the reflected ultrasonic waves, and for actuating said means for controllably transmitting to terminate exposure of the film to the light when the controlled characteristic of the reflected ultrasonic waves stabilizes.
Claim 7
Independent Claim
172 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having ultrasonic wave characteristics that change during the reaction, comprising: a light source for emitting light for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light; means for controllably transmitting the light from the light source to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising ultrasonic wave source means for emitting ultrasonic waves having a controlled characteristic for impinging upon and being reflected from the selected portion of the film exposed to the light and ultrasonic wave detecting means for receiving ultrasonic waves reflected from the film, for sensing changes in the controlled characteristic of the reflected ultrasonic waves, and for actuating said means for controllably transmitting to terminate exposure of the film to the light when the controlled characteristic of the reflected ultrasonic waves stabilizes.
Claim 8
Dependent Claim
47 words
The device according to claim 5 wherein said light transmitting means includes a mask and a lens system disposed on a side of said mask opposite said light source, said lens system condensing and focusing the light from said light source which has passed through said mask.
Claim 9
Dependent Claim
24 words
The device according to claim 5 wherein the controlled characteristic is wavelength and the ultrasonic wave detecting means is responsive to changes in wavelength.
Claim 10
Dependent Claim
24 words
The device according to claim 5 wherein the controlled characteristic is intensity and the ultrasonic wave detecting means is responsive to changes in intensity.
Claim 11
Independent Claim
147 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having light reflective characteristics that change during the reaction, comprising: a light source for emitting light having a controlled characteristic and for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light; means for controllably transmitting the light to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising photosensor means disposed between said means for transmitting and the film for receiving light reflected from the film, for sensing changes in the controlled characteristic of the reflected light, and for actuating said means for controllably transmitting to terminate exposure of the film to the light when the controlled characteristic of the reflected light stabilizes.
Claim 12
Independent Claim
147 words
A device for controllably exposing a portion of a photosensitive film to light to produce a photochemical reaction in the exposed portion of the film, the film having light reflective characteristics that change during the reaction, comprising: a light source for emitting light having a controlled characteristic and for producing a photochemical reaction in a portion of a photosensitive film that is exposed to the light; means for controllably transmitting the light to impinge upon, expose, and cause a photochemical reaction in a selected portion of the film; and control means comprising photosensor means disposed between said means for transmitting and the film for receiving light reflected from the film, for sensing changes in the controlled characteristic of the reflected light, and for actuating said means for controllably transmitting to terminate exposure of the film to the light when the controlled characteristic of the reflected light stabilizes.
Claim 13
Dependent Claim
47 words
The device according to claim 9 wherein said light transmitting means includes a mask and a lens system disposed on a side of said mask opposite said light source, said lens system condensing and focusing the light from said light source which has passed through said mask.
Claim 14
Dependent Claim
22 words
The device according to claim 9 wherein the controlled characteristic is wavelength and the photosensor means is responsive to changes in wavelength.
Claim 15
Dependent Claim
22 words
The device according to claim 9 wherein the controlled characteristic is intensity and the photosensor means is responsive to changes in intensity.
References Cited (Backward Citations)
US4255046A
Cited
US4712910A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |