US4978437A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of applying optical coatings of silicon compounds by cathode sputtering, and a sputtering cathode for the practice of the method
Assignee: Leybold AG
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Filing: 1987-01-27
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Granted: 1990-12-18
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Expires: 2007-01-27
Abstract
Abstract Method of applying optical coatings of silicon compounds to substrates by reactive cathode sputtering of siliceous target materials. To solve the problem of improving the utilization of the target material and eliminating the blowout of particles from the target, the target of the invention is a polycrystalline silicon casting of at least 99% silicon containing dopants from the group, boron, antimony, phosphorus and arseic, and it is sputtered by direct current in an atomsphere containing the reaction gas.
Inventors
- 👤 Peter Wirz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:45
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
93 words
Method for applying optical coatings of compounds of silicon to substrates by reactive cathode sputtering of siliceous target materials, comprising: sputtering as the target material a cast and solidified-from-the-molten-state polycrystalline silicon formed body of at least 99% silicon with at least one dopant selected from the group consisting of boron, antimony, phosphorus and arsenic, said silicon formed body containing said at least one dopant only in the range such that said silicon formed body has a specific resistance of 0.5 to 10 ohms×centimeter by direct current in an atmosphere containing the reaction gas.
Claim 2
Dependent Claim
93 words
Method for applying optical coatings of compounds of silicon to substrates by reactive cathode sputtering of siliceous target materials, comprising: sputtering as the target material a cast and solidified-from-the-molten-state polycrystalline silicon formed body of at least 99% silicon with at least one dopant selected from the group consisting of boron, antimony, phosphorus and arsenic, said silicon formed body containing said at least one dopant only in the range such that said silicon formed body has a specific resistance of 0.5 to 10 ohms×centimeter by direct current in an atmosphere containing the reaction gas.
Claim 3
Dependent Claim
92 words
Sputtering cathode as a target for applying an optical coating to a substrate comprising: a formed body of siliceous material as a target for applying an optical coating to a substrate, the target comprising a cast and solidified-from-the-molten-state polycrystalline silicon formed body of at least 99% silicon with at least one dopant selected from the group consisting of boron, antimony, phosphorus and arsenic, said silicon formed body containing said at least one dopant only in the range such that said silicon formed body has a specific resistance of 0.5 to 10 ohms×centimeter.
Claim 4
Dependent Claim
92 words
Sputtering cathode as a target for applying an optical coating to a substrate comprising: a formed body of siliceous material as a target for applying an optical coating to a substrate, the target comprising a cast and solidified-from-the-molten-state polycrystalline silicon formed body of at least 99% silicon with at least one dopant selected from the group consisting of boron, antimony, phosphorus and arsenic, said silicon formed body containing said at least one dopant only in the range such that said silicon formed body has a specific resistance of 0.5 to 10 ohms×centimeter.
References Cited (Backward Citations)
FR2461763A1
Cited
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JPS57109325A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-17 | 1994-06-18 | 1994-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-17 | 1998-06-18 | 1998-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-17 | 2002-06-18 | 2002-12-18 | $7700.00 | Window Closed / Lapsed |