Vacuum container for cryogenically cooled electron device packaging

Claim 1

A vacuum container comprising: (a) an external encasement constituting a part of the boundary of the evacuated portion of the container and consisting of a generally cylindrical peripheral wall member and a cover member joining said peripheral wall member in squared relationship; (b) a center coldfinger module constituting another part of the boundary of the evacuated portion of the container and consisting of a tubular member, a solid body member and a tube member with said tubular member projecting axially into said peripheral wall member and having an open end which forms part of a hermetic seal to said tube member which joins said peripheral wall member in radially extending and generally coaxial relationship and with said solid body member being concentrically sealed into the other end of said tubular member and having two exposed faces in perpendicular relationship to the axis of said tubular member with the one face projected into the evacuated portion of the container and the other face situated in the non-evacuated portion within said tubular member; and (c) a carrier board member having two parallel faces one of which being disposed on said solid body member within the evacuated portion of the container in sealing relationship; the vacuum container being characterised by the fact that: (d) said solid body member consists of silicon, (e) said carrier board member consists of silicon, (f) said tubular member consists of a silicate glass, (g) said solid body member to tubular member seal, and is a silicon-glass seal (h) said carrier board member and solid body member disposition is a silicon-metal-silicon joint.