US4973883A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma processing apparatus with a lisitano coil
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-04-29
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Granted: 1990-11-27
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Expires: 2008-04-29
Abstract
Abstract A plasma processing apparatus and method is equipped with a vacuum chamber, helmholtz coils, a microwave generator and gas feeding systems. The microwave generator consists of a lisitano coil which is capable of emitting a microwave in the TE 011 mode. In the light of such a microwave, a high quality film can be deposited.
Inventors
- 👤 Naoki Hirose
- 👤 Takashi Inugima
- 👤 Toru Takayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 04:03
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/3222; H01J37/32431; H01J37/3266; H01J37/32678; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
116 words
A plasma processing apparatus comprising: a vacuum chamber in which is defined a reaction space; a microwave generator for emitting a microwave into said vacuum chamber; a first means for inducing a first magnetic field substantially parallel with the propagating direction of the magnetic field emitted from said generator; a holder for supporting an object to be processed in said reaction space; a vacuum pump for evacuating said vacuum chamber; and a gas feeding means for inputting a reactive gas to said reaction space, wherein said microwave generator consists of a Lisitano coil which is provided in said chamber in order to emit microwaves symmetrically around a center line normal to said holder and an oscillator.
Claim 2
Dependent Claim
116 words
A plasma processing apparatus comprising: a vacuum chamber in which is defined a reaction space; a microwave generator for emitting a microwave into said vacuum chamber; a first means for inducing a first magnetic field substantially parallel with the propagating direction of the magnetic field emitted from said generator; a holder for supporting an object to be processed in said reaction space; a vacuum pump for evacuating said vacuum chamber; and a gas feeding means for inputting a reactive gas to said reaction space, wherein said microwave generator consists of a Lisitano coil which is provided in said chamber in order to emit microwaves symmetrically around a center line normal to said holder and an oscillator.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1 wherein said Lisitano coil is adapted to emit a microwave in the TE 011 mode.
Claim 4
Dependent Claim
30 words
The apparatus of claim 1 further comprising second means for inducing a second magnetic field whose magnitude is stronger at a remoter position from the center of said reaction space.
Claim 5
Dependent Claim
35 words
The apparatus of claim 3 wherein said first magnetic field inducing means consists of Ioffe bars arranged around said reaction space and parallel with the propagation direction of the microwave emitted from said microwave generator.
Claim 6
Dependent Claim
21 words
The apparatus of claim 4 wherein said Ioffe bars are constituted by a plurality of coils arranged about said reaction chamber.
Claim 7
Dependent Claim
16 words
The apparatus of claim 4 wherein said second magnetic field inducing means are the helmholtz coils.
Claim 8
Dependent Claim
29 words
The apparatus of claim 6 wherein said Ioffe bars are a plurality of permanent magnet rods, each having its magnetic moment along the circumferential direction of said helmholtz coils.
Claim 9
Dependent Claim
18 words
The apparatus of claim 7 wherein the senses of the magnetic moments of the Ioffe bars are alternating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-26 | 1994-05-28 | 1994-11-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-26 | 1998-05-28 | 1998-11-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-26 | 2002-05-28 | 2002-11-27 | $7700.00 | Window Closed / Lapsed |