US4438368A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma treating apparatus
Assignee: Mitsubishi Electric Corp
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Filing: 1981-10-28
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Granted: 1984-03-20
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Expires: 2001-10-28
Abstract
Abstract A plasma treating apparatus includes: an air-core coil for generating a static magnetic field which is axially uniform and a high-frequency waveguide for generating a high-frequency electromagnetic field which is irregular in the axial direction of the air-core coil. A plasma generating glass tube is disposed in the high-frequency waveguide and adapted to be supplied with a gas and a plasma reaction bath held under a vacuum for receiving the plasma flow which is generated axially in the glass tube. A substrate platform is disposed in the reaction bath for supporting a substrate to be treated at a right angle with respect to the plasma flow. There is also included a magnetic field generating coil disposed outside of said reaction bath for shaping the plasma.
Inventors
- 👤 Haruhiko Abe
- 👤 Hiroshi Harada
- 👤 Masahiko Denda
- 👤 Koichi Nagasawa
- 👤 Yoshio Kono
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:59
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/513; C23C8/00; C23C8/06; C23C8/36; C23F; C23F1/00; C23F4/00; H01J37/32009; H01J37/32357; H01J37/3266; H01J37/32678; H10; H10P; H10P50/00
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
136 words
A plasma treating apparatus comprising: an air-core coil for generating a static magnetic field which is axially uniform; a high-frequency waveguide for generating a high-frequency electromagnetic field which is irregular in the axial direction of said air-core coil; a plasma generating glass tube disposed in said high-frequency waveguide and adapted to be supplied with a gas whereby said electromagnetic field and said magnetic field cause an axial acceleration plasma flow in said tube; a plasma reaction bath held under a vacuum for receiving said plasma flow which is generated axially in said glass tube; a substrate platform disposed in said reaction bath for supporting a substrate to be treated at a right angle with respect to the plasma flow; and a magnetic field generating coil disposed outside of said reaction bath for shaping said plasma flow.
Claim 2
Dependent Claim
136 words
A plasma treating apparatus comprising: an air-core coil for generating a static magnetic field which is axially uniform; a high-frequency waveguide for generating a high-frequency electromagnetic field which is irregular in the axial direction of said air-core coil; a plasma generating glass tube disposed in said high-frequency waveguide and adapted to be supplied with a gas whereby said electromagnetic field and said magnetic field cause an axial acceleration plasma flow in said tube; a plasma reaction bath held under a vacuum for receiving said plasma flow which is generated axially in said glass tube; a substrate platform disposed in said reaction bath for supporting a substrate to be treated at a right angle with respect to the plasma flow; and a magnetic field generating coil disposed outside of said reaction bath for shaping said plasma flow.
Claim 3
Dependent Claim
37 words
A plasma treating apparatus as set forth in claim 1, further comprising a plasma controlling grid disposed in said plasma reaction bath at one of a right angle and in parallel with respect to the plasma flow.
References Cited (Backward Citations)
US2817045A
Cited
US2837693A
Cited
US3313979A
Cited
US3280364A
Cited
US3541372A
Cited
US3906892A
Cited
US3911318A
Cited
US3872349A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-20 | 1987-09-19 | 1988-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-20 | 1991-09-19 | 1992-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-20 | 1995-09-19 | 1996-03-20 | $7700.00 | Window Closed / Lapsed |