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US4960728A
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Homogenization anneal of II-VI compounds
Assignee: Texas Instruments Inc
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Filing: 1988-10-11
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Granted: 1990-10-02
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Expires: 2008-10-11
Abstract
Abstract Films of Hg1-xCdxTe grown at low temperatures by MBE or MOCVD are homogenized by annealing at about 350 DEG C. for 1.25 to 3 hours.
Inventors
- 👤 Herbert F. Schaake
- 👤 Roland J. Koestner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:16
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/90; Y; Y10; Y10S; Y10S148/00; Y10S148/003; Y10S148/015; Y10S148/064; Y10S148/097; Y10S438/00; Y10S438/902
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
89 words
A homogenization anneal process for group II-VI compound semiconductor films, comprising the steps of: (a) providing a substrate of a first group II-VI semiconductor material; (b) providing a film of a second group II-VI semiconductor material on said substrate at a temperature below about 300 degrees C.; and (c) annealing said substrate with said film thereon at a temperature in the range of from about 300 to about 450 degrees C. for a time to provide lateral homogenization of said film but limited interdiffusion of said film and substrate.
Claim 2
Dependent Claim
89 words
A homogenization anneal process for group II-VI compound semiconductor films, comprising the steps of: (a) providing a substrate of a first group II-VI semiconductor material; (b) providing a film of a second group II-VI semiconductor material on said substrate at a temperature below about 300 degrees C.; and (c) annealing said substrate with said film thereon at a temperature in the range of from about 300 to about 450 degrees C. for a time to provide lateral homogenization of said film but limited interdiffusion of said film and substrate.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein: (a) said second group II-VI semiconductor material is Hg 1-x Cd x Te.
Claim 4
Dependent Claim
36 words
The method of claim 2, further including: (a) providing a cap on said film of a third group II-VI material, (b) said annealing being at about 350 degrees C. and for about one to three hours.
Claim 5
Dependent Claim
25 words
The method of claim 3, wherein: (a) said cap is Hg 1-y Cd y Te with 1≧y>x and of thickness less than about 3,000 Å.
Claim 6
Dependent Claim
34 words
The method of claim 1, further comprising the step of: (a) after step (c), annealing said substrate with film in a mercury ambient at a second low temperature to render said film n type.
Claim 7
Independent Claim
98 words
A method of reducing nonuniform carrier concentrations and mobilities in a group II-VI semiconductor compound, comprising the steps of: (a) providing a surface of a first material comprising a first semiconductor compound; (b) growing under low temperature conditions less than about 300 degrees C. a second crystalline film comprising said group II-VI compound on said surface; and (c) annealing said film at a temperature from about 300 degrees C. to about 450 degrees C. for a sufficient time to reduce nonuniform carrier concentrations and mobilities in directions along an interface between said first film and said second material.
Claim 8
Independent Claim
98 words
A method of reducing nonuniform carrier concentrations and mobilities in a group II-VI semiconductor compound, comprising the steps of: (a) providing a surface of a first material comprising a first semiconductor compound; (b) growing under low temperature conditions less than about 300 degrees C. a second crystalline film comprising said group II-VI compound on said surface; and (c) annealing said film at a temperature from about 300 degrees C. to about 450 degrees C. for a sufficient time to reduce nonuniform carrier concentrations and mobilities in directions along an interface between said first film and said second material.
Claim 9
Dependent Claim
23 words
The method of claim 6 wherein the temperature of said first material is less than 300 C. when said second film is grown.
Claim 10
Dependent Claim
15 words
The method of claim 6 wherein said second film is grown by molecular beam epitaxy.
Claim 11
Dependent Claim
22 words
The method of claim 8 wherein the temperature of said first material is approximately 200 C. when said second film is grown.
Claim 12
Dependent Claim
23 words
The method of claim 9 wherein said first material is at a temperature which results in growth of a p-type conductivity first film.
Claim 13
Dependent Claim
22 words
The method of claim 10 wherein the temperature of said first material is approximately 210 C. when said second film is grown.
Claim 14
Dependent Claim
22 words
The method of claim 9 wherein the temperature of said first material is approximately 190 C. when said second film is grown.
Claim 15
Dependent Claim
13 words
The method of claim 6 wherein said second film is grown by MOCVD.
Claim 16
Dependent Claim
13 words
The method of claim 6 wherein said II-VI compound is Hg 1-x CdTe.
Claim 17
Dependent Claim
51 words
The method of claim 6 wherein the anneal of step (b) is performed for a time duration, t, which is consistent with the relation t=d 2 /D, wherein d is the mean spacing between regions of comparable carrier concentrations and mobilities, and D is the interdiffussion coefficient for said first film.
Claim 18
Dependent Claim
11 words
The method of claim 15 wherein d is approximately 3000 Angstroms.
Claim 19
Dependent Claim
28 words
The method of claim 6 wherein the anneal of step (b) is performed for time and temperature conditions consistent with data presented in Table I of the Specification.
Claim 20
Dependent Claim
23 words
The method of claim 6 further comprising the step of performing an anneal to convert said first film to an opposite conductivity type.
Claim 21
Dependent Claim
22 words
The method of claim 10 further comprising the step of performing an anneal to convert said first film to n-type conductivity material.
Claim 22
Dependent Claim
83 words
A homogenization anneal for group II-VI semiconductor compound films, comprising the steps of: (a) providing a growth plane of a first group II-VI semiconductor material; (b) growing a film of group II-VI semiconductor material of desired conductivity type by molecular beam epitaxy on said growth plane; and (c) annealing the film at a temperature of 350° C. for at least 1.25 hours to reduce nonuniform carrier concentrations within the film in directions along the resulting interface between the film and the growth plane.
Claim 23
Dependent Claim
83 words
A homogenization anneal for group II-VI semiconductor compound films, comprising the steps of: (a) providing a growth plane of a first group II-VI semiconductor material; (b) growing a film of group II-VI semiconductor material of desired conductivity type by molecular beam epitaxy on said growth plane; and (c) annealing the film at a temperature of 350° C. for at least 1.25 hours to reduce nonuniform carrier concentrations within the film in directions along the resulting interface between the film and the growth plane.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-01 | 1994-04-02 | 1994-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-01 | 1998-04-02 | 1998-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-01 | 2002-04-02 | 2002-10-02 | $7700.00 | Window Closed / Lapsed |