Silicon membrane micro-scale

Claim 3

The method of claim 1 further comprising transducing the displacing of the capacitive plate to an electrical signal and wherein the electrically sensing the capacitive change comprises sensing the signal.

Claim 4

The method of claim 1 further comprising subjecting the silicon membrane to the force vector of the weight and bending the silicon membrane and wherein the displacing the capacitive plate comprises changing capacitor plate separation.

Claim 5

The method of claim 1 wherein the measuring comprises sensing weight over a wide range through a transduced electrical capacitive change.

Claim 8

The method of claim 5 wherein the establishing, sensing and comparing comprise establishing, sensing and comparing frequency.

Claim 11

The method of claim 7 wherein the applying voltage comprises applying d.c. voltage.

Claim 12

The method of claim 7 wherein the indicating weight comprises indicating weight values which are inversely related to measured values of applied voltage.

Claim 13

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a silicon membrane for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, and wherein the capacitance measuring means determines spring constant of the silicon membrane.

Claim 14

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a silicon membrane for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, and wherein the capacitance measuring means determines spring constant of the silicon membrane.

Claim 15

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, wherein the first capacitive plate and the membrane means comprise an integrally formed plate, a reduced thickness area surounding the plate and forming the membrane means, and a relatively thick portion outside of the membrane means for supporting the membrane means.

Claim 16

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, wherein the first capacitive plate and the membrane means comprise an integrally formed plate, a reduced thickness area surounding the plate and forming the membrane means, and a relatively thick portion outside of the membrane means for supporting the membrane means.

Claim 17

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, wherein the second capacitive plate comprises a thin film opposite the first capacitive plate and wherein the support means for holding the second capacitive plate in a fixed position comprises a glass block having a well in which the thin film plate is positioned and having a raised outer periphery for supporting the outer support of the integral first capacitive plate and membrane means.

Claim 18

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, wherein the second capacitive plate comprises a thin film opposite the first capacitive plate and wherein the support means for holding the second capacitive plate in a fixed position comprises a glass block having a well in which the thin film plate is positioned and having a raised outer periphery for supporting the outer support of the integral first capacitive plate and membrane means.

Claim 19

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, comprising voltage applying means connected to the plates for moving the first plate with applied voltage, voltage controlling means connected to the voltage applying means for controlling level of applied voltage, reference means for providing a reference capacitive value, comparator means connected to the reference means and to the measuring means for comparing the reference capacitance and the measured capacitance and connected to the controlling means for changing the voltage with the controlling means until the reference and measured capacitance are similar, voltage sensing means connected to the voltage applying means for sensing applied voltage and weight indicating means connected to the voltage sensing means for indicating weight as a function of sensed voltage.

Claim 20

Micro-scale apparatus for measurement of weight, comprising first and second capacitive plates, a membrane means for supporting the first plate and fixed means for supporting the second plate, weight-receiving means on the first plate, circuit means connected to the first and second plates and capacitance measuring means connected to the circuit means, whereby displacement of the first capacitive plate by gravitational force vector of a weight on the weight-receiving means is transduced to an electrically sensed capacitive change, comprising voltage applying means connected to the plates for moving the first plate with applied voltage, voltage controlling means connected to the voltage applying means for controlling level of applied voltage, reference means for providing a reference capacitive value, comparator means connected to the reference means and to the measuring means for comparing the reference capacitance and the measured capacitance and connected to the controlling means for changing the voltage with the controlling means until the reference and measured capacitance are similar, voltage sensing means connected to the voltage applying means for sensing applied voltage and weight indicating means connected to the voltage sensing means for indicating weight as a function of sensed voltage.

Claim 21

A micro-scale apparatus for measuring small weights comprising a block having a central plate receiver formed in an upper surface thereof and having upper outer surfaces surrounding the plate receiver, a fixed capacitive plate fixed centrally in the receiver, a dynamic plate member comprising a central proof mass body, a thin membrane means surrounding the body and a relatively thick supporting means surrounding the thin membrane means, whereby the supporting means supports the dynamic plate member on the block and supports the membrane means and the membrane means supports the body spaced from the fixed plate.

Claim 22

A micro-scale apparatus for measuring small weights comprising a block having a central plate receiver formed in an upper surface thereof and having upper outer surfaces surrounding the plate receiver, a fixed capacitive plate fixed centrally in the receiver, a dynamic plate member comprising a central proof mass body, a thin membrane means surrounding the body and a relatively thick supporting means surrounding the thin membrane means, whereby the supporting means supports the dynamic plate member on the block and supports the membrane means and the membrane means supports the body spaced from the fixed plate.

Claim 23

The micro-scale apparatus of claim 14 wherein the body, membrane means and supporting means are formed of a unitary silicon member.

Claim 24

The micro-scale apparatus of claim 14 wherein the block is a glass block and the plate receiver is an outward opening well in the block and wherein the fixed plate is fixed on a bottom of the well.

Claim 25

The micro-scale apparatus of claim 14 wherein the dynamic plate membe*r is a silicon member.

Claim 26

The micro-scale apparatus of claim 17 wherein the port means comprises means for flowing gas.

Claim 27

The micro-scale apparatus of claim 17 wherein the port means comprises a damping means with a length and cross section for providing a specific amount of damping of motion of the dynamic plate member displacement.

Claim 28

The micro-scale apparatus of claim 19 wherein the damping means comprises means for providing critical damping.

Claim 29

The micro-scale apparatus of claim 14 wherein the block contains a port means connected to the receiver for flowing fluid into and out of the receiver.

Claim 30

The apparatus of claim 14 wherein the membrane means comprises a controlled geometry and dimension membrane means changeable for affecting the micro-scale sensitivity and measurement range.

Claim 31

The apparatus of claim 14 wherein the supporting means for holding the dynamic plate member in a fixed position is silicon.

Claim 32

The apparatus of claim 14 wherein the block comprises a glass block and the receiver comprises a well in the glass block and wherein a depth of the well in the glass block is controlled for determining the micro-scale sensitivity and measurement range.