Capacitive pressure detector
Abstract
Abstract A capacitive pressure detector, comprising a plate-shaped base (13), a stationary capacitor plate (14) disposed on the base (13), an aneroid capsule (6) arranged in connection with the base (13) and proviced with an area (8) with a mobile capacitor plate facing the stationary capacitor plate (14) and changing its distance from the stationary capacitor disc (14) by the effect of pressure. On the plate-shaped base (13), a silicon plate (5) is disposed, into which a membrane-like middle portion (8) functioning as the mobile capacitor plate has been worked. On the silicon plate (5), a preferably plate-shaped cover structure (12) is hermetically disposed so that a basin space (6) of the aneroid capsule is formed between the cover structure (12) and said middle portion (8). The membrane-like middle portion (8) of the silicon plate (5) is connected to the edge portion of the silicon plate (5) by means of a relatively thin-walled collar structure (11) extending from the edge of the middle portion (8) to the proximity of the inner face of the cover structure (12).
Inventors
- 👤 Heikki T. Kuisma
Bibliographic Details
Claims Analysis
Total Claims: 7References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-09 | 1989-12-09 | 1990-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-09 | 1993-12-09 | 1994-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-09 | 1997-12-09 | 1998-06-10 | $7700.00 | Window Closed / Lapsed |