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US4959345A
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Method of adding oxygen into oxide superconducting materials by ion injection
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-04-27
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Granted: 1990-09-25
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Expires: 2008-04-27
Abstract
Abstract A method for manufacturing a superconducting device comprises the steps of forming a passivation film by photo chemical vapor deposition on the surface of an oxide superconducting material; and then adding oxygen into the oxide superconducting material by ion injection. This patent application is related to the copending U.S. Pat. application entitled "Method of Adding a Halogen Element Into Oxide Superconducting Materials by Ion Injection" Ser. No. 190,352, filed May 5, 1988, now U.S. Pat. No. 4,916,116.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:16
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0912; H10N60/0268; H10N60/0661; H10N60/0716; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/725; Y10S505/73
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
73 words
A method for manufacturing a superconducting device comprising the steps of: depositing a passivation film on the surface of an oxide superconducting material to substantially prevent escape of oxygen from said surface; and then adding oxygen through the passivation film into the oxide superconducting material by ion injection to compensate for any oxygen which may have escaped from the material so that the material will be superconducting throughout the bulk of the material.
Claim 2
Independent Claim
73 words
A method for manufacturing a superconducting device comprising the steps of: depositing a passivation film on the surface of an oxide superconducting material to substantially prevent escape of oxygen from said surface; and then adding oxygen through the passivation film into the oxide superconducting material by ion injection to compensate for any oxygen which may have escaped from the material so that the material will be superconducting throughout the bulk of the material.
Claim 3
Dependent Claim
22 words
The method of for manufacturing a superconducting device of claim 1, wherein said passivation film is formed by photo chemical vapor deposition.
Claim 4
Dependent Claim
17 words
The method for manufacturing a superconducting device of claim 1, wherein the film forms an insulating film.
Claim 5
Dependent Claim
28 words
The method for manufacturing a superconducting device of claim 1, wherein the film is one of the metal and semiconductor films which become an insulating film after oxidation.
Claim 6
Dependent Claim
29 words
The method for manufacturing a superconducting device of claim 4, wherein the film is made of one element selected from the group of aluminum, titanium, tantalum, copper, and silicon.
References Cited (Backward Citations)
JPS58164278A
Cited
US4548834A
Cited
US4481229A
Cited
US4470190A
Cited
US4585999A
Cited
US4624737A
Cited
JPS61168530A
Cited
USH39H
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |