Electron beam exposure method and apparatus

Claim 3

A method as claimed in claim 1, wherein said step (d) for depicting the pattern in the second exposure area by the step and repeat process is carried out after the entire first exposure area is exposed by the continuous stage moving process.

Claim 4

A method as claimed in claim 1, wherein when said step (d) determines that the exposure area of concern about to be exposed should be exposed by the step and repeat process, said step (d) for depicting said pattern by the step and repeat process is immediately carried out without proceeding to the next exposure area to be exposed by the continuous stage moving process.

Claim 5

A method as claimed in claim 1, wherein said step (a) of calculating pattern density includes the substep of calculating a number of shots corresponding to a number of times that the electron beam is repeatedly projected onto each of the exposures areas.

Claim 6

A method as claimed in claim 1, wherein each of the exposure areas corresponds to a main deflection field divided into a plurality of sub-deflection fields.

Claim 7

An electron beam exposure apparatus for depicting a pattern on a sample having a plurality of exposure areas by irradiating an electron beam onto the sample, said electron beam exposure apparatus comprising: a stage on which the sample is placed; electron beam generating means for generating the electron beam; deflection means, coupled to said electron beam generating means, for deflecting the electron beam generated by said electron beam generating means; deflection signal generating means, coupled to said deflection means, for providing said deflection means with a deflection signal based on pattern data relating to a pattern to be exposed; stage drive means, operatively connected to said stage, for driving said stage; and control means, operatively connected to said stage drive means and said deflection signal generating means, for discriminating whether or not a pattern density obtained from said pattern data is equal to or greater than a predetermined threshold value and supplying said stage drive means with a control signal for intermittently moving said stage when the obtained pattern density is equal to or greater than the predetermined threshold value and for supplying said stage drive means with said control signal for continuously moving said stage when the obtained pattern density is less than the predetermined threshold value.

Claim 8

An electron beam exposure apparatus for depicting a pattern on a sample having a plurality of exposure areas by irradiating an electron beam onto the sample, said electron beam exposure apparatus comprising: a stage on which the sample is placed; electron beam generating means for generating the electron beam; deflection means, coupled to said electron beam generating means, for deflecting the electron beam generated by said electron beam generating means; deflection signal generating means, coupled to said deflection means, for providing said deflection means with a deflection signal based on pattern data relating to a pattern to be exposed; stage drive means, operatively connected to said stage, for driving said stage; and control means, operatively connected to said stage drive means and said deflection signal generating means, for discriminating whether or not a pattern density obtained from said pattern data is equal to or greater than a predetermined threshold value and supplying said stage drive means with a control signal for intermittently moving said stage when the obtained pattern density is equal to or greater than the predetermined threshold value and for supplying said stage drive means with said control signal for continuously moving said stage when the obtained pattern density is less than the predetermined threshold value.

Claim 9

An electron beam exposure apparatus as claimed in claim 6, wherein said deflection means comprises: a main deflector; and a sub-deflector operatively connected to said main deflector, wherein said deflection signal comprises first and second deflection signals; wherein said deflection signal generating means comprises: first deflection signal generating means for supplying said first deflection signal with said main deflector; and second deflection signal generating means for supplying said second deflection signal with said sub-deflector; and wherein said apparatus further comprises: stage position detecting means, operatively connected to second stage, for generating coordinate data indicating a current position of said stage; first storage means, operatively connected to said stage, for storing said coordinate data indicating the current position of said stage; second storage means, operatively connected to said stage, for storing coordinate data of an objective position for said stage at which a center of each of said exposure areas defined by said pattern data coincides with a column center of said stage; coordinate data input register means, operatively connected to said control means, said second storage means and said first storage means, for receiving coordinate data of said objective position stored in said second storage means when the pattern density obtained from said pattern data to be exposed is equal to or greater than the predetermined threshold value and for receiving at a predetermined time, coordinate data indicating the current position stored in said first storage means when the pattern density obtained from said pattern data is less than the predetermined threshold value; first difference calculating means, operatively connected to said coordinate data input register means and said first storage means, for calculating a first difference between coordinate data supplied from said coordinate data input register means and coordinate data stored in said first storage means; second difference calculating means, operatively connected to said coordinate data input register means and said second storage means, for calculating a second difference between coordinate data supplied from said coordinate data input register means and coordinate data stored in said second storage means; first adjustment means, operatively connected to said second deflection signal generating means and said first difference calculating means, for adjusting said second deflection signal from said second deflection signal generating means in accordance with said first difference from said first difference calculating means; and second adjustment means, operatively connected to said first deflection signal generating means and said second difference calculating means, for adjusting said first deflection signal from said first deflection signal generating means in accordance with said second difference from said second difference calculating means.

Claim 10

An electron beam exposure apparatus as claimed in claim 7, wherein each of said exposure areas comprises a plurality of sub areas, and said predetermined time is a time when the exposure for each of said plurality of sub areas starts.

Claim 11

An electron beam exposure apparatus as claimed in claim 7, wherein when the pattern density is less than the predetermined threshold value, the coordinate data obtained at the predetermined time is input to said coordinate data input register means, and said sample is exposed by a continuous stage moving process for continuously moving said stage drive means, and wherein when the pattern density is equal to or greater than said predetermined threshold value, the coordinate data of said objective position is input to said coordinate data input register means, and said sample is exposed by a step and repeat process for intermittently moving said stage drive means.

Claim 12

An electron beam exposure apparatus as claimed in claim 9, wherein when said sample is exposed by the continuous stage moving process, said first difference calculating means calculates the first difference between coordinate data from said coordinate data input register means at said predetermined time and coordinate data from said first storage means during exposure, and wherein when said sample is exposed by the step and repeat process, said first difference calculating means calculates the first difference between coordinate data supplied from said coordinate data input register means at said predetermined time and coordinate data supplied from said first storage means during exposure.

Claim 13

An electron beam exposure apparatus as claimed in claim 9, wherein when said sample is exposed by the continuous stage moving process, said second difference calculating means calculates the second difference between coordinate data from said coordinate data input register means at said predetermined time and coordinate data from said second storage means, and wherein when said sample is exposed by the step and repeat process, said second difference calculating means calculates the second difference between coordinate data from said coordinate data input register means at said predetermined time and coordinate data from said second storage means.

Claim 14

An electron beam exposure apparatus as claimed in claim 6, wherein said control means calculates said pattern density by calculating the number of shots for every predetermined area included in said sample by using said pattern data used for depicting said pattern on said sample.

Claim 15

An electron beam exposure apparatus as claimed in claim 7, wherein said coordinate data input register means comprises an AND gate having a first input connected to said first storage means and a second input connected to said control means.

Claim 16

An electron beam exposure apparatus as claimed in claim 7, wherein said coordinate data input register means comprises: a register connected to said control means; an inverter connected to said control means; a first AND gate operatively connected to said control means; and a second AND gate operatively connected to said register; wherein said second storage means is coupled to said register through said first AND gate connected; and wherein said first storage means is coupled to said register through said second AND gate.

Claim 17

An electron beam exposure apparatus as claimed in claim 7, wherein said stage position detecting means and said first difference calculating means are synchronized with each other.