Method for drawing a pattern by charged beam and its apparatus

Claim 1

A charged beam drawing method for drawing a desired pattern on a specimen placed on a continuously moving table by using a major deflector with a large beam deflection width and a minor deflector with a small beam deflection width, said charged beam drawing method comprising the steps of: segmenting an area to be drawn into small areas within which the charged beam is deflectable; setting a major deflection position, as given by said major deflector for a small area; setting the correction data for minor deflection distortion, in connection with said major deflection position; drawing a pattern within said small area while correcting a minor deflection distortion on the basis of said correction data; feeding back to said major deflector the position data of said table when patterns are successively drawn in said small area, thereby to correct an incorrect displacement of the drawing position due to the movement of said table; interrupting said small area drawing by the minor deflector when said table moves from the position of said table when said small area drawing starts by a distance longer than a predetermined distance; resetting said major deflection position at a position allowing the drawing of the remaining patterns in said small area; resetting the minor deflection correction data in connection with the major deflection position after said major deflection position resetting; and drawing the remaining patterns in said small area.