Patent US4948624A successfully refreshed from Google Patents.
US4948624A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Etch resistant oxide mask formed by low temperature and low energy oxygen implantation
Assignee: Eastman Kodak Co
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Filing: 1989-04-12
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Granted: 1990-08-14
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Expires: 2009-04-12
Abstract
Abstract A method of forming oxide masks in silicon in which oxygen ions are implanted into the silicon.
Inventors
- 👤 Lydia Rivaud
- 👤 Gilbert Hawkins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:47
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/61; H10P50/00; H10P50/71
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
92 words
A method of forming an etch resistant oxide mask in polysilicon comprising the steps of: (a) forming an oxide gate layer on a silicon substrate; (b) depositing a conductive etchable polysilicon layer on the oxide gate layer; (c) chemically depositing an oxygen masking layer and patterning it with openings; and (d) selectively implanting oxygen ions with energies in a range between 0.1 and 35 keV through the opening into the polysilicon and at a temperature below 600° C. selected so that an oxide mask is formed on the surface of the polysilicon.
Claim 2
Independent Claim
92 words
A method of forming an etch resistant oxide mask in polysilicon comprising the steps of: (a) forming an oxide gate layer on a silicon substrate; (b) depositing a conductive etchable polysilicon layer on the oxide gate layer; (c) chemically depositing an oxygen masking layer and patterning it with openings; and (d) selectively implanting oxygen ions with energies in a range between 0.1 and 35 keV through the opening into the polysilicon and at a temperature below 600° C. selected so that an oxide mask is formed on the surface of the polysilicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-13 | 1994-02-12 | 1994-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-13 | 1998-02-12 | 1998-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-13 | 2002-02-12 | 2002-08-14 | $7700.00 | Window Closed / Lapsed |