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US4945220A Expired / Lapsed US ⏱️ 0.0 years remaining

Autofocusing system for microscope having contrast detection means

Assignee: Tencor Instruments Inc
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Filing: 1988-11-16
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Granted: 1990-07-31
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Expires: 2008-11-16
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Abstract

Abstract An autofocusing system for a microscope is disclosed. An autofocus target is placed between a colliminating lens and a relay lens of the microscope. The autofocus target contains a pattern of dark areas which are projected onto a specimen and reflected into a CCD camera array. The focus of the microscope is adjusted such that the variation in intensity of light through the pattern is maximized.

Inventors

  • 👤 Chester L. Mallory
  • 👤 Phillip D. Wasserman
  • 👤 Hung V. Pham
  • 👤 Barry G. Broome

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 21:38
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/24; G02B21/241; G02B21/244; G02B21/26

Claims Analysis

Total Claims: 31
Claim 1
Independent Claim 95 words
Apparatus for focusing a microscope comprising: means for projecting an area of varied light intensity through an objective of the microscope onto a specimen surface; means for measuring light intensity of an image reflected from said surface at a plurality of locations, said plurality of locations lying substantially along a path passing through said area of varied light intensity; means for determining a derivative of a factor related to said light intensity as a function of said location; and means for adjusting focus of said microscope until a variation in said derivative is substantially maximized.
Claim 2
Dependent Claim 95 words
Apparatus for focusing a microscope comprising: means for projecting an area of varied light intensity through an objective of the microscope onto a specimen surface; means for measuring light intensity of an image reflected from said surface at a plurality of locations, said plurality of locations lying substantially along a path passing through said area of varied light intensity; means for determining a derivative of a factor related to said light intensity as a function of said location; and means for adjusting focus of said microscope until a variation in said derivative is substantially maximized.
Claim 3
Dependent Claim 25 words
Apparatus as recited in claim 1 wherein said means for projecting an area of varied light intensity comprises a transparent plate containing an opaque area.
Claim 4
Dependent Claim 23 words
Apparatus as recited in claim 2 wherein said transparent plate is located between a colliminating lens and a relay lens of said microscope.
Claim 5
Dependent Claim 18 words
Apparatus as recited in claim 1 wherein said means for measuring light intensity comprises an electronic image sensor.
Claim 6
Dependent Claim 16 words
Apparatus as recited in claim 4 wherein said electronic image sensor is a charge coupled device.
Claim 7
Dependent Claim 33 words
Apparatus as recited in claim 1 wherein said variation is defined by an equation of the form: ##EQU2## where d i is said derivative at a location n is the number of locations.
Claim 8
Dependent Claim 20 words
Apparatus as recited in claim 6 wherein the term ##EQU3## may be assumed to be substantially zero and is neglected.
Claim 9
Dependent Claim 43 words
Apparatus as recited in claim 1 further comprising means for starting said microscope in an out of focus position, a direction of which is known, and means for moving said microscope towards focus while monitoring said light intensity at said plurality of locations.
Claim 10
Dependent Claim 26 words
Apparatus as recited in claim 8 further comprising means for passing peak variations in a derivative of said intensity which do not exceed a desired threshold.
Claim 11
Dependent Claim 19 words
Apparatus as recited in claim 9 further comprising means for passing said substantially maximized variation by a desired percentage.
Claim 12
Dependent Claim 15 words
Apparatus as recited in claim 10 wherein said desired percentage is about 5 to 10%.
Claim 13
Dependent Claim 45 words
Apparatus as recited in claim 9 wherein desired threshold is calculated by an equation of the form: T=C*A+K where: T is said threshold A is an average instantaneous voltage produced by pixels across a line of interest C is 4.55×10 -6 ±10% K is 35.58×±10%.
Claim 14
Dependent Claim 45 words
Apparatus as recited in claim 1 wherein said means for projecting an area of varied light intensity comprises means for filtering a wavelength of interest and said means for measuring light intensity comprises means for measuring an intensity of light at said wavelength of interest.
Claim 15
Dependent Claim 16 words
Apparatus as recited in claim 13 wherein said wavelength of interest is from infrared to ultraviolet.
Claim 16
Independent Claim 89 words
A method of focusing a microscope comprising: projecting at least one area of varied light intensity onto a sample surface through an objective of said microscope; measuring a factor related to intensity of the light at a plurality of locations, said plurality of locations lying along a path through an image of said area of varied light intensity; calculating a derivative of said factor related to said light intensity with respect to said location; and adjusting focus of the microscope until a variation in said derivative is substantially maximized.
Claim 17
Independent Claim 89 words
A method of focusing a microscope comprising: projecting at least one area of varied light intensity onto a sample surface through an objective of said microscope; measuring a factor related to intensity of the light at a plurality of locations, said plurality of locations lying along a path through an image of said area of varied light intensity; calculating a derivative of said factor related to said light intensity with respect to said location; and adjusting focus of the microscope until a variation in said derivative is substantially maximized.
Claim 18
Dependent Claim 42 words
The method as recited in claim 15 wherein the step of projecting an area of varied light intensity comprises a step of placing a transparent plate into an illumination beam of said microscope, said plate having at least one opaque area therein.
Claim 19
Dependent Claim 27 words
The method as recited in claim 16 wherein said plate is placed into said illumination beam between a colliminating lens and a relay lens of said microscope.
Claim 20
Dependent Claim 35 words
The method as recited in claim 15 wherein said variation is calculated with an equation of the form: ##EQU4## where: d i is said derivative at a location i n is the number of locations.
Claim 21
Dependent Claim 51 words
The method as recited in claim 15 wherein said step of adjusting further comprises the step of starting said microscope in an out of focus position, the direction of which is known and the step of moving said microscope towards focus while monitoring said light intensity at a plurality of locations.
Claim 22
Dependent Claim 23 words
The method as recited in claim 19 further comprising the step passing peaks in said variation which do not exceed a desired threshold.
Claim 23
Dependent Claim 149 words
The method as recited in claim 20 wherein the desired threshold is calculated with an equation of form: T32 C*A+K where T is said threshold A is an average instantaneous voltage produced by pixels across a line of interest C and K are constants determined by the steps of: (i) selecting a set of typical images (I) of varying brightness and contrast; (ii) for each image I i calculating a summation of squares of voltage along a line of pixels A i ; (iii) finding a peak value of variance P i ; (iv) for each image I 1 , recording A i and T i where T i is related to P i by an equation of the form P i /2; and (v) finding a best straight line through said P i and T i to determine C and K in an equation of the form T=C*A+K.
Claim 24
Dependent Claim 21 words
The method as recited in claim 19 further comprising the step of passing said substantially maximized variation by a desired percentage.
Claim 25
Dependent Claim 14 words
The method as recited in claim 22 wherein the desired percentage is about 10%.
Claim 26
Dependent Claim 46 words
The method as recited in claim 15 wherein the step of projecting at least one area of varied light intensity is a step of filtering light of a desired wavelength range and said intensity of light is an intensity of light in said desired wavelength range.
Claim 27
Dependent Claim 20 words
The method as recited in claim 24 wherein the desired wavelength range is selected from the group infrared and ultraviolet.
Claim 28
Dependent Claim 48 words
A microscope autofocusing kit comprising: means for projecting at least one area of varied light intensity onto a, sample surface; means for measuring light intensity at a plurality of locations through an image of said area of varied light intensity; means for maximizing a variation in said derivative.
Claim 29
Dependent Claim 48 words
A microscope autofocusing kit comprising: means for projecting at least one area of varied light intensity onto a, sample surface; means for measuring light intensity at a plurality of locations through an image of said area of varied light intensity; means for maximizing a variation in said derivative.
Claim 30
Dependent Claim 218 words
A microscope kit comprising: (A) an illumination system comprising (i) a lamp, (ii) a relay lens, (iii) a colliminating lens (iv) a glass plate having a plurality of opaque areas therein, said plate adapted to be positioned between said relay lens and said colliminating lens; (B) beam splitter for receiving a beam from said colliminating lens; (C) a microscope objective for receiving a beam from said beam splitter; (D) means for transmitting a reflected beam to a reflective aperture plate; (E) a spectrometer system adapted to receive a portion of a beam striking said reflective aperture plate; (F) lenses for re-imaging a remaining beam from said reflective aperture on a CCD array; (G) means for determining light intensity along a path of said CCD array, said path passing through an image of said opaque area; (H) a digital computer programmed to determine a variation in a derivative of parameter related to light intensity along said path; and (I) means for adjusting a focus of said microscope until; (i) said variation exceeds a threshold level calculated from an equation of the form: T=C*A+K where T is said threshold A is an average instantaneous voltage produced by pixels along said path C is 4.55×10 -6 ±10% K is 35.58±10% (ii) said variation passes a substantially maximized variation by about 10%.
Claim 31
Dependent Claim 218 words
A microscope kit comprising: (A) an illumination system comprising (i) a lamp, (ii) a relay lens, (iii) a colliminating lens (iv) a glass plate having a plurality of opaque areas therein, said plate adapted to be positioned between said relay lens and said colliminating lens; (B) beam splitter for receiving a beam from said colliminating lens; (C) a microscope objective for receiving a beam from said beam splitter; (D) means for transmitting a reflected beam to a reflective aperture plate; (E) a spectrometer system adapted to receive a portion of a beam striking said reflective aperture plate; (F) lenses for re-imaging a remaining beam from said reflective aperture on a CCD array; (G) means for determining light intensity along a path of said CCD array, said path passing through an image of said opaque area; (H) a digital computer programmed to determine a variation in a derivative of parameter related to light intensity along said path; and (I) means for adjusting a focus of said microscope until; (i) said variation exceeds a threshold level calculated from an equation of the form: T=C*A+K where T is said threshold A is an average instantaneous voltage produced by pixels along said path C is 4.55×10 -6 ±10% K is 35.58±10% (ii) said variation passes a substantially maximized variation by about 10%.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-07-30 1994-01-29 1994-07-31 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-07-30 1998-01-29 1998-07-31 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-07-30 2002-01-29 2002-07-31 $7700.00 Window Closed / Lapsed

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