Patent US4943732A successfully refreshed from Google Patents.
US4943732A
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Method and apparatus for defect detection and location
Assignee: FEI Co
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Filing: 1989-08-16
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Granted: 1990-07-24
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Expires: 2009-08-16
Abstract
Abstract Methods and apparatus for locating defects in liquid crystal display (LCD) panels include scanning the panel with a laser, detecting reflected, refracted, scattered or transmitted light, and processing signals representative of the detected light utilizing a digital processor, to detect discontinuities in the arrays of LCD elements on the panel.
Inventors
- 👤 Nicholas P. Economou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:15
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/1306; G02F1/1309; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/8851; G01N2021/8887; G01N2021/8893; G01N21/95; G01N2021/9513; G01N2201/00; G01N2201/10; G01N2201/103
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
235 words
Apparatus for locating defects in a substantially planar liquid crystal display (LCD) panel, the apparatus comprising light source means for generating an interrogating light beam to impinge upon the LCD panel, scanning means for introducing relative motion between said interrogating light beam and the LCD panel to scan said interrogating light beam in a predetermined pattern about the LCD panel, position signalling means for generating a position signal having an instantaneous value representative of an instantaneous position of said interrogating light beam with respect to the LCD panel, photodetector means for detecting any of reflected, refracted, scattered or transmitted light resulting from impingement of said interrogating light beam upon the LCD panel, and generating in response thereto a detector signal having an instantaneous value representative of detected magnitude of said reflected, refracted, scattered or transmitted light, each said instantaneous detector signal value corresponding with the instantaneous position of said interrogating light beam with respect to the LCD panel, and discontinuity detection means, responsive to said detector signal, for detecting discontinuities in the value of said detector signal, said discontinuities being representative of defects in the LCD panel, said discontinuity detection means including location means, responsive to said detector signal and said position signal, for correlating each said discontinuity in the value of said detector signal with a corresponding location on the LCD panel to assign a location to each detected defect on the LCD panel.
Claim 2
Dependent Claim
235 words
Apparatus for locating defects in a substantially planar liquid crystal display (LCD) panel, the apparatus comprising light source means for generating an interrogating light beam to impinge upon the LCD panel, scanning means for introducing relative motion between said interrogating light beam and the LCD panel to scan said interrogating light beam in a predetermined pattern about the LCD panel, position signalling means for generating a position signal having an instantaneous value representative of an instantaneous position of said interrogating light beam with respect to the LCD panel, photodetector means for detecting any of reflected, refracted, scattered or transmitted light resulting from impingement of said interrogating light beam upon the LCD panel, and generating in response thereto a detector signal having an instantaneous value representative of detected magnitude of said reflected, refracted, scattered or transmitted light, each said instantaneous detector signal value corresponding with the instantaneous position of said interrogating light beam with respect to the LCD panel, and discontinuity detection means, responsive to said detector signal, for detecting discontinuities in the value of said detector signal, said discontinuities being representative of defects in the LCD panel, said discontinuity detection means including location means, responsive to said detector signal and said position signal, for correlating each said discontinuity in the value of said detector signal with a corresponding location on the LCD panel to assign a location to each detected defect on the LCD panel.
Claim 3
Dependent Claim
13 words
Apparatus according to claim 1, wherein said light source means includes a laser.
Claim 4
Dependent Claim
25 words
Apparatus according to claim 1, further comprising mounting means for maintaining the LCD panel in a selected position with respect to said light source means.
Claim 5
Dependent Claim
29 words
Apparatus according to claim 3, wherein said mounting means includes vacuum chuck means for retaining the LCD panel in contact with the mounting means by action of vacuum force.
Claim 6
Dependent Claim
28 words
Apparatus according to claim 3, wherein said scanning means includes actuator means for moving said mounting means with respect to said light source means in a predetermined pattern.
Claim 7
Dependent Claim
38 words
Apparatus according to claim 5, wherein said actuator means includes X-Y stage means for moving said mounting means in at least first and second orthogonal directions substantially perpendicular to a direction of propagation of said interrogating light beam.
Claim 8
Dependent Claim
23 words
Apparatus according to claim 1, wherein said scanning means includes beam steering means for steering said interrogating light beam in a predetermined pattern.
Claim 9
Dependent Claim
26 words
Apparatus according to claim 7, wherein said beam steering means includes means for steering said interrogating light beam in at least first and second orthogonal directions.
Claim 10
Dependent Claim
25 words
Apparatus according to claim 1, wherein said discontinuity detection means includes digital processing means for processing digital data-representative signals in accordance with predetermined program steps.
Claim 11
Dependent Claim
22 words
Apparatus according to claim 1, wherein said discontinuity detection means includes means for detecting physical discontinuities in an array of LCD elements.
Claim 12
Dependent Claim
30 words
Apparatus according to claim 9, further comprising imaging means, in electrical communication with said digital processing means, for generating image data signals corresponding to an image of the LCD panel.
Claim 13
Dependent Claim
36 words
Apparatus according to claim 11, wherein said imaging means includes at least a first camera means for collecting light reflected from the LCD panel and generating said image data signals in response to said collected light.
Claim 14
Dependent Claim
56 words
Apparatus according to claim 11, wherein said digital processing means includes means for processing said image data signals to generate displayable image signals representative of the LCD panel, and further comprising monitor means, in electrical communication with said digital processing means, for displaying an image of the LCD panel in response to said displayable image signals.
Claim 15
Dependent Claim
35 words
Apparatus according to claim 13, wherein said digital processing means further includes means for indicating, in association with the image displayed on said monitor means, the location of a detected defect on the LCD panel.
Claim 16
Dependent Claim
47 words
Apparatus according to claim 9, further including process control means, responsive to process control signals, for controlling at least said scanning means, and wherein said digital processing means includes means for generating said process control signals in response to said position signals and said predetermined program steps.
Claim 17
Dependent Claim
66 words
Apparatus according to claim 15, further comprising user input means, in communication with said digital processing means, for receiving user input and transmitting to said digital processing means, in response to said user input, a set of user input signals representative of said user input, and wherein said digital processing means includes means for generating said process control signals in response to said user input signals.
Claim 18
Dependent Claim
96 words
Apparatus according to claim 1, wherein said photodetector means includes at least first and second photodetectors for generating at least first and second detector signals, respectively, said first photodetector being positioned to detect reflected light resulting from impingement of said interrogating light beam upon the LCD panel, said first detector signal being representative of detected reflected light, and said second photodetector being positioned to detect any of transmitted, scattered or refracted light resulting from impingement of said interrogating light beam upon the LCD panel, said second detector signal being representative of detected transmitted or refracted light.
Claim 19
Dependent Claim
34 words
Apparatus according to claim 17, wherein said discontinuity detection means includes means for evaluating said first detector signals during selected first scanning periods, and evaluating said second detector signals during selected second scanning periods.
Claim 20
Dependent Claim
29 words
Apparatus according to claim 17, wherein said discontinuity detection means includes means for comparing said first and second detector signals, to provide detection of defects in the LCD panel.
Claim 21
Dependent Claim
72 words
Apparatus according to claim 9, further comprising mounting means for maintaining the LCD panel in a selected position with respect to said light source means, and transport means for automatic loading and unloading of LCD panels on and off said mounting means, said transport means being responsive to transport control signals, and wherein said digital processing means includes means for generating said transport control signals in response to said predetermined program steps.
Claim 22
Dependent Claim
44 words
Apparatus according to claim 9, wherein said digital processing means includes means for generating said process control signals to enable said scanning means to cause said interrogating light beam to scan along selected paths defined by arrays of LCD elements on the LCD panel.
Claim 23
Dependent Claim
54 words
Apparatus according to claim 21, wherein said digital processing means includes means for generating said process control signals to enable said scanning means to first scan along said paths to accumulate a knowledge base corresponding to features of the LCD panel, and subsequently scan said LCD panel to detect defects in the LCD panel.
References Cited (Backward Citations)
US4417149A
Cited
US4851696A
Cited
USPTO Annuity & Maintenance Windows
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| 7.5 Years (Year 8) | 1997-07-23 | 1998-01-22 | 1998-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-23 | 2002-01-22 | 2002-07-24 | $7700.00 | Window Closed / Lapsed |