Patent US4942327A successfully refreshed from Google Patents.
US4942327A
Expired / Lapsed
US
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Solid state electronic device
Assignee: Hitachi Ltd
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Filing: 1989-05-26
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Granted: 1990-07-17
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Expires: 2009-05-26
Abstract
Abstract A solid state electronic device having a thin film of an Al (aluminum) alloy Li (lithium) on the surface of a substrate for a surface acoustic wave (SAW). Interdigital electrodes, electric wiring patterns and bonding pads are formed by the thin film of the Li-added Al alloy. This thin film suppresses migration which occurs when a high density current is supplied to the device or a large amplitude SAW is generated. The thin film, which provides a small loss and relatively low hardness, provides a desired power handling capability and high yield of wire bonding. The this film assures high endurance to failure of the device and sufficient life of the device.
Inventors
- 👤 Hitoshi Watanabe
- 👤 Norio Hosaka
- 👤 Akitsuna Yuhara
- 👤 Jun Yamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:54
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/125; H03H9/145; H03H9/14538; G; G10; G10K; G10K11/00; G10K11/36; H03H9/02535; H03H9/02818; H03H9/02929; H10; H10W; H10W72/00; H10W72/50; H10W72/551; H10W72/552; H10W72/5522
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
67 words
A solid state electronic device comprising: a substrate along which a surface acoustic wave propagates, and a conductive thin film provided on the surface of said substrate, said conductive thin film constituting at least one of electrodes, electric wiring patterns and bonding pads, wherein at least a part of said conductive thin film is made of a first aluminum alloy added with lithium by 0.05-3 wt %.
Claim 2
Dependent Claim
67 words
A solid state electronic device comprising: a substrate along which a surface acoustic wave propagates, and a conductive thin film provided on the surface of said substrate, said conductive thin film constituting at least one of electrodes, electric wiring patterns and bonding pads, wherein at least a part of said conductive thin film is made of a first aluminum alloy added with lithium by 0.05-3 wt %.
Claim 3
Dependent Claim
23 words
A solid state electronic device according to claim 1, wherein first aluminum alloy has a grain size set to 0.05 μm or less.
Claim 4
Dependent Claim
39 words
A solid state electronic device according to claim 1, wherein said conductive thin film consists of a first thin film of said Al alloy and a second thin film of pure aluminum, which are laminated in a multi-layer structure.
Claim 5
Dependent Claim
39 words
A solid state electronic device according to claim 2, wherein said conductive thin film consists of a first thin film of said Al alloy and a second thin film of pure aluminum, which are laminated in a multi-layer structure.
Claim 6
Dependent Claim
41 words
A solid state electronic device according to claim 1, wherein said conductive thin film consists of a first thin film of said Al alloy and a third thin film of a second Al alloy, which are laminated in a multi-layer structure.
Claim 7
Dependent Claim
41 words
A solid state electronic device according to claim 2, wherein said conductive thin film consists of a first thin film of said Al alloy and a third thin film of a second Al alloy, which are laminated in a multi-layer structure.
Claim 8
Dependent Claim
50 words
A solid state electronic device according to claim 1, wherein said substrate is made of ST-cut quartz, and said electrodes include a set of interdigital electrodes and a pair of grating reflectors provided on both sides of said interdigital electrodes, each grating reflector consisting of a plurality of metal strips.
Claim 9
Dependent Claim
59 words
A solid state electronic device according to claim 1, wherein said substrate is made of LiTaO 3 cut the crystal 36° rotated around the Y-axis thereof, and said electrodes include a set of electrodes consisting of a plurality of interdigital electrodes with different resonant frequencies connected in series and a shield electrode provided intermediately between said set of electrodes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-16 | 1994-01-15 | 1994-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-16 | 1998-01-15 | 1998-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-16 | 2002-01-15 | 2002-07-17 | $7700.00 | Window Closed / Lapsed |