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US4939763A
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Method for preparing diamond X-ray transmissive elements
Assignee: Advanced Refractory Technologies Inc
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Filing: 1988-10-03
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Granted: 1990-07-03
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Expires: 2008-10-03
Abstract
Abstract A method is provided for producing thin diamond films which are useful as X-ray transmissive elements.
Inventors
- 👤 John M. Pinneo
- 👤 Carey Bailey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:27
CPC Classifications
H; H01; H01J; H01J5/00; H01J5/02; H01J5/18; G; G03; G03F; G03F1/00; G03F1/22; G21; G21K; G21K1/00
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
25 words
In a device in which X-ray radiation is generated, transmitted, measured or detected, the improvement comprising, an X-ray transmissive window comprising a synthetic diamond film.
Claim 2
Dependent Claim
25 words
In a device in which X-ray radiation is generated, transmitted, measured or detected, the improvement comprising, an X-ray transmissive window comprising a synthetic diamond film.
Claim 3
Independent Claim
83 words
A method for forming an X-ray transmissive synthetic diamond window comprising the steps of: depositing a diamond film upon a surface of a substrate for a period of time sufficient to obtain a film of preselected thickness; masking selected areas on the opposite surface of said substrate with masking material resistant to chemical attack by a selected substrate-etching agent; applying said substrate-etching agent to said opposite surface to remove said substrate in unmasked areas, thereby exposing said diamond film in said unmasked areas.
Claim 4
Independent Claim
83 words
A method for forming an X-ray transmissive synthetic diamond window comprising the steps of: depositing a diamond film upon a surface of a substrate for a period of time sufficient to obtain a film of preselected thickness; masking selected areas on the opposite surface of said substrate with masking material resistant to chemical attack by a selected substrate-etching agent; applying said substrate-etching agent to said opposite surface to remove said substrate in unmasked areas, thereby exposing said diamond film in said unmasked areas.
Claim 5
Independent Claim
50 words
A method for forming an X-ray transmissive synthetic diamond element comprising the steps of depositing a diamond film upon a surface of a substrate for a period of time sufficient to obtain a film of preselected thickness; removing said substrate with a substrate-etching agent, thereby completely exposing said diamond film.
Claim 6
Independent Claim
50 words
A method for forming an X-ray transmissive synthetic diamond element comprising the steps of depositing a diamond film upon a surface of a substrate for a period of time sufficient to obtain a film of preselected thickness; removing said substrate with a substrate-etching agent, thereby completely exposing said diamond film.
Claim 7
Dependent Claim
28 words
A method according to claim 2 or 3 further comprising the step of etching said diamond film for a period of time sufficient to reduce the thickness thereof.
Claim 8
Dependent Claim
17 words
A method according to claim 4 wherein the thickness of said film is uniformly reduced by etching.
Claim 9
Dependent Claim
17 words
A method according to claim 4 wherein the thickness of said film is reduced in selected areas.
Claim 10
Dependent Claim
16 words
A method according to claim 2 wherein said diamond film is deposited by chemical vapor deposition.
Claim 11
Dependent Claim
15 words
A method according to claim 7 wherein said chemical vapor deposition is radio frequency plasma-assisted.
Claim 12
Dependent Claim
14 words
A method according to claim 7 wherein said chemical vapor deposition is microwave-plasma assisted.
Claim 13
Dependent Claim
16 words
A method according to claim 7 wherein said chemical vapor deposition is direct current plasma assisted.
Claim 14
Dependent Claim
15 words
A method according to claim 7 wherein said chemical vapor deposition is ultra violet-plasma assisted.
Claim 15
Dependent Claim
14 words
A method according to claim 9 wherein said microwave plasma comprises ECR-microwave generated plasma.
Claim 16
Dependent Claim
18 words
A device according to claim 1 wherein said synthetic diamond film is supported by a grid comprising quartz.
Claim 17
Dependent Claim
14 words
A method according to claim 2 wherein said substrate comprises silicon, molybdenum or quartz.
Claim 18
Dependent Claim
20 words
A device according to claim 1 wherein said synthetic diamond film is supported by a grid comprising X-ray impervious plastic.
Claim 19
Dependent Claim
11 words
A method according to claim 2 wherein said substrate is contoured.
Claim 20
Dependent Claim
16 words
A method according to claim 4 wherein said step of etching said film s plasma assisted.
Claim 21
Dependent Claim
17 words
A method according to claim 4 wherein said step of etching said film is by thermal-assisted oxidation.
Claim 22
Dependent Claim
17 words
A device according to claim 1 wherein said synthetic diamond film is supported on a metal grid.
Claim 23
Dependent Claim
11 words
A device according to claim 19 wherein said metal comprises aluminum.
Claim 24
Dependent Claim
17 words
A device according to claim 1 wherein said synthetic diamond film is supported by a silicon grid.
Claim 25
Dependent Claim
16 words
A device according to claim 21 in which said silicon grid comprises a single silicon crystal.
References Cited (Backward Citations)
US3030188A
Cited
US3030187A
Cited
US3142539A
Cited
US3175885A
Cited
US3371996A
Cited
US3630678A
Cited
US3630679A
Cited
US3705937A
Cited
US3714334A
Cited
US4104441A
Cited
US4178509A
Cited
US4352787A
Cited
US4436797A
Cited
US4608326A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-07-02 | 1994-01-01 | 1994-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-02 | 1998-01-01 | 1998-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-02 | 2002-01-01 | 2002-07-03 | $7700.00 | Window Closed / Lapsed |