US4436797A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-Ray mask
Assignee: International Business Machines Corp
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Filing: 1982-06-30
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Granted: 1984-03-13
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Expires: 2002-06-30
Abstract
Abstract An improved X-ray lithography mask has been fabricated by forming an X-ray absorbing lithography pattern on a supporting foil of hydrogenated amorphous carbon. The substrate foil is formed by depositing a carbon film in the presence of hydrogen onto a surface having a temperature below 375° C. The hydrogen concentration is maintained sufficiently high that the resulting film has at least one atom percent of hydrogen. A film having about 20 atom percent of hydrogen is preferred. While impurities are permitted, impurities must be maintained at a level such that the optical bandgap of the resulting film is at least one electron volt. A film with an optical bandgap of about 2 electron volts is preferred.
Inventors
- 👤 Michael J. Brady
- 👤 Bernard S. Meyerson
- 👤 John M. Warlaumont
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:26
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
26 words
An X-ray mask comprising an X-ray absorbing pattern supported by a foil of hydrogenated amorphous carbon having an optical bandgap of at least one electron volt.
Claim 2
Dependent Claim
26 words
An X-ray mask comprising an X-ray absorbing pattern supported by a foil of hydrogenated amorphous carbon having an optical bandgap of at least one electron volt.
Claim 3
Dependent Claim
19 words
An X-ray mask as defined in claim 1 wherein said foil has at least 1 atom percent of hydrogen.
Claim 4
Dependent Claim
21 words
An X-ray mask as defined in claim 1 wherein said foil has an optical bandgap of at least 1.6 electron volts.
Claim 5
Dependent Claim
19 words
An X-ray mask as defined in claim 1 wherein said foil has at least 20 atom percent of hydrogen.
Claim 6
Dependent Claim
20 words
An X-ray mask as defined in claim 1 wherein said foil has an optical bandgap of about 2 electron volts.
Claim 7
Dependent Claim
35 words
An X-ray mask comprising an X-ray absorbing pattern supported by a substantially X-ray transparent foil, said supporting foil consisting essentially of hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt.
Claim 8
Dependent Claim
35 words
An X-ray mask comprising an X-ray absorbing pattern supported by a substantially X-ray transparent foil, said supporting foil consisting essentially of hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt.
Claim 9
Dependent Claim
19 words
An X-ray mask as defined in claim 6 wherein said foil has at least 1 atom percent of hydrogen.
Claim 10
Dependent Claim
21 words
An X-ray mask as defined in claim 6 wherein said foil has an optical bandgap of at least 1.6 electron volts.
Claim 11
Dependent Claim
19 words
An X-ray mask as defined in claim 6 wherein said foil has at least 20 atom percent of hydrogen.
Claim 12
Dependent Claim
20 words
An X-ray mask as defined in claim 6 wherein said foil has an optical bandgap of about 2 electron volts.
Claim 13
Dependent Claim
48 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent foil, said foil comprising hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt, and further comprising a frame supporting said X-ray transparent foil, said frame comprising silicon.
Claim 14
Dependent Claim
48 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent foil, said foil comprising hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt, and further comprising a frame supporting said X-ray transparent foil, said frame comprising silicon.
Claim 15
Dependent Claim
19 words
An X-ray mask as defined in claim 11 wherein said foil has at least 1 atom percent of hydrogen.
Claim 16
Dependent Claim
21 words
An X-ray mask as defined in claim 11 wherein said foil has an optical bandgap of at least 1.6 electron volts.
Claim 17
Dependent Claim
19 words
An X-ray mask as defined in claim 11 wherein said foil has at least 20 atom percent of hydrogen.
Claim 18
Dependent Claim
19 words
An X-ray mask as defined in claim 11 wherein said foil has an optical of about 2 electron volts.
Claim 19
Dependent Claim
48 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent foil, said foil comprising hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt, and further comprising a frame supporting said X-ray transparent foil, said frame comprising glass.
Claim 20
Dependent Claim
48 words
An X-ray mask comprising a substantially X-ray absorbing patterned layer supported by a substantially X-ray transparent foil, said foil comprising hydrogenated amorphous carbon and having an optical bandgap of at least one electron volt, and further comprising a frame supporting said X-ray transparent foil, said frame comprising glass.
Claim 21
Dependent Claim
19 words
An X-ray mask as defined in claim 16 wherein said foil has at least 1 atom percent of hydrogen.
Claim 22
Dependent Claim
21 words
An X-ray mask as defined in claim 16 wherein said foil has an optical bandgap of at least 1.6 electron volts.
Claim 23
Dependent Claim
18 words
An X-ray mask as defined in claim 16 wherein said foil has about 20 atom percent of hydrogen.
Claim 24
Dependent Claim
20 words
An X-ray mask as defined in claim 16 wherein said foil has an optical bandgap of about 2 electron volts.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-13 | 1987-09-12 | 1988-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-13 | 1991-09-12 | 1992-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-13 | 1995-09-12 | 1996-03-13 | $7700.00 | Window Closed / Lapsed |