US4936952A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing a liquid jet recording head
Assignee: Canon Inc
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Filing: 1989-06-23
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Granted: 1990-06-26
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Expires: 2009-06-23
Abstract
Abstract A method of manufacturing a liquid jet recording head having a discharge port for discharging liquid therethrough, comprising the steps, forming thermal energy generating structure for generating thermal energy utilized for discharging recording liquid on a support member; forming an upper layer on the thermal energy generating structure; forming a photo-resist layer on the upper layer; and etching the upper layer and the photo-resist layer to form a protective layer for the thermal energy generating structure.
Inventors
- 👤 Hirokazu Komuro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:43
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14016; B41J2/14088; B41J2/14112; B41J2/14129; B41J2/16; B41J2/1601; B41J2/1603; B41J2/1604; B41J2/1621; B41J2/1626; B41J2/1628; B41J2/1631; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1646
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
130 words
A method of manufacturing a substrate for a liquid jet recording head that discharges liquid in response to activation of thermal energy generating means, said method comprising the steps: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heated resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform photo-resist layer over said protective layer; etching said photo-resist layer until a portion of said protective layer is exposed; and continuing to etch said protective layer and said photo-resist layer to leave at least a portion of said protective layer to thereby protect said thermal energy generating means.
Claim 2
Independent Claim
130 words
A method of manufacturing a substrate for a liquid jet recording head that discharges liquid in response to activation of thermal energy generating means, said method comprising the steps: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heated resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform photo-resist layer over said protective layer; etching said photo-resist layer until a portion of said protective layer is exposed; and continuing to etch said protective layer and said photo-resist layer to leave at least a portion of said protective layer to thereby protect said thermal energy generating means.
Claim 3
Independent Claim
192 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid, the liquid jet recording head including a support member, thermal energy generating means on said support member for generating thermal energy to discharge the liquid, and a member in which grooves are provided to form the liquid path, the method comprising the steps of: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform photo-resist layer over said protective layer; etching said photo-resist layer until a portion of said protective layer is exposed; continuing to etch said protective layer and said photo-resist layer to leave at least a portion of said protective layer to thereby protect said thermal energy generating means; and connecting said support member with a grooved member, said grooved member having grooves formed thereon, said thermal energy generating means being positioned in said grooves.
Claim 4
Independent Claim
192 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid, the liquid jet recording head including a support member, thermal energy generating means on said support member for generating thermal energy to discharge the liquid, and a member in which grooves are provided to form the liquid path, the method comprising the steps of: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform photo-resist layer over said protective layer; etching said photo-resist layer until a portion of said protective layer is exposed; continuing to etch said protective layer and said photo-resist layer to leave at least a portion of said protective layer to thereby protect said thermal energy generating means; and connecting said support member with a grooved member, said grooved member having grooves formed thereon, said thermal energy generating means being positioned in said grooves.
Claim 5
Independent Claim
141 words
A method for manufacturing a substrate for a liquid jet recording head having such substrate as a support member, thermal energy generating being provided on said support member for generating thermal energy to discharge liquid, the method comprising the steps of; providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform second layer over said protective layer; etching said second layer until a portion of said protective layer is exposed; and continuing to etch said protective layer and said second layer to leave at least a portion of said protective layer thereby protecting said thermal energy generating means.
Claim 6
Independent Claim
141 words
A method for manufacturing a substrate for a liquid jet recording head having such substrate as a support member, thermal energy generating being provided on said support member for generating thermal energy to discharge liquid, the method comprising the steps of; providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer; forming a protective layer over said thermal energy generating means; forming a substantially uniform second layer over said protective layer; etching said second layer until a portion of said protective layer is exposed; and continuing to etch said protective layer and said second layer to leave at least a portion of said protective layer thereby protecting said thermal energy generating means.
Claim 7
Independent Claim
196 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid, the liquid jet recording including a substrate which forms a support member, thermal energy generating means provides on said support member for generating thermal energy to discharge the liquid, and a member in which grooves are provided to form the liquid path, the method comprising the steps of: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer: forming a protective layer over said thermal energy generating means; forming a substantially uniform second layer over said protective layer; etching said second layer until a portion of said protective layer is exposed; continuing to etch said protective layer and said second layer to leave a least a portion of said protective layer thereby protecting said thermal energy generating means; and connecting said support member with a grooved member, said grooved member having grooves formed thereon and said thermal energy generating means being positioned in said grooves.
Claim 8
Independent Claim
196 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid, the liquid jet recording including a substrate which forms a support member, thermal energy generating means provides on said support member for generating thermal energy to discharge the liquid, and a member in which grooves are provided to form the liquid path, the method comprising the steps of: providing a support member having thermal energy generating means disposed thereon, said thermal energy generating means comprising a heater resistor layer and at least one electrode connected thereto with a step between said electrode and said heater resistor layer: forming a protective layer over said thermal energy generating means; forming a substantially uniform second layer over said protective layer; etching said second layer until a portion of said protective layer is exposed; continuing to etch said protective layer and said second layer to leave a least a portion of said protective layer thereby protecting said thermal energy generating means; and connecting said support member with a grooved member, said grooved member having grooves formed thereon and said thermal energy generating means being positioned in said grooves.
Claim 9
Dependent Claim
26 words
A method according to claim 1, 2, 3 or 4, further comprising the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 10
Dependent Claim
23 words
A method according to claim 1, 2, 3 or 4, wherein said continuing to etch step is performed by a wet etching method.
Claim 11
Dependent Claim
22 words
A method according to claim 1, 2, 3 or 4, wherein said protective layer is made of Si 3 N 4 .
Claim 12
Dependent Claim
20 words
A method according to claim 1, 2, 3 or 4, wherein said protective layer is made of SiO 2 .
Claim 13
Dependent Claim
18 words
A method according to claim 1, 2, 3 or 4, wherein said protective layer is made of SiON.
Claim 14
Dependent Claim
22 words
A method according to claim 1, 2, 3 or 4, wherein said protective layer is made of Ta 2 O 5 .
Claim 15
Dependent Claim
31 words
A method according to claim 1, 2, 3 or 4, wherein the thickness of said protective layer after said continuing to etch step is about 1.5 times that of said electrode.
Claim 16
Dependent Claim
34 words
A method according to claim 1, 2, 3 or 4, wherein said protective layer forming step, said substantially uniform, layer forming step, said etching step and said continuing to etch step are repeatedly performed.
Claim 17
Dependent Claim
32 words
A method according to claim 1, 2, 3 or 4, wherein in said continuing to etch step, the etching rate of said substantially uniform layer and said protective layer are substantially equal.
Claim 18
Dependent Claim
32 words
A method according to claim 1, 2, 3 or 4, wherein the thickness of said protective layer formed in said protective layer forming step is about two times that of said electrode.
Claim 19
Dependent Claim
22 words
A method according to claim 14, further comprising the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 20
Dependent Claim
23 words
A method according to claim 1, 2, 3 or 4, wherein said continuing to etch step is performed by a dry etching method.
Claim 21
Dependent Claim
22 words
A method according to claim 16, further comprising the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 22
Dependent Claim
16 words
A method according to claim 16, wherein said dry etching method is a sputter etching method.
Claim 23
Dependent Claim
17 words
A method according to claim 16, wherein said dry etching method is a reactive ion etching method.
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