US4536250A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making liquid jet recording head
Assignee: Canon Inc
•
Filing: 1984-04-13
•
Granted: 1985-08-20
•
Expires: 2004-04-13
Abstract
Abstract A method of making a liquid jet recording head having a liquid discharge section including orifice means for discharging the liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing a thermal energy to act on the liquid to form the liquid droplets, and electro-thermal converting means including a heat generating resistive layer on a substrate, at least one pair of opposed electrodes electrically connected with said heat generating resistive layer and a heat generating part between said electrodes, which method comprises the steps of forming the electrodes and heat generating portion through at least first and second etching processes, a photoresist pattern formed by the first etching process having a width smaller than those of photoresist patterns formed by the second and successive etching processes.
Inventors
- 👤 Masami Ikeda
- 👤 Hiroto Matsuda
- 👤 Makoto Shibata
- 👤 Hiroto Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:51
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/06; H05K3/061; H05K3/064; B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1601; B41J2/1603; B41J2/1604; B41J2/1621; B41J2/1626; B41J2/1628; B41J2/1629; B41J2/1631; H05B; H05B3/00; H05B3/10; H05K2203/00; H05K2203/05; H05K2203/0562; H05K2203/0577; H05K2203/14; H05K2203/1476
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
178 words
A method of making a liquid jet recording head with a liquid discharge section, including orifice means for discharging liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing thermal energy to act on the liquid to form said liquid droplets, said thermally acting portion including a heat generating resistive portion on a substrate between at least one pair of opposed electrodes electrically connected with said heat generating resistive portion, said method comprising the steps of: performing a first etching process including providing a first photoresist pattern having a predetermined width to cover a portion of a layer on said substrate and forming at least one of said electrodes and said heat generating portion by etching the exposed portion of said layer; and performing a second etching process including providing a second photoresist pattern having a width greater than the width of said first photoresist pattern to enable removal of remnants of said exposed portion of said layer not removed in said first etching process.
Claim 2
Independent Claim
178 words
A method of making a liquid jet recording head with a liquid discharge section, including orifice means for discharging liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing thermal energy to act on the liquid to form said liquid droplets, said thermally acting portion including a heat generating resistive portion on a substrate between at least one pair of opposed electrodes electrically connected with said heat generating resistive portion, said method comprising the steps of: performing a first etching process including providing a first photoresist pattern having a predetermined width to cover a portion of a layer on said substrate and forming at least one of said electrodes and said heat generating portion by etching the exposed portion of said layer; and performing a second etching process including providing a second photoresist pattern having a width greater than the width of said first photoresist pattern to enable removal of remnants of said exposed portion of said layer not removed in said first etching process.
Claim 3
Dependent Claim
14 words
A method according to claim 1, wherein said etching processes include a wet-etching process.
Claim 4
Dependent Claim
15 words
A method according to claim 1, wherein said etching processes include an anode oxidation process.
Claim 5
Dependent Claim
14 words
A method according to claim 1, wherein said etching processes include a dry-etching process.
References Cited (Backward Citations)
US4047184A
Cited
US4468282A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-19 | 1989-02-18 | 1989-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-19 | 1993-02-18 | 1993-08-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-19 | 1997-02-18 | 1997-08-20 | $7700.00 | Window Closed / Lapsed |