Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
127 words
An optical waveguide device comprising: a substrate; an optical waveguide layer formed on said substrate; a gap adjusting layer formed on said optical waveguide layer and having an index of refraction which is lower than that of said optical waveguide layer; a metallic layer formed on said gap adjusting layer to partly cover the gap adjusting layer and having an opening through which an incident light passes; a dielectric adhesive layer disposed in contact with said gap adjusting layer through said opening of said metallic layer and having an index of refraction which is higher than that of said optical waveguide layer; and a dielectric prism disposed on said adhesive layer and having an index of refraction which is higher than that of said optical waveguide layer.
Claim 2
Dependent Claim
127 words
An optical waveguide device comprising: a substrate; an optical waveguide layer formed on said substrate; a gap adjusting layer formed on said optical waveguide layer and having an index of refraction which is lower than that of said optical waveguide layer; a metallic layer formed on said gap adjusting layer to partly cover the gap adjusting layer and having an opening through which an incident light passes; a dielectric adhesive layer disposed in contact with said gap adjusting layer through said opening of said metallic layer and having an index of refraction which is higher than that of said optical waveguide layer; and a dielectric prism disposed on said adhesive layer and having an index of refraction which is higher than that of said optical waveguide layer.
Claim 3
Dependent Claim
25 words
An optical waveguide device according to claim 1, wherein the size of said opening is slightly smaller than the beam diameter of said incident light.
Claim 4
Dependent Claim
29 words
An optical waveguide device according to claim 1, wherein a dielectric buffer layer having a low index of refraction is disposed between said substrate and said optical waveguide layer.
Claim 5
Dependent Claim
15 words
An optical waveguide device according to claim 1, wherein said substrate is made from Si.
Claim 6
Dependent Claim
18 words
An optical waveguide device according to claim 3, wherein said buffer layer is made from SiO 2 film.
Claim 7
Dependent Claim
17 words
An optical waveguide device according to claim 1, wherein said optical waveguide layer is made from SiON.
Claim 8
Dependent Claim
19 words
An optical waveguide device according to claim 1, wherein said gap adjusting layer is made from SiO 2 film.
Claim 9
Dependent Claim
16 words
An optical waveguide device according to claim 1, wherein said metallic layer is made from Ag.
Claim 10
Dependent Claim
18 words
An optical waveguide device according to claim 1, wherein said adhesive layer is made from a polyimide resin.
Claim 11
Dependent Claim
26 words
An optical waveguide device according to claim 1, wherein said opening has a specific shape to perform a specific optical function in accordance with said shape.
Claim 12
Dependent Claim
81 words
An optical waveguide device comprising: a substrate; an optical waveguide layer formed on said substrate; a clad layer covering at least a part of said optical waveguide layer and having an opening through which an incident light to be coupled passes; and an optical element disposed on said opening of said clad layer for guiding said incident light to said optical waveguide layer, wherein said opening has a specific shape to perform a specific optical function in accordance with said shape.
Claim 13
Dependent Claim
81 words
An optical waveguide device comprising: a substrate; an optical waveguide layer formed on said substrate; a clad layer covering at least a part of said optical waveguide layer and having an opening through which an incident light to be coupled passes; and an optical element disposed on said opening of said clad layer for guiding said incident light to said optical waveguide layer, wherein said opening has a specific shape to perform a specific optical function in accordance with said shape.
Claim 14
Dependent Claim
37 words
An optical waveguide device according to claim 11, wherein the boundary of said opening is inclined with respect to a propagation direction of said incident light so as to perform a function for changing an optical passage.
Claim 15
Dependent Claim
32 words
An optical waveguide device according to claim 11, wherein the boundary of said opening has a lens like curved shape so as to perform a condenser function and a mode splitter function.
Claim 16
Dependent Claim
23 words
An optical waveguide device according to claim 11, wherein said opening is filled with a dielectric material having a low index of refraction.
Claim 17
Dependent Claim
41 words
An optical waveguide device according to claim 11, wherein the thickness of said clad layer in the boundary area adjacent to said opening is changed along the propagation direction of the light so that the index of refraction thereof gradually changes.