Process for producing mutually spaced conductor elements on a substrate

Claim 1

Process for the production of mutually spaced elements (11a, 13a) on a substrate (1), comprising a first stage of producing on the substrate spacers (10), which are perpendicular to the substrate and whereof the dimensions and spacings are a function of the dimensions and spacings of the elements (11a, 13a) to be produced, said spacers (10) having parallel side walls and a width less than 1 micrometer, a second stage of depositing anisotropically a first material forming elements (11a) on said substrate (1) in a direction perpendicular to its surface, wherein a deposit (11b) is produced on the heads of spacers (10) which prevents the deposit of said first material on the walls of the spacers, a third stage of depositing anisotropically perpendicular to the surface of the substrate a second material on the deposited first material so that said second material covers the upper surface of the first deposited material, and, using the second material as a mask, selectively etching the first material to remove it at least from the bases of the spacers and thereafter removing the spacers.