US4923716A
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Chemical vapor desposition of silicon carbide
Assignee: Raytheon Co
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Filing: 1988-09-26
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Granted: 1990-05-08
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Expires: 2008-09-26
Abstract
Abstract Silicon carbide is deposted by chemical vapor deposition from a vapor source having a single molecular species that provides both the silicon and the carbon. The molecular species has the composition C n Si n H m , where m ranges from 2n+1 to 4n+1 inclusive and n ranges from 2 to 6 inclusive, and exhibits a primary pyrolysis mechanism producing reactive fragments containing both silicon and carbon atoms. Unbalanced decomposition paths are avoided. The silicon and carbon atoms are necessarily codeposited in equal numbers and at equal rates onto the substrate, producing stoichiometric deposited silicon carbide. Preferred molecular sources include H 3 SiCH 2 CH 2 SiH 3 , a silacycloalkane of the form (--SiH 2 CH 2 --) p , where p is 2, 3, 4, or 5, and a cyclic structure of the form (--SiH(CH 3 )--) q , where q is 4 or 5.
Inventors
- 👤 Duncan W. Brown
- 👤 James D. Parsons
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:04
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/32; C23C16/325
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
104 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and where the source vapor molecule delivers silicon and carbon atoms to the substrate in equal numbers and with each in a reactive form at the deposition temperature; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 2
Dependent Claim
104 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and where the source vapor molecule delivers silicon and carbon atoms to the substrate in equal numbers and with each in a reactive form at the deposition temperature; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 3
Dependent Claim
31 words
The process of claim 1, wherein the deposition source vapor produces an intermediate during pyrolysis at the deposition temperature, the intermediate being selected from the group consisting of methylsilylene and silaethene.
Claim 4
Dependent Claim
128 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon atoms in a single molecule, the source vapor having the molecular composition C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and where the source vapor molecule has a primary pyrolysis decomposition path, at the deposition temperature, which produces unsaturated molecules containing equal numbers of silicon and carbon atoms and deposits silicon carbide upon the substrate, and has no substantial unbalanced decomposition path producing silicon and carbon with substantially different deposition reactivities; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 5
Dependent Claim
128 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon atoms in a single molecule, the source vapor having the molecular composition C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and where the source vapor molecule has a primary pyrolysis decomposition path, at the deposition temperature, which produces unsaturated molecules containing equal numbers of silicon and carbon atoms and deposits silicon carbide upon the substrate, and has no substantial unbalanced decomposition path producing silicon and carbon with substantially different deposition reactivities; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 6
Dependent Claim
18 words
The process of claim 3, wherein the deposition temperature is from about 1100 C. to about 1400 C.
Claim 7
Dependent Claim
15 words
The process of claim 3, wherein the unsaturated molecules produced during pyrolysis include multiple bonds.
Claim 8
Dependent Claim
13 words
The process of claim 5, wherein the multiple bond is a double bond.
Claim 9
Dependent Claim
13 words
The process of claim 5, wherein the multiple bond is a triple bond.
Claim 10
Dependent Claim
26 words
The process of claim 1, including the further step, prior to the step of contacting, of: furnishing a second deposition source vapor including a dopant element.
Claim 11
Dependent Claim
102 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon in a single molecule, the source vapor having the molecular composition C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and the deposition source vapor produces an intermediate during pyrolysis at the deposition temperature, the intermediate being selected from the group consisting of methylsilylene and silaethene; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 12
Dependent Claim
102 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains both silicon and carbon in a single molecule, the source vapor having the molecular composition C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and the deposition source vapor produces an intermediate during pyrolysis at the deposition temperature, the intermediate being selected from the group consisting of methylsilylene and silaethene; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 13
Dependent Claim
105 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains equal numbers of silicon and carbon atoms in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and each carbon atom is bonded to a silicon atom, and each silicon atom is bonded to a carbon atom, after pyrolysis at the deposition temperature; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 14
Dependent Claim
105 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor which contains equal numbers of silicon and carbon atoms in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and each carbon atom is bonded to a silicon atom, and each silicon atom is bonded to a carbon atom, after pyrolysis at the deposition temperature; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 15
Dependent Claim
104 words
A process for depositing beta silicon carbide on a substrate, comprising the steps of: furnishing a deposition source vapor which contains equal numbers of silicon and carbon atoms in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and the source vapor decomposes to a molecular form having silicon and carbon in a single molecule wherein the efficiency of deposition of silicon and carbon is substantially identical; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 16
Dependent Claim
104 words
A process for depositing beta silicon carbide on a substrate, comprising the steps of: furnishing a deposition source vapor which contains equal numbers of silicon and carbon atoms in a single molecule, the source vapor having the molecular formula C n Si n H m , where m ranges from 2n+1 to 4n+2 inclusive and n ranges from 2 to 6 inclusive, and the source vapor decomposes to a molecular form having silicon and carbon in a single molecule wherein the efficiency of deposition of silicon and carbon is substantially identical; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 17
Dependent Claim
88 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor selected from the group consisting of H.sub.3 SiCH.sub.2 CH.sub.2 SiH.sub.3, H.sub.3 SiCH═CHSiH.sub.3, H.sub.3 SiC.tbd.CSiH.sub.3, a silacycloalkane of the form (SiH 2 CH 2 ) p , where p is 2, 3, 4, or 5, and a cyclic structure of the form (--SiH(CH 3 )--) q , where q is 4 or 5; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 18
Dependent Claim
88 words
A process for depositing beta silicon carbide on a substrate at a deposition temperature, comprising the steps of: furnishing a deposition source vapor selected from the group consisting of H.sub.3 SiCH.sub.2 CH.sub.2 SiH.sub.3, H.sub.3 SiCH═CHSiH.sub.3, H.sub.3 SiC.tbd.CSiH.sub.3, a silacycloalkane of the form (SiH 2 CH 2 ) p , where p is 2, 3, 4, or 5, and a cyclic structure of the form (--SiH(CH 3 )--) q , where q is 4 or 5; and contacting the deposition source vapor to the substrate at the deposition temperature.
Claim 19
Dependent Claim
18 words
The process of claim 12, wherein the deposition temperature is from about 1100 C. to about 1400 C.
Claim 20
Dependent Claim
26 words
The process of claim 12, including the further step, prior to the step of contacting, of: furnishing a second deposition source vapor including a dopant element.
Claim 21
Dependent Claim
18 words
The process of claim 12, wherein the deposition temperature is from about 1100 C. to about 1400 C.
References Cited (Backward Citations)
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