Production of hyperfine silicon carbide powder

Abstract

Abstract PURPOSE:To produce a powder mixture suitable for powdery raw material for powder metallurgy, etc., and consisting of hyperfine silicon carbide powder having high purity and carbon powder without requiring a crushing stage by carrying out a gaseous phase thermal decomposition reaction of hexamethyl disilane at high temp. above a specified temp. CONSTITUTION:A furnace core pipe 2 is inserted into a horizontal electric furnace 1, and heated with a heating coil 3. Carrier gas (e.g. H2) contg. hexamethyl disilane is introduced from one end of the pipe 2, and the hexamethyl disilane is thermally decomposed at >=800 deg.C in the gaseous phase. By this method, a powder mixture consisting of hyperfine silicon carbide powder of high purity and carbon powder is produced and discharged from another end of the furnace core pipe 2. The obtd. powder mixture is usable in itself for a raw material of powder metallurgy without separating the component. Moreover, the mean particle size of the SiC powder or the proportion of the carbon powder, etc., can be adjusted by controlling the thermal decomposition temp. in the gaseous phase or the proportion of the introduced carrier gas, etc.

Inventors

• 👤 Kaoru Kawada
• 👤 川田　薫
• 👤 Yuzo Osawa
• 👤 大沢　雄三
• 👤 Ikuro Suzuki
• 👤 育郎 鈴木
• 👤 Mitsuo Koizumi
• 👤 光生 小泉

Bibliographic Details