Patent US4920635A successfully refreshed from Google Patents.
US4920635A
Expired / Lapsed
US
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A method of manufacturing a thermo-sensitive resistor
Assignee: NGK Insulators Ltd
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Filing: 1988-06-28
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Granted: 1990-05-01
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Expires: 2008-06-28
Abstract
Abstract A thermo-sensitive resistor including an electrically insulating substrate, a thin-film heating resistor formed on the substrate and lead wires electrically connected to the thin-film heating resistor, wherein the resistance of the thin-film heating resistor is adjusted by increasing or decreasing a film thickness of a previously formed base thin-film heating resistor by means of an electroplating method or an electroless plating method, and thus the area for heating of the thermo-sensitive resistor can remain constant even if the resistance adjustment is performed.
Inventors
- 👤 Yasuhito Yajima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:34
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/22; H01C17/26; H01C17/262; G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692; H01C17/24; H01C17/2412; H01C7/00; H01C7/02; H01C7/021; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49085
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
113 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming an initial thin-film heating resistor on a surface of said substrate; adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive rsistor.
Claim 2
Independent Claim
113 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming an initial thin-film heating resistor on a surface of said substrate; adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive rsistor.
Claim 3
Dependent Claim
19 words
A method according to claim 1, further comprising forming a glass coat layer on said final thin-film heating resistor.
Claim 4
Dependent Claim
32 words
A method according to claim 1, wherein said initial thin-film heating resistor is formed on said substrate by at least one method selected from the group consisting of sputtering, evaporation or plating.
Claim 5
Dependent Claim
33 words
A method according to claim 1, wherein said initial thin-film resistor is formed from at least one material selected from the group consisting of Pt, Au, Cr, Mo, W, Ni and combinations thereof.
Claim 6
Independent Claim
149 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming a photoresist on an outer surface of said insulating substrate; depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist; burning out said photoresist to form an initial thin-film heating resistor having a desired shape; connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly; heating said assembly; adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and reheating said assembly.
Claim 7
Independent Claim
149 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming a photoresist on an outer surface of said insulating substrate; depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist; burning out said photoresist to form an initial thin-film heating resistor having a desired shape; connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly; heating said assembly; adjusting the resistance of said initial thin-film heating resistor to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and reheating said assembly.
Claim 8
Dependent Claim
19 words
A method according to claim 5, further comprising forming a glass coat layer on said final thin-film heating resistor.
Claim 9
Dependent Claim
32 words
A method according to claim 5, wherein said initial thin-film heating resistor is formed on said substrate by at least one method selected from the group consisting of sputtering, evaporation or plating.
Claim 10
Dependent Claim
33 words
A method according to claim 5, wherein said initial thin-film resistor is formed from at least one material selected from the group consisting of Pt, Au, Cr, Mo, W, Ni and combinations thereof.
Claim 11
Independent Claim
123 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming an initial thin-film heating resistor on a surface of said substrate; electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive resistor; and adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor.
Claim 12
Independent Claim
123 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming an initial thin-film heating resistor on a surface of said substrate; electrically connecting lead wires to said thin-film heating resistor, said lead wires being used to electrically connect said resistor with external elements and to mechanically support said thermo-sensitive resistor; and adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor.
Claim 13
Dependent Claim
19 words
A method according to claim 9, further comprising forming a glass coat layer on said final thin-film heating resistor.
Claim 14
Dependent Claim
32 words
A method according to claim 9, wherein said initial thin-film heating resistor is formed on said substrate by at least one method selected from the group consisting of sputtering, evaporation or plating.
Claim 15
Dependent Claim
33 words
A method according to claim 9, wherein said initial thin-film resistor is formed from at least one material selected from the group consisting of Pt, Au, Cr, Mo, W, Ni and combinations thereof.
Claim 16
Independent Claim
159 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming a photoresist on an outer surface of said insulating substrate; depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist; burning out said photoresist to form an initial thin-film heating resistor having a desired shape; connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly; heating said assembly; adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and reheating said assembly.
Claim 17
Independent Claim
159 words
A method of manufacturing a thermo-sensitive resistor comprising: providing a cylindrical or plate shape electrically insulating substrate; forming a photoresist on an outer surface of said insulating substrate; depositing a thin-film heating resistor layer on the outer surface of said insulating substrate and on a surface of said photoresist; burning out said photoresist to form an initial thin-film heating resistor having a desired shape; connecting lead wires electrically to said initial thin-film heating resistor and mechanically to said insulating substrate via a conductive paste to form an assembly; heating said assembly; adjusting the resistance of said initial thin-film heating resistor, while said resistance is continuously monitored through said lead wires, to form a final thin-film heating resistor, said adjusting being performed by increasing or decreasing a film thickness of said initial thin-film heating resistor by means of an electroplating method or an electroless plating method without changing a width of said initial thin-film heating resistor; and reheating said assembly.
Claim 18
Dependent Claim
19 words
A method according to claim 13, further comprising forming a glass coat layer on said final thin-film heating resistor.
Claim 19
Dependent Claim
32 words
A method according to claim 13, wherein said initial thin-film heating resistor is formed on said substrate by at least one method selected from the group consisting of sputtering, evaporation or plating.
Claim 20
Dependent Claim
33 words
A method according to claim 13, wherein said initial thin-film resistor is formed from at least one material selected from the group consisting of Pt, Au, Cr, Mo, W, Ni and combinations thereof.
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