US4917044A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical contact apparatus for use with plasma or glow discharge reaction chamber
Assignee: Intel Corp
•
Filing: 1989-06-02
•
Granted: 1990-04-17
•
Expires: 2009-06-02
Abstract
Abstract An electrical contact apparatus for use in a plama or glow discharge chamber, particularly a chamber for depositing silicon oxynitride. A feedthrough member provides an electrical path between the interior and exterior of the chamber. An electrical contact member having an outwardly domed surface engages the feedthrough member. A non-conductive collar is disposed about the domed surface for limiting the flow of gas around the domed surface.
Inventors
- 👤 Leopoldo D. Yau
- 👤 Galen H. Kawamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/308; C23C16/44; C23C16/50; C23C16/515; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32137; H01J37/32155; H01J37/32165; H01J37/32431; H01J37/32532; H01J37/32577; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321; H01J2237/3322; H01J2237/3328
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
135 words
In a plasma or glow discharge apparatus having a chamber to transfer energy into reactant gases to deposit silicon oxynitride on a plurality of wafers inserted into the chamber on a sled, an improvement to provide electrical contact between an electrode on the sled and a radio frequency generator disposed external to the chamber comprising: a feedthrough means for providing an electrical path from external of said chamber to internal of said chamber, said feedthrough means terminating in said chamber at a first surface; an electrode contact member having an outwardly domed surface in engagement with said first surface, said member providing an electrical path from said first surface to said electrode; a non-conducting collar disposed about said domed surface and engaging said first surface for limiting the flow of gases around said domed surface.
Claim 2
Dependent Claim
135 words
In a plasma or glow discharge apparatus having a chamber to transfer energy into reactant gases to deposit silicon oxynitride on a plurality of wafers inserted into the chamber on a sled, an improvement to provide electrical contact between an electrode on the sled and a radio frequency generator disposed external to the chamber comprising: a feedthrough means for providing an electrical path from external of said chamber to internal of said chamber, said feedthrough means terminating in said chamber at a first surface; an electrode contact member having an outwardly domed surface in engagement with said first surface, said member providing an electrical path from said first surface to said electrode; a non-conducting collar disposed about said domed surface and engaging said first surface for limiting the flow of gases around said domed surface.
References Cited (Backward Citations)
US4422407A
Cited
US4401507A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-16 | 1993-10-16 | 1994-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-16 | 1997-10-16 | 1998-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-16 | 2001-10-16 | 2002-04-17 | $7700.00 | Window Closed / Lapsed |