US4401507A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions
Assignee: IMPERIAL BANK A CALIFORNIA BANKING Corp
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Filing: 1982-07-14
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Granted: 1983-08-30
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Expires: 2002-07-14
Abstract
Abstract Method and apparatus for improved uniformity in an externally excited non-thermal chemical reaction process. In the inventive process, the reactant is externally activated for a time short compared with the time during which reactant depletion would otherwise occur. The reactant is then deactivated for a period of time comparable to the transit time across the workload. In this way improved uniformity is obtained by reducing the depletion of the reactant as it flows across the workload.
Inventors
- 👤 George M. Engle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 13:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; B; B01; B01J; B01J12/00; B01J12/002; B01J19/00; B01J19/08; B01J19/087; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B33/00; C30B33/005; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
76 words
An apparatus for carrying out an externally excited non-thermal chemical reaction comprising means including an active region for containing a chemical reaction therein, means for creating a non thermal external excitation of said chemical reaction within said active region of said containing means, and control means for substantially interrupting said excitation of said chemical reaction for a period of time substantially equivalent to the transit time of the reactant through said active region of said apparatus.
Claim 2
Independent Claim
76 words
An apparatus for carrying out an externally excited non-thermal chemical reaction comprising means including an active region for containing a chemical reaction therein, means for creating a non thermal external excitation of said chemical reaction within said active region of said containing means, and control means for substantially interrupting said excitation of said chemical reaction for a period of time substantially equivalent to the transit time of the reactant through said active region of said apparatus.
Claim 3
Dependent Claim
33 words
The apparatus of claim 1, further including means for creating said excitation for a time less than the time during which significant depletion of said reactant in said active region would naturally occur.
Claim 4
Dependent Claim
21 words
The apparatus according to claim 1 or claim 2, wherein said apparatus comprises means for depositing a film from said reactant.
Claim 5
Dependent Claim
22 words
The apparatus according to claim 1 or claim 2, wherein said apparatus comprises means for etching using said reactant as an etchant.
Claim 6
Independent Claim
75 words
A method for carrying out an external excitation of a non-thermal chemical reaction within a container having an active region with at least one reactant located within said container comprising the step of externally exciting a non-thermal chemical reaction within said active region of said container, and substantially interrupting the external excitation of said chemical reaction for a time substantially equivalent to the transit time of said reactant through said active region of said container.
Claim 7
Independent Claim
75 words
A method for carrying out an external excitation of a non-thermal chemical reaction within a container having an active region with at least one reactant located within said container comprising the step of externally exciting a non-thermal chemical reaction within said active region of said container, and substantially interrupting the external excitation of said chemical reaction for a time substantially equivalent to the transit time of said reactant through said active region of said container.
Claim 8
Dependent Claim
29 words
The method of claim 5, further including exciting said non-thermal chemical reaction for a time less than the time during which significant depletion of said reactant would naturally occur.
Claim 9
Dependent Claim
26 words
The method according to claim 5 or claim 6, further including at least one of RF, Laser, optical and other excitation of said non-thermal chemical reaction.
Claim 10
Dependent Claim
16 words
The method of claim 5 or claim 6, wherein including depositing a film from said reactant.
Claim 11
Dependent Claim
16 words
The method of claim 5 or claim 6, including etching using said reactant as an etchant.
References Cited (Backward Citations)
US4292153A
Cited
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| 3.5 Years (Year 4) | 1986-08-29 | 1987-02-28 | 1987-08-30 | $2000.00 | Window Closed / Lapsed |
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