US4916247A
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Organometal-containing compounds
Assignee: Novartis Corp
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Filing: 1988-08-29
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Granted: 1990-04-10
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Expires: 2008-08-29
Abstract
Abstract Organometal-containing styrene derivatives of the formula I ##STR1## in which, for example, M is Si, X is 0, R 1 and R 2 are hydrogen, R 4 to R 6 are each methyl, a is zero and R 7 is hydrogen or methyl, and organometal-containing compounds of the formula VII ##STR2## in which M and R 1 to R 6 are, for example, as defined above and Y is, for example, 4-nitrophenoxy, are valuable starting materials for the preparation of organometal-containing polymers. The polymers are suitable for the preparation of photoresists which can be developed under dry conditions, such as are required in the production of structured images, particularly in microelectronics.
Inventors
- 👤 Alfred Steinmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:25
CPC Classifications
C; C07; C07F; C07F7/00; C07F7/02; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758; C07F7/08; C07F7/0803; C07F7/081; C07F7/0812; C08; C08F; C08F30/00; C08F30/04
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
131 words
An organometal-containing styrene derivative of the formula I ##STR27## in which R 1 to R 6 independently of one another are C 1 -C 4 alkyl C 1 -C 4 -alkoxy, phenyl, benzyl, phenoxy, a group -M(R 8 ) 3 or ##STR28## or R 3 and R 4 together are ##STR29## and R 1 to R 3 can, in addition, also be hydrogen atoms, R 7 is hydrogen or C 1 -C 4 alkyl and R 8 is C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl or phenoxy, M is Si, Ge, Sn, CH 2 Si or OSi and X is O,S or NH and a is zero or 1, b is an integer from 1 to 6 and c is an integer from 3 to 6.
Claim 2
Dependent Claim
131 words
An organometal-containing styrene derivative of the formula I ##STR27## in which R 1 to R 6 independently of one another are C 1 -C 4 alkyl C 1 -C 4 -alkoxy, phenyl, benzyl, phenoxy, a group -M(R 8 ) 3 or ##STR28## or R 3 and R 4 together are ##STR29## and R 1 to R 3 can, in addition, also be hydrogen atoms, R 7 is hydrogen or C 1 -C 4 alkyl and R 8 is C 1 -C 4 alkyl, C 1 -C 4 alkoxy, phenyl, benzyl or phenoxy, M is Si, Ge, Sn, CH 2 Si or OSi and X is O,S or NH and a is zero or 1, b is an integer from 1 to 6 and c is an integer from 3 to 6.
Claim 3
Dependent Claim
17 words
A styrene derivative according to claim 1, in which M is CH 2 Si, OSi or Si.
Claim 4
Dependent Claim
14 words
A styrene derivative according to claim 1, in which X is S or O.
Claim 5
Dependent Claim
46 words
A styrene derivative according to claim 1, in which R 1 and R 2 are each hydrogen, R 3 is methyl or Si(CH 3 ) 3 and R 4 to R 6 are each methyl or in which R 3 and R 4 together are ##STR30##
Claim 6
Dependent Claim
35 words
A styrene derivative according to claim 4, in which R 1 and R 2 are each hydrogen, R 3 is methyl or Si(CH 3 ) 3 and R 4 to R 6 are each methyl.
Claim 7
Dependent Claim
19 words
A styrene derivative according to claim 1, in which a is zero and R 7 is hydrogen or methyl.
Claim 8
Dependent Claim
15 words
4-(2'-Trimethylsilyl-2,'-propoxycarbonyloxy)-styrene, 4-(2,'-trimethylsilyl-2'-propoxycarbonyloxy)-α-methylstyrene and 4-(1',1'-bistrimethylsilylethoxycarbonyloxy)-α-methylstyrene as a compound of the formula I according to claim 1.
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