Patent US4915977A successfully refreshed from Google Patents.
US4915977A
Expired / Lapsed
US
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Method of forming a diamond film
Assignee: Nissin Electric Co Ltd
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Filing: 1988-02-25
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Granted: 1990-04-10
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Expires: 2008-02-25
Abstract
Abstract A method of forming a diamond film on a substrate wherein hydrogen, a hydrocarbon series gas, an inert gas, an organic compound series gas or a mixture of such gases is introduced into a vacuum vessel to contact a substrate and carbon is evaporated by are discharge at a carbon cathode while applying a voltage to the substrate to deposit carbon on the substrate thus forming a diamond film on the substrate. A silicon series gas, a germanium series gas or a mixture thereof may be also introduced into the vessel with the foregoing gas or gases. While the carbon is being deposited on the substrate, thermoelectrons may also be supplied onto the substrate, and, further, high frequency discharge may be generated in a space between the substrate and the cathodes.
Inventors
- 👤 Koji Okamoto
- 👤 Masayasu Tanjo
- 👤 Eiji Kamijo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:30
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0605; C23C14/0611; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
93 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying a negative bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 2
Independent Claim
93 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying a negative bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 3
Dependent Claim
24 words
A diamond film forming method according to claim 1, wherein carbon is deposited onto said substrate while thermoelectrons are being supplied onto said substrate.
Claim 4
Dependent Claim
32 words
A diamond film forming method according to claim 1, wherein carbon is deposited onto said substrate while high frequency discharge is being generated in a space between said substrate and said cathode.
Claim 5
Independent Claim
117 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a combination of (1) a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof and (b 2) a gas selected from the group consisting of silicon series gases, germanium series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying a negative bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 6
Independent Claim
117 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a combination of (1) a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof and (b 2) a gas selected from the group consisting of silicon series gases, germanium series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying a negative bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 7
Dependent Claim
24 words
A diamond film forming method according to claim 4, wherein carbon is deposited onto said substrate while thermoelectrons are being supplied onto said substrate.
Claim 8
Dependent Claim
33 words
A diamond film forming method according to claim 4, wherein carbon is deposited onto said substrate while a high frequency discharge is being generated in a space between said substrate and said cathode.
Claim 9
Independent Claim
93 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying an AC bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 10
Independent Claim
93 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying an AC bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 11
Dependent Claim
32 words
A diamond film forming method according to claim 7, wherein carbon is deposited onto said substrate while high frequency discharge is being generated in a space between said substrate and said cathode.
Claim 12
Independent Claim
116 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a combination of (1) a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof and (2) a gas selected from the group consisting of silicon series gases, germanium series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying an AC bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 13
Independent Claim
116 words
A method of forming a diamond film on a substrate comprising the steps of: introducing a combination of (1) a gas selected from the group consisting of inert gases, hydrocarbon series gases, organic compound series gases and mixtures thereof and (2) a gas selected from the group consisting of silicon series gases, germanium series gases and mixtures thereof into a vacuum vessel to contact a substrate housed in said vessel; and evaporating carbon onto said substrate by arc discharge at a carbon cathode housed in said vacuum vessel, while applying an AC bias voltage to said substrate or to a holder for holding said substrate to deposit carbon on said substrate thereby forming said diamond film.
Claim 14
Dependent Claim
32 words
A diamond film forming method according to claim 9, wherein carbon is deposited onto said substrate while high frequency discharge is being generated in a space between said substrate and said cathode.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-09 | 1993-10-09 | 1994-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-09 | 1997-10-09 | 1998-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-09 | 2001-10-09 | 2002-04-10 | $7700.00 | Window Closed / Lapsed |