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US4915775A
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US
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Apparatus for adjusting initial position of melt surface
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1988-07-21
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Granted: 1990-04-10
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Expires: 2008-07-21
Abstract
Abstract A melt-surface initial position adjusting apparatus which is suitable for use in a monocrystal growing system employing the Czochralski method to adjust the vertical position of the melt surface before the growing of a monocrystal. The apparatus can ensure a highly precise measurement of a crystal-diameter measuring device, thereby enabling a reduction in the costs of producing a monocrystal bar. Before the growing of a crystal, the vertical position (H) of the surface (16A) of a melt within a crucible is measured. The crucible is moved vertically on the basis of the measured value in such a manner as to maintain the distance (L) between the melt surface (16A) and an image sensor (28) for measuring the crystal diameter at a predetermined value.
Inventors
- 👤 Nobuo Katsuoka
- 👤 Yoshihiro Hirano
- 👤 Munenori Tomita
- 👤 Atsushi Ozaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:00
CPC Classifications
C; C30; C30B; C30B15/00; C30B15/20; C30B15/22; C30B15/26; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1004; Y10T117/1008
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
217 words
An apparatus for adjusting the initial position of the surface of the melt, which is suitable for use in a monocrystal growing system employing the Czochralski method, comprising: a melt-surface initial position measuring device for measuring the vertical position (H) of the surface (16A) of a melt (16) within a crucible (14); and means (18, 22, 52) for vertically moving said crucible (14) to a desired initial position selected on the basis of measurement of said melt-surface initial position by said melt-surface initial position measuring device; wherein said melt-surface initial position measuring device comprises: electrical contact detecting means (46, 48, 50) for detecting the electrical contact between a seed crystal (26) and said melt (16); reference position detecting means (30, 30A) disposed above said melt (16) for detecting that the lower end of said seed crystal (26) is at a reference position; pulse generating means (40) for outputting a number of pulses proportional to the distance through which said seed crystal (26) descends; and pulse counting means (41) for counting the number of pulses generated while said seed crystal (26) descends from said reference position to the position at which said seed crystal (26) is brought into electrical contact with said melt (16), and for outputting a vertical position of the surface (16A) of said melt (16).
Claim 2
Independent Claim
217 words
An apparatus for adjusting the initial position of the surface of the melt, which is suitable for use in a monocrystal growing system employing the Czochralski method, comprising: a melt-surface initial position measuring device for measuring the vertical position (H) of the surface (16A) of a melt (16) within a crucible (14); and means (18, 22, 52) for vertically moving said crucible (14) to a desired initial position selected on the basis of measurement of said melt-surface initial position by said melt-surface initial position measuring device; wherein said melt-surface initial position measuring device comprises: electrical contact detecting means (46, 48, 50) for detecting the electrical contact between a seed crystal (26) and said melt (16); reference position detecting means (30, 30A) disposed above said melt (16) for detecting that the lower end of said seed crystal (26) is at a reference position; pulse generating means (40) for outputting a number of pulses proportional to the distance through which said seed crystal (26) descends; and pulse counting means (41) for counting the number of pulses generated while said seed crystal (26) descends from said reference position to the position at which said seed crystal (26) is brought into electrical contact with said melt (16), and for outputting a vertical position of the surface (16A) of said melt (16).
Claim 3
Dependent Claim
93 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 1, wherein said electrical contact detecting means comprises: a resistor (48); a power source (46) applying a predetermined voltage via said resistor to a circuit connecting said seed crystal (26) and said melt (16); and a comparator (50) for comparing a voltage V across the terminals of said resistor with a reference voltage V0, the output value of said comparator being used to detect that said seed crystal (26) is brought into contact with said melt (16).
Claim 4
Dependent Claim
27 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 2, wherein said power source (46) is a direct-current voltage source.
Claim 5
Dependent Claim
101 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 1, wherein said reference position detecting means comprises: a light emitter (60); and a light receiver (62) for receiving light radiated from said light emitter (60), said light emitter (60) and said light receiver being disposed as close as possible to the surface (16A) of said melt (16) and in such a manner that said seed crystal (26) is allowed to cross the optical path of the light propagating from said light emitter (60) to said light receiver (62) when said seed crystal (26) descends.
Claim 6
Dependent Claim
69 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 1, wherein said reference position detecting means comprises: a light emitting/receiving means (64) in which a light emitting element and a light receiving element are integrated; and a reflecting means (66) disposed in opposition to said light emitting/receiving means for reflecting light radiated from said light emitting element toward said light receiving element.
Claim 7
Dependent Claim
62 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 1, wherein said pulse generating means outputs one pulse each time a drum (34) rotates through a predetermined small angle, said drum (34) supporting a wire (32) which is wound thereon and has one end thereof connected to a holder (24) holding said seed crystal (26).
Claim 8
Dependent Claim
44 words
An apparatus for adjusting the initial position of the surface of a melt according to claim 1, wherein the count of said pulse counting means is cleared when said reference position detecting means (30, 30A) detects the lower end of said seed crystal (26).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-09 | 1993-10-09 | 1994-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-09 | 1997-10-09 | 1998-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-09 | 2001-10-09 | 2002-04-10 | $7700.00 | Window Closed / Lapsed |