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US4908568A
Expired / Lapsed
US
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Mechanical probe for optical measurement of electrical potentials
Assignee: Siemens AG
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Filing: 1988-04-28
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Granted: 1990-03-13
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Expires: 2008-04-28
Abstract
Abstract A mechanical probe for optical measurement of electrical potentials. The probe of the present invention is composed of a cubic, electro-optical crystal fashioned in the form of a tip and of a metallization which is at ground potential and which covers the crystal with the exception of those surface regions located immediately opposite a measuring location, for example an interconnect of an integrated circuit. Since the metallization acting as a cooperating electrode significantly facilitates the penetration of the electrical stray field into the crystal tip, geometry-dependent effects and influences of electrical microfields are nearly completely supressed. The probe therefore makes it possible to utilize the voltage difference instead of the topography-dependent field difference for optical measurement of electrical signals with high chronological resolution.
Inventors
- 👤 Soelkner Gerald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 05:20
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/07; G01R1/071
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
55 words
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a subject surface and which is penetrated by a light ray, comprising a cubic crystal fashioned in the form of a tip having an electrode located on a surface thereof in the region of the tip.
Claim 2
Dependent Claim
55 words
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a subject surface and which is penetrated by a light ray, comprising a cubic crystal fashioned in the form of a tip having an electrode located on a surface thereof in the region of the tip.
Claim 3
Dependent Claim
24 words
The mechanical probe according to claim 1, wherein a (1, 1, 1) - direction of the crystal is oriented perpendicular to the subject surface.
Claim 4
Dependent Claim
28 words
The mechanical probe according to claim 1, wherein the crystal has a first lateral face oriented perpendicular relative to the subject surface and provided with a reflective layer.
Claim 5
Dependent Claim
25 words
The mechanical probe according to claim 3, wherein a second lateral face of the crystal forms an angle of 45° with said first lateral face.
Claim 6
Dependent Claim
15 words
The mechanical probe according to claim 1, wherein a metallization is provided as the electrode.
Claim 7
Dependent Claim
75 words
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a specimen subject and which is penetrated by a light ray, comprising: a cubic crystal fashioned in the form of a tip, a (1, 1, 1) - direction of the crystal being oriented perpendicular to the subject surface; and a metallization forming an electrode on a surface of the crystal in the region of the tip.
Claim 8
Dependent Claim
75 words
A mechanical probe for optical measurement of electrical potentials and having an electro-optical crystal which is located immediately above a specimen subject and which is penetrated by a light ray, comprising: a cubic crystal fashioned in the form of a tip, a (1, 1, 1) - direction of the crystal being oriented perpendicular to the subject surface; and a metallization forming an electrode on a surface of the crystal in the region of the tip.
Claim 9
Dependent Claim
28 words
The mechanical probe according to claim 6, wherein the crystal has a first lateral face oriented perpendicular relative to the subject surface and provided with a reflective layer.
Claim 10
Dependent Claim
25 words
The mechanical probe according to claim 7, wherein a second lateral face of the crystal defines an angle of 45° with said first lateral face.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-12 | 1993-09-11 | 1994-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-12 | 1997-09-11 | 1998-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-12 | 2001-09-11 | 2002-03-13 | $7700.00 | Window Closed / Lapsed |