US4901670A
Expired / Lapsed
US
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Elemental mercury source for metal-organic chemical vapor deposition
Assignee: Raytheon Co
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Filing: 1988-08-22
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Granted: 1990-02-20
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Expires: 2008-08-22
Abstract
Abstract Apparatus and method for supplying elemental mercury to a MOCVD reactor during the operation of the reactor and for maintaining a saturated mercury vapor atmosphere over a surface of a substrate. A susceptor assembly 10 includes a susceptor 20 having a surface for supporting a substrate 22 within a growth chamber. A reservoir 34 of liquid mercury 36 is disposed external to the reactor and supplies liquid mercury via a capillary feed tube 30 to a depression or trough 24 formed within a surface of the susceptor at an upstream position from the substrate. Mercury within the trough is vaporized by the heated susceptor and flows over the substrate, thereby establishing a saturated mercury atmoshere over the substrate. The reservoir may be pressurized by a source of gas or its vertical position may be adjusted to provide a gravity feed of the mercury.
Inventors
- 👤 William L. Ahlgren
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:02
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4485; C23C16/22; C23C16/30; C23C16/305; C23C16/306; C30; C30B; C30B25/00; C30B25/02; C30B25/12
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
50 words
A susceptor for use in a metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; and a region formed within said body, said region defining a volume for containing therein a quantity of liquid mercury.
Claim 2
Dependent Claim
50 words
A susceptor for use in a metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; and a region formed within said body, said region defining a volume for containing therein a quantity of liquid mercury.
Claim 3
Dependent Claim
56 words
A susceptor as defined in claim 1 wherein said body has a generally wedge shaped cross-section having a front portion and a rear portion, the rear portion being thicker than the front portion, wherein said surface is a top, generally inclined surface of said body and wherein said region is formed within said top, inclined surface.
Claim 4
Dependent Claim
29 words
A susceptor as defined in claim 2 wherein said susceptor includes means for mechanically coupling said body to a support means for supporting said body in a desired orientation.
Claim 5
Dependent Claim
30 words
A susceptor as defined in claim 3 wherein said susceptor further includes means for sensing a temperature of said body, said temperature sensing means being thermally coupled to said body.
Claim 6
Dependent Claim
13 words
A susceptor as defined in claim 1 wherein the refractory material comprises graphite.
Claim 7
Dependent Claim
60 words
A susceptor assembly for use in a metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; a region formed within said body, said region defining a volume for containing therein a quantity of liquid mercury; and means for feeding the liquid mercury to the region.
Claim 8
Dependent Claim
60 words
A susceptor assembly for use in a metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; a region formed within said body, said region defining a volume for containing therein a quantity of liquid mercury; and means for feeding the liquid mercury to the region.
Claim 9
Dependent Claim
21 words
A susceptor assembly as defined in claim 6 and further comprising means for supporting said feeding means relative to said region.
Claim 10
Dependent Claim
43 words
A susceptor assembly as defined in claim 7 wherein said feeding means comprises an elongated hollow tube having a first end disposed above said region for feeding liquid mercury thereto and a second end in fluid communication with a source of liquid mercury.
Claim 11
Dependent Claim
22 words
A susceptor assembly as defined in claim 8 wherein said elongated hollow tube is a capillary tube comprised of a refractory material.
Claim 12
Dependent Claim
57 words
A susceptor assembly as defined in claim 8 wherein said body has a generally wedge shaped cross-section having a front portion and a rear portion, the rear portion being thicker than the front portion, wherein said surface is a top, generally inclined surface of said body and wherein said region is formed within said top, inclined surface.
Claim 13
Dependent Claim
76 words
Apparatus for providing elemental liquid mercury to a chamber wherein the deposition of a mercury compound upon a substrate is accomplished, comprising: means for supporting a substrate within a chamber during the deposition of a mercury compound thereon, said supporting means comprising means for holding a quantity of liquid mercury; means, external to the chamber, for storing a supply of liquid mercury; and means for transporting liquid mercury from said storing means to said holding means.
Claim 14
Dependent Claim
76 words
Apparatus for providing elemental liquid mercury to a chamber wherein the deposition of a mercury compound upon a substrate is accomplished, comprising: means for supporting a substrate within a chamber during the deposition of a mercury compound thereon, said supporting means comprising means for holding a quantity of liquid mercury; means, external to the chamber, for storing a supply of liquid mercury; and means for transporting liquid mercury from said storing means to said holding means.
Claim 15
Dependent Claim
59 words
Apparatus as defined in claim 11 wherein said supporting means comprises a susceptor, said susceptor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; and wherein said holding means comprises a region formed within said body, said region defining a volume for containing therein a quantity of liquid mercury.
Claim 16
Dependent Claim
72 words
Apparatus as defined in claim 12 wherein said storing means comprises a reservoir of liquid mercury and wherein said transporting means comprises: means, coupled to said reservoir, for pressurizing said reservoir to a predetermined pressure; and means for feeding liquid mercury comprising an elongated hollow tube having a first end disposed above said region for feeding liquid mercury to said region and a second end coupled to said reservoir of liquid mercury.
Claim 17
Dependent Claim
21 words
Apparatus as defined in claim 13 wherein said predetermined pressure is within a range of approximately zero to approximately 15 psig.
Claim 18
Dependent Claim
80 words
Apparatus as defined in claim 12 wherein said storing means comprises a reservoir of liquid mercury and wherein said transporting means comprises: means, coupled to said reservoir, for maintaining said container at a position along a substantially vertical axis relative to said region; and means for feeding liquid mercury comprising an elongated hollow tube having a first end disposed above said region for feeding liquid mercury to said region and a second end coupled to said reservoir of liquid mercury.
Claim 19
Dependent Claim
28 words
Apparatus as defined in claim 11 and further comprising means for heating said holding means to a predetermined temperature such that mercury within the holding means is vaporized.
Claim 20
Dependent Claim
20 words
Apparatus as defined in claim 16 and further comprising means for transporting mercury vapor over a surface of the substrate.
Claim 21
Dependent Claim
25 words
Apparatus as defined in claim 17 wherein the predetermined temperature is within the range of approximately 180° C. to approximately the boiling point of mercury.
Claim 22
Dependent Claim
66 words
A susceptor for use in a vertically disposed metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; a region formed within a centrally disposed portion of the surface, said region defining a volume for containing therein a quantity of liquid mercury; and means for feeding the liquid mercury to the region.
Claim 23
Dependent Claim
66 words
A susceptor for use in a vertically disposed metal-organic chemical vapor deposition reactor comprising: a body comprised of a refractory material, said body having a surface for supporting at least one substrate; a region formed within a centrally disposed portion of the surface, said region defining a volume for containing therein a quantity of liquid mercury; and means for feeding the liquid mercury to the region.
Claim 24
Dependent Claim
48 words
A susceptor as defined in claim 19 wherein said feeding means comprises an elongated hollow tube having a first end disposed through said body and in communication with said region for feeding liquid mercury thereto and a second end in fluid communication with a source of liquid mercury.
Claim 25
Dependent Claim
33 words
A susceptor as defined in claim 20 wherein the surface of said body has a generally circular shape and wherein said region includes a depression formed at substantially the center of the surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-19 | 1993-08-21 | 1994-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-19 | 1997-08-21 | 1998-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-19 | 2001-08-21 | 2002-02-20 | $7700.00 | Window Closed / Lapsed |