US4900405A — Surface type microelectronic gas and vapor sensor

Claim 1

Independent Claim 109 words

A voltammetric microsensor structure, comprising: a substrate having an active area on a surface thereof; a sensing electrode having a portion thereof on said active area; a counter electrode having a portion thereof on said active area; a reference electrode having a portion thereof on said active area; said sensing electrode, said counter electrode and said reference electrode defining respectively therebetween a sensing-counter gap, a sensing-reference gap and a counter-reference gap; a solid polymer electrolyte bridging said gaps; a barrier covering said solid polymer electrolyte electrolyric medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolyte.

Claim 2

Dependent Claim 109 words

A voltammetric microsensor structure, comprising: a substrate having an active area on a surface thereof; a sensing electrode having a portion thereof on said active area; a counter electrode having a portion thereof on said active area; a reference electrode having a portion thereof on said active area; said sensing electrode, said counter electrode and said reference electrode defining respectively therebetween a sensing-counter gap, a sensing-reference gap and a counter-reference gap; a solid polymer electrolyte bridging said gaps; a barrier covering said solid polymer electrolyte electrolyric medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolyte.

Claim 3

Dependent Claim 15 words

A microsensor structure as set forth in claim 1, wherein said barrier is water impermeable.

Claim 4

Dependent Claim 29 words

A microsensor structure as set forth in claim 1, further including: a dielectric wall extending outwardly from said substrate surface about said active area and said solid polymer electrolyte.

Claim 5

Dependent Claim 17 words

A microsensor structure as set forth in claim 1, wherein said substrate is of a dielectric material.

Claim 6

Dependent Claim 28 words

A microsensor structure as set forth in claim 1, wherein said substrate is of a semiconductor material and further including: an insulator between said substrate and said electrodes.

Claim 7

Dependent Claim 20 words

A microsensor as set forth in claim 1, wherein said sensing-counter electrode gap is no more than about 50 microns.

Claim 8

Dependent Claim 15 words

A microsensor structure as set forth in claim 1, wherein said barrier is water impermeable.

Claim 9

Dependent Claim 58 words

A microsensor structure as set forth in claim 1, further including: a plurality of sets of said sensing, counter and reference electrodes, each of said sets being on said substrate, each of said sets being in contact with a respective one of a corresponding plurality of solid polymer electrolytes, said polymer electrolytes being electrically isolated from one another.

Claim 10

Independent Claim 114 words

A method of voltammetrically determining the concentration of a gaseous species, comprising: contacting a microsensor structure with the gaseous species in a gas phase and voltammetrically measuring the electrochemical effect of the species between sensing and counter electrode, the microsensor structure comprising a substrate having a sensing electrode, a counter electrode and a reference electrode, the electrodes defining respective sensing-counter, sensing-reference and counter-reference gaps between portions thereof mounted on an active area on the surface of the substrate, the gaps being bridged by a solid polymer electrolyte, a barrier covering said electrolyte, said barrier being permeable to an analyte gas and an aqueous reservoir internal of said substrate in flow contact with said electrolyte.

Claim 11

Independent Claim 114 words

A method of voltammetrically determining the concentration of a gaseous species, comprising: contacting a microsensor structure with the gaseous species in a gas phase and voltammetrically measuring the electrochemical effect of the species between sensing and counter electrode, the microsensor structure comprising a substrate having a sensing electrode, a counter electrode and a reference electrode, the electrodes defining respective sensing-counter, sensing-reference and counter-reference gaps between portions thereof mounted on an active area on the surface of the substrate, the gaps being bridged by a solid polymer electrolyte, a barrier covering said electrolyte, said barrier being permeable to an analyte gas and an aqueous reservoir internal of said substrate in flow contact with said electrolyte.

Claim 12

Dependent Claim 33 words

A method as set forth in claim 9, further including: positioning said sensing and counter electrodes sufficiently closely adjacent one another whereby said sensing-counter electrode gap is no more than about 50 microns.

Claim 13

Dependent Claim 28 words

A method as set forth in claim 10, wherein said solid polymer electrolyte is of a thickness upon said sensing electrode of no more than about 10 microns.

Claim 14

Dependent Claim 163 words

In a microsensor structure comprising a substrate having a surface having an active area, first and second adjacent electrodes having, respectively, sensing and counter portions on the active area; and an electrolytic medium covering the active area, the improvement comprising: positioning the first and second electrodes sufficiently close together on said active area so that the time of migration of an ionic moiety from one to the other of the electrodes is no more than about 1 minute; restricting the thickness of the electrolytic medium to be no more than about 10 microns so that the time of diffusion of the gaseous species through the electrolytic medium to the first electrode is no more than about equal to the time of migration of the ionic moiety from one to the other of the electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow communication with said electrolytic medium.

Claim 15

Dependent Claim 163 words

In a microsensor structure comprising a substrate having a surface having an active area, first and second adjacent electrodes having, respectively, sensing and counter portions on the active area; and an electrolytic medium covering the active area, the improvement comprising: positioning the first and second electrodes sufficiently close together on said active area so that the time of migration of an ionic moiety from one to the other of the electrodes is no more than about 1 minute; restricting the thickness of the electrolytic medium to be no more than about 10 microns so that the time of diffusion of the gaseous species through the electrolytic medium to the first electrode is no more than about equal to the time of migration of the ionic moiety from one to the other of the electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow communication with said electrolytic medium.

Claim 16

Dependent Claim 186 words

In a microsensor structure comprising a substrate having a surface having an active area, first and second adjacent electrodes having, respectively, sensing and counter portions on the active area; and an electrolytic medium covering the active area, the improvement comprising: positioning the first and second electrodes sufficiently close together on said active area so that the time of migration of an ionic moiety from one to the other of the electrodes is no more than about 1 minute; restricting the thickness of the electrolytic medium to be no more than about 10 microns so that the time of diffusion of the gaseous species through the electrolytic medium to the first electrode is no more than about equal to the time of migration of the ionic moiety from one to the other of the electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; a third electrode having a reference portion in contact with said electrolytic medium and free from contact with said first and second electrodes; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 17

Dependent Claim 186 words

In a microsensor structure comprising a substrate having a surface having an active area, first and second adjacent electrodes having, respectively, sensing and counter portions on the active area; and an electrolytic medium covering the active area, the improvement comprising: positioning the first and second electrodes sufficiently close together on said active area so that the time of migration of an ionic moiety from one to the other of the electrodes is no more than about 1 minute; restricting the thickness of the electrolytic medium to be no more than about 10 microns so that the time of diffusion of the gaseous species through the electrolytic medium to the first electrode is no more than about equal to the time of migration of the ionic moiety from one to the other of the electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; a third electrode having a reference portion in contact with said electrolytic medium and free from contact with said first and second electrodes; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 18

Dependent Claim 202 words

A microsensor structure for sensing an analyte in a gas phase, comprising: a substrate having a surface having an active area; a sensing electrode having a sensing portion on said active area, said sensing portion comprising a plurality of sensing fingers and having an outfacing surface facing away from said substrate; a counter electrode having a counter portion on said active area, said counter portion comprising a plurality of counter fingers, said counter fingers being positioned between and aligned generally along said sensing fingers to define sensing finger-counter finger gaps of no more than about 50 microns; a reference electrode having a reference portion on said active area and being free from contact with said sensing and counter electrodes; an electrolytic medium on said active area bridging said sensing finger-counter finger gaps and communicating said reference portion with said sensing portion, said electrolytic medium covering the active area by not covering the outfacing surface of said sensing electrode, the electrolytic medium, the sensing electrode and the gas phase forming a 3-phase sensing boundary; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 19

Dependent Claim 202 words

A microsensor structure for sensing an analyte in a gas phase, comprising: a substrate having a surface having an active area; a sensing electrode having a sensing portion on said active area, said sensing portion comprising a plurality of sensing fingers and having an outfacing surface facing away from said substrate; a counter electrode having a counter portion on said active area, said counter portion comprising a plurality of counter fingers, said counter fingers being positioned between and aligned generally along said sensing fingers to define sensing finger-counter finger gaps of no more than about 50 microns; a reference electrode having a reference portion on said active area and being free from contact with said sensing and counter electrodes; an electrolytic medium on said active area bridging said sensing finger-counter finger gaps and communicating said reference portion with said sensing portion, said electrolytic medium covering the active area by not covering the outfacing surface of said sensing electrode, the electrolytic medium, the sensing electrode and the gas phase forming a 3-phase sensing boundary; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 20

Dependent Claim 144 words

A microsensor structure for sensing an analyte in a gas phase, comprising: a substrate having a substrate surface having an active area; a sensing electrode on the substrate surface having a sensing portion upon the active area, the sensing portion having an outfacing surface facing away from the substrate; a solid electrolytic medium covering the active area but not covering the outfacing surface, the electrolytic medium, the first electrode and the gas phase forming a 3-phase sensing boundary; a counter electrode in contact with the electrolytic medium and free from contact with the sensing electrode; and a reference electrode in contact with the electrolytic medium and free from contact with the sensing and counter electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 21

Dependent Claim 144 words

A microsensor structure for sensing an analyte in a gas phase, comprising: a substrate having a substrate surface having an active area; a sensing electrode on the substrate surface having a sensing portion upon the active area, the sensing portion having an outfacing surface facing away from the substrate; a solid electrolytic medium covering the active area but not covering the outfacing surface, the electrolytic medium, the first electrode and the gas phase forming a 3-phase sensing boundary; a counter electrode in contact with the electrolytic medium and free from contact with the sensing electrode; and a reference electrode in contact with the electrolytic medium and free from contact with the sensing and counter electrodes; a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas; and an aqueous reservoir internal of said substrate in flow contact with said electrolytic medium.

Claim 22

Dependent Claim 15 words

A microsensor structure as set forth in claim 15, wherein said barrier is water impermeable.

Claim 23

Dependent Claim 28 words

A microsensor structure as set forth in claim 15, further including: a dielectric wall extending outwardly from said substrate surface about said active area and said electrolytic medium.

Claim 24

Dependent Claim 17 words

A microsensor structure as set forth in claim 15, wherein said substrate is of a dielectric material.

Claim 25

Dependent Claim 31 words

A microsensor structure as set forth in claim 15, wherein said substrate is of a semiconductor material and further including: an insulator between said substrate and said first and second electrodes.

Claim 26

Dependent Claim 33 words

A microsensor as set forth in claim 15, wherein said sensing and counter electrodes are adjacent one another and are separated by a sensing-counter electrode gap of no more than about 50 microns.

Claim 27

Dependent Claim 24 words

A microsensor as set forth in claim 20, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 28

Dependent Claim 14 words

A microsensor as set forth in claim 21, wherein said member is water impermeable.

Claim 29

Dependent Claim 28 words

A microsensor as set forth in claim 20, wherein said solid electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 30

Dependent Claim 24 words

A microsensor as set forth in claim 23, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 31

Dependent Claim 56 words

A microsensor structure as set forth in claim 15, further including: a plurality of sets of said sensing and counter electrodes, each of said sets being on said substrate, said sets each being in contact with a respective one of a corresponding plurality of solid electrolytic mediums, said electrolytic mediums being electrically isolated from one another.

Claim 32

Dependent Claim 49 words

An electrode structure, comprising: a first electrode having a sensing portion having an outfacing surface having uneven configuration including a plurality of outwardly extending portions; and an electrolytic medium covering said outfacing surface with said outwardly extending portions extending outwardly beyond said electrolytic medium and not being covered thereby.

Claim 33

Dependent Claim 49 words

An electrode structure, comprising: a first electrode having a sensing portion having an outfacing surface having uneven configuration including a plurality of outwardly extending portions; and an electrolytic medium covering said outfacing surface with said outwardly extending portions extending outwardly beyond said electrolytic medium and not being covered thereby.

Claim 34

Dependent Claim 28 words

An electrode structure as set forth in claim 26, wherein said outfacing extending portions extend outwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 35

Dependent Claim 28 words

An electrode structure as set forth in claim 27, wherein said electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 36

Dependent Claim 106 words

A microsensor structure, comprising: a substrate having a substrate having an active area; a first electrode on with said substrate surface, said first electrode having a sensing portion on said active area, said sensing portion having an infacing surface facing said substrate surface and an outfacing surface facing away from said substrate surface, said outfacing surface having an uneven configuration including a plurality of outwardly extending portions; an electrolytic medium covering said outfacing surface with said outwardly extending portions extending outwardly beyond said electrolytic medium and not being covered thereby; and a second electrode on said electrolytic medium and free from contact with said first electrode.

Claim 37

Dependent Claim 106 words

A microsensor structure, comprising: a substrate having a substrate having an active area; a first electrode on with said substrate surface, said first electrode having a sensing portion on said active area, said sensing portion having an infacing surface facing said substrate surface and an outfacing surface facing away from said substrate surface, said outfacing surface having an uneven configuration including a plurality of outwardly extending portions; an electrolytic medium covering said outfacing surface with said outwardly extending portions extending outwardly beyond said electrolytic medium and not being covered thereby; and a second electrode on said electrolytic medium and free from contact with said first electrode.

Claim 38

Dependent Claim 24 words

A microsensor as set forth in claim 29, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 39

Dependent Claim 15 words

A microsensor structure as set forth in claim 30, wherein said barrier is water impermeable.

Claim 40

Dependent Claim 20 words

A microsensor as set forth in claim 30, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 41

Dependent Claim 28 words

A microsensor structure as set forth in claim 29, further including: a dielectric wall extending outwardly from said substrate surface about said active area and said electrolytic medium.

Claim 42

Dependent Claim 17 words

A microsensor structure as set forth in claim 29, wherein said substrate is of a dielectric material.

Claim 43

Dependent Claim 31 words

A microsensor structure as set forth in claim 29, wherein said substrate is of a semiconductor material and further including: an insulator between said substrate and said first and second electrodes.

Claim 44

Dependent Claim 27 words

A microsensor as set forth in claim 29, wherein said outfacing extending portions extend outwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 45

Dependent Claim 43 words

A microsensor as set forth in claim 29, wherein said second electrode is on said substrate surface and wherein said first and second electrodes are adjacent one another and are separated by a first-second electrode gap of no more than about 50 microns.

Claim 46

Dependent Claim 24 words

A microsensor as set forth in claim 37, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 47

Dependent Claim 14 words

A microsensor as set forth in claim 38, wherein said member is water impermeable.

Claim 48

Dependent Claim 29 words

A microsensor as set forth in claim 29, further including: a third electrode in contact with said electrolytic medium and free from contact with said first and second electrodes.

Claim 49

Dependent Claim 31 words

A microsensor as set forth in claim 40, wherein said first electrode is a sensing electrode, said second electrode is a counter electrode and said third electrode is a reference electrode.

Claim 50

Dependent Claim 44 words

A microsensor as set forth in claim 41, wherein said second and third electrodes are on said substrate surface, wherein said first and second electrodes are adjacent one another and are separated by a first-second electrode gap of no more than about 50 microns.

Claim 51

Dependent Claim 28 words

A microsensor structure as set forth in claim 29, wherein said outwardly extending portions extend upwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 52

Dependent Claim 28 words

A microsensor as set forth in claim 43, wherein said solid electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 53

Dependent Claim 24 words

A microsensor as set forth in claim 44, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 54

Dependent Claim 21 words

A microsensor structure as set forth in claim 45, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 55

Dependent Claim 28 words

A microsensor structure as set forth in claim 46, wherein said outfacing extending portions extend outwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 56

Dependent Claim 43 words

A microsensor structure as set forth in claim 47, wherein said second electrode is on said substrate surface and wherein said first and second electrodes are adjacent one another and are separated by first-second electrode gap of no more than about 50 microns.

Claim 57

Dependent Claim 29 words

A microsensor as set forth in claim 47, further including: a third electrode in contact with said electrolytic medium and free from contact with said first and second electrodes.

Claim 58

Dependent Claim 32 words

A microsensor structure as set forth in claim 49, wherein said first electrode is a sensing electrode, said second electrode is a counter electrode and said third electrode is a reference electrode.

Claim 59

Dependent Claim 44 words

A microsensor structure as set forth in claim 50, wherein said second and third electrodes are on said substrate surface, wherein said first and second electrodes are adjacent one another and are separated by first-second electrode gap of no more than about 50 microns.

Claim 60

Dependent Claim 21 words

A microsensor structure as set forth in claim 51, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 61

Dependent Claim 15 words

A microsensor structure as set forth in claim 51, wherein said member is water impermeable.

Claim 62

Dependent Claim 61 words

A microsensor structure as set forth in claim 29, further including: a plurality of said first electrodes and a plurality of said second electrodes, each of said first electrodes being on said substrate, said first electrodes each being in contact with a respective one of a corresponding plurality of solid electrolytic mediums, said electrolytic mediums being electrically isolated from one another.

Claim 63

Dependent Claim 93 words

In a method of determining the concentration of a particular gaseous species which comprises contacting the species with a sensor having a substrate having a sensing electrode and a counter electrode on a surface thereof, the electrodes being covered by an electrolytic medium, and measuring the electrochemical effect of said species on said sensing electrode, the improvement comprising: utilizing as said sensing electrode a first electrode having an outfacing surface having an uneven configuration including a plurality of outwardly extending portions which extend outwardly beyond said electrolytic medium and are not covered thereby.

Claim 64

Dependent Claim 93 words

In a method of determining the concentration of a particular gaseous species which comprises contacting the species with a sensor having a substrate having a sensing electrode and a counter electrode on a surface thereof, the electrodes being covered by an electrolytic medium, and measuring the electrochemical effect of said species on said sensing electrode, the improvement comprising: utilizing as said sensing electrode a first electrode having an outfacing surface having an uneven configuration including a plurality of outwardly extending portions which extend outwardly beyond said electrolytic medium and are not covered thereby.

Claim 65

Dependent Claim 40 words

A method as set forth in claim 55, wherein said method further includes: providing a reference electrode as a third electrode on said surface and utilizing said reference electrode along with said sensing and counter electrode when measuring said effect.

Claim 66

Dependent Claim 27 words

A method as set forth in claim 56, wherein said outfacing extending portions extend outwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 67

Dependent Claim 32 words

A method as set forth in claim 55, further including: positioning said sensing and counter electrodes adjacent one another and separated by sensing-counter electrode gap of no more than about 50 microns.

Claim 68

Dependent Claim 28 words

A method as set forth in claim 58, wherein said solid electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 69

Dependent Claim 18 words

A method as set forth in claim 59, wherein said solid electrolytic medium comprises a solid polymer electrolyte.

Claim 70

Dependent Claim 27 words

A method as set forth in claim 55, wherein said outwardly extending portions extend outwardly from said outfacing surface from about 0.01 micron to about 5 microns.

Claim 71

Dependent Claim 92 words

A microsensor structure, comprising: a substrate having a substrate surface having an active area; a first electrode in contact with said substrate surface, said first electrode having a sensing portion on said active area, said sensing portion having infacing surface facing said substrate surface and an outfacing surface facing away from said substrate surface; a solid electrolytic medium covering said outfacing surface, said solid electrolytic medium having a plurality of conductive microparticles dispersed therein; and a second electrode in contact with said electrolytic medium and free from contact with said first electrode.

Claim 72

Dependent Claim 92 words

A microsensor structure, comprising: a substrate having a substrate surface having an active area; a first electrode in contact with said substrate surface, said first electrode having a sensing portion on said active area, said sensing portion having infacing surface facing said substrate surface and an outfacing surface facing away from said substrate surface; a solid electrolytic medium covering said outfacing surface, said solid electrolytic medium having a plurality of conductive microparticles dispersed therein; and a second electrode in contact with said electrolytic medium and free from contact with said first electrode.

Claim 73

Dependent Claim 24 words

A microsensor as set forth in claim 62, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 74

Dependent Claim 14 words

A microsensor as set forth in claim 63, wherein said barrier is water impermeable.

Claim 75

Dependent Claim 20 words

A microsensor as set forth in claim 63, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 76

Dependent Claim 17 words

A microsensor structure as set forth in claim 62, wherein said substrate is of a dielectric material.

Claim 77

Dependent Claim 31 words

A microsensor structure as set forth in claim 62, wherein said substrate is of a semiconductor material and further including: an insulator between said substrate and said first and second electrodes.

Claim 78

Dependent Claim 43 words

A microsensor as set forth in claim 62, wherein said second electrode is on said substrate surface and wherein said first and second electrodes are adjacent one another and are separated by a first-second electrode gap of no more than about 50 microns.

Claim 79

Dependent Claim 24 words

A microsensor as set forth in claim 68, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 80

Dependent Claim 14 words

A microsensor as set forth in claim 69, wherein said member is water impermeable.

Claim 81

Dependent Claim 29 words

A microsensor as set forth in claim 62, further including: a third electrode in contact with said electrolytic medium and free from contact with said first and second electrodes.

Claim 82

Dependent Claim 31 words

A microsensor as set forth in claim 71, wherein said first electrode is a sensing electrode, said second electrode is a counter electrode and said third electrode is a reference electrode.

Claim 83

Dependent Claim 45 words

A microsensor as set forth in claim 72, wherein said second and third electrodes are on said substrate surface and wherein said first and second electrodes are adjacent one another and are separated by a first-second electrode gap of no more than about 50 microns.

Claim 84

Dependent Claim 28 words

A microsensor as set forth in claim 62, wherein said solid electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 85

Dependent Claim 24 words

A microsensor as set forth in claim 74, further including: a barrier covering said electrolytic medium, said barrier being permeable to an analyte gas.

Claim 86

Dependent Claim 21 words

A microsensor structure as set forth in claim 75, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 87

Dependent Claim 43 words

A microsensor structure as set forth in claim 76, wherein said second electrode is on said substrate surface and wherein said first and second electrodes are adjacent one another and are separated by first-second electrode gap of no more than about 50 microns.

Claim 88

Dependent Claim 29 words

A microsensor as set forth in claim 77, further including: a third electrode in contact with said electrolytic medium and free from contact with said first and second electrodes.

Claim 89

Dependent Claim 32 words

A microsensor structure as set forth in claim 78, wherein said first electrode is a sensing electrode, said second electrode is a counter electrode and said third electrode is a reference electrode.

Claim 90

Dependent Claim 44 words

A microsensor structure as set forth in claim 79, wherein said second and third electrodes are on said substrate surface, wherein said first and second electrodes are adjacent one another and are separated by first-second electrode gap of no more than about 50 microns.

Claim 91

Dependent Claim 21 words

A microsensor structure as set forth in claim 80, further including: an aqueous reservoir in flow contact with said electrolytic medium.

Claim 92

Dependent Claim 15 words

A microsensor structure as set forth in claim 80, wherein said member is water impermeable.

Claim 93

Dependent Claim 56 words

A microsensor structure as set forth in claim 62, further including: a plurality of sets of said first and second electrodes, each of said sets being on said substrate, said sets each being in contact with a respective one of a corresponding plurality of solid electrolytic mediums, said electrolytic mediums being electrically isolated from one another.

Claim 94

Dependent Claim 70 words

In a method of determining the concentration of a particular gaseous species which comprises contacting the species with a sensor having a substrate having a sensing electrode and a counter electrode on a surface thereof, the electrode being covered by a solid electrolytic medium, and measuring the effect of said species on the sensing electrode, the improvement comprising: including a plurality of conductive microparticles dispersed in said solid electrolytic medium.

Claim 95

Dependent Claim 70 words

In a method of determining the concentration of a particular gaseous species which comprises contacting the species with a sensor having a substrate having a sensing electrode and a counter electrode on a surface thereof, the electrode being covered by a solid electrolytic medium, and measuring the effect of said species on the sensing electrode, the improvement comprising: including a plurality of conductive microparticles dispersed in said solid electrolytic medium.

Claim 96

Dependent Claim 40 words

A method as set forth in claim 84, wherein said method further includes: providing a reference electrode as a third electrode on said surface and utilizing said reference electrode along with said sensing and counter electrode when measuring said effect.

Claim 97

Dependent Claim 32 words

A method as set forth in claim 85, further including: positioning said sensing and counter electrodes adjacent one another and separated by sensing-counter electrode gap of no more than about 50 microns.

Claim 98

Dependent Claim 28 words

A method as set forth in claim 84, wherein said solid electrolytic medium is of a thickness upon said outfacing surface of no more than about 10 microns.

Claim 99

Dependent Claim 18 words

A method as set forth in claim 87, wherein said solid electrolytic medium comprises a solid polymer electrolyte.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-02-12	1993-08-14	1994-02-13	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-02-12	1997-08-14	1998-02-13	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-02-12	2001-08-14	2002-02-13	$7700.00	Window Closed / Lapsed

Surface type microelectronic gas and vapor sensor

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