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US4899105A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of testing electrical characteristics of LCD with probe device

Assignee: Tokyo Electron Ltd
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Filing: 1988-09-02
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Granted: 1990-02-06
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Expires: 2008-09-02
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Abstract

Abstract A method of testing electrical characteristics with a probe device, wherein an object to be tested is placed on a table of the probe device, and the electrical characteristics of the object are measured while light is supplied from a light source unit outside the test unit to the test unit for the object through a light supplying means unit. A light source need not be arranged inside the test unit, thereby preventing the temperature atmosphere inside the test unit from being disturbed, and the electrical characteristics of the object can be tested under severe conditions with radiation of external light.

Inventors

  • 👤 Shuji Akiyama

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 22:41
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2656

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 120 words
A method of testing electrical characteristics of an object with a probe device, said method comprising the steps of: (a) placing an object to be tested on a stage inside the probe device; (b) setting a light output end of a light supplying means to opposite the object; (c) guiding light from a light source unit outside the probe device to a light incident end of the light supplying means; and (d) testing the electrical characteristics of the object while light is kept supplied from the light output end of the light supplying means, wherein: (e) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 2
Independent Claim 120 words
A method of testing electrical characteristics of an object with a probe device, said method comprising the steps of: (a) placing an object to be tested on a stage inside the probe device; (b) setting a light output end of a light supplying means to opposite the object; (c) guiding light from a light source unit outside the probe device to a light incident end of the light supplying means; and (d) testing the electrical characteristics of the object while light is kept supplied from the light output end of the light supplying means, wherein: (e) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 3
Dependent Claim 16 words
A method according to claim 1, wherein the light supplying means comprises an optical fiber cable.
Claim 4
Dependent Claim 15 words
A method according to claim 1, wherein the object comprises a liquid crystal display device.
Claim 5
Independent Claim 169 words
A method of testing electrical characteristics of an object with a probe device, said method comprising the steps of: (a) placing an object to be tested on a stage inside the probe device; (b) setting a light output end of a light supplying means to oppose the object; (c) guiding light from a light source unit outside the probe device to a light incident end of the light supplying means; and (d) testing the electrical characteristics of the object while light is kept supplied from the light output end of the light supplying means, wherein: (e) an incident end portion of the light supplying means is located between the probe device and the light source unit in a flexed state; and (f) the light supplying means is moved in response to movement of the stage due to flexure of the light supplying means, wherein: (g) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 6
Independent Claim 169 words
A method of testing electrical characteristics of an object with a probe device, said method comprising the steps of: (a) placing an object to be tested on a stage inside the probe device; (b) setting a light output end of a light supplying means to oppose the object; (c) guiding light from a light source unit outside the probe device to a light incident end of the light supplying means; and (d) testing the electrical characteristics of the object while light is kept supplied from the light output end of the light supplying means, wherein: (e) an incident end portion of the light supplying means is located between the probe device and the light source unit in a flexed state; and (f) the light supplying means is moved in response to movement of the stage due to flexure of the light supplying means, wherein: (g) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 7
Dependent Claim 16 words
A method according to claim 4, wherein the light supplying means comprises an optical fiber cable.
Claim 8
Dependent Claim 15 words
A method according to claim 4, wherein the object comprises a liquid crystal display device.
Claim 9
Independent Claim 124 words
A method of testing electrical characteristics by means of a probe device, comprising the steps of: (a) placing an object to be tested on a table located in a testing region within the probe device; (b) positioning a light output end of an optical fiber cable to oppose said object; (c) guiding light from a light source unit located outside of said testing region to a light incident end of said optical fiber cable; and (d) testing the electrical characteristics in accordance with the amount of said light being supplied from said light output end to said object, wherein: (e) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 10
Independent Claim 124 words
A method of testing electrical characteristics by means of a probe device, comprising the steps of: (a) placing an object to be tested on a table located in a testing region within the probe device; (b) positioning a light output end of an optical fiber cable to oppose said object; (c) guiding light from a light source unit located outside of said testing region to a light incident end of said optical fiber cable; and (d) testing the electrical characteristics in accordance with the amount of said light being supplied from said light output end to said object, wherein: (e) the light output end of the light supplying means is supported inside the stage so as to oppose a support surface of the stage.
Claim 11
Dependent Claim 53 words
A method according to claim 7, wherein an incident end portion of the optical fiber cable is located, in a flexed state, between the testing region and the light source unit, and the optical fiber cable is moved in response to movement of the table due to flexure of the optical fiber cable.
Claim 12
Independent Claim 110 words
A method of testing electrical characteristics by means of a probe device, comprising the steps of: (a) placing a liquid crystal display device to be tested on a table located in a testing region within the probe device; (b) positioning a light output end of an optical fiber cable inside said table so as to oppose a support surface of said table; (c) guiding light from a light source unit located outside of the testing region to a light incident end of the light supplying means; and (d) testing the electrical characteristics in accordance with the amount of said light being supplied from said light output end to said object.
Claim 13
Independent Claim 110 words
A method of testing electrical characteristics by means of a probe device, comprising the steps of: (a) placing a liquid crystal display device to be tested on a table located in a testing region within the probe device; (b) positioning a light output end of an optical fiber cable inside said table so as to oppose a support surface of said table; (c) guiding light from a light source unit located outside of the testing region to a light incident end of the light supplying means; and (d) testing the electrical characteristics in accordance with the amount of said light being supplied from said light output end to said object.
Claim 14
Dependent Claim 53 words
A method according to claim 9, wherein an incident end portion of the optical fiber cable is located, in a flexed state, between the testing region and the light source unit, and the optical fiber cable is moved in response to movement of the table due to flexure of the optical fiber cable.

References Cited (Backward Citations)

US4309657A Cited
US4393348A Cited
US4712063A Cited
US4656419A Cited
US4728174A Cited
US4715687A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-02-05 1993-08-07 1994-02-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-02-05 1997-08-07 1998-02-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-02-05 2001-08-07 2002-02-06 $7700.00 Window Closed / Lapsed

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