Ultrasonic laser soldering

Claim 3

The method of claim 1 wherein at least part of said steps of applying heat and sonic energy are performed at the same time.

Claim 4

The method of claim 1 wherein said step of pressing comprises urging a pressure member against a first one of the members, said step of applying heat energy comprising directing a beam of laser energy along said pressure member to said first member, said step of applying sonic energy comprising connecting the pressure member to an ultrasonic transducer and energizing the transducer.

Claim 5

The method of claim 1 wherein said members are solder-coated, said method further including the step of separating the members from one another after application of heat energy, so as to allow said solder to flow between the members.

Claim 6

Apparatus for soldering a lead to a substrate comprising: a pressure tool having a pressure tip for pressing against a lead, means for vibrating the tool at an ultrasonic frequency, means for projecting a laser beam at a lead at said pressure tip, and means for moving the tool to press said tip against said lead.

Claim 7

Apparatus for soldering a lead to a substrate comprising: a pressure tool having a pressure tip for pressing against a lead, means for vibrating the tool at an ultrasonic frequency, means for projecting a laser beam at a lead at said pressure tip, and means for moving the tool to press said tip against said lead.

Claim 8

The apparatus of claim 5 wherein said means for applying heat comprises an optical fiber having an end positioned adjacent said tool tip, and a laser connected to transmit laser energy through the fiber.

Claim 9

The apparatus of claim 6 wherein said means for vibrating the tool comprises an ultrasonic transducer and means for connecting the tool to the transducer.

Claim 10

The apparatus of claim 5 wherein said tool has a tool bore extending to said tip, and wherein said means for applying heat comprises optical fiber means extending through said bore to said tip, and laser means for transmitting a beam of laser energy through the optical fiber means.

Claim 11

The apparatus of claim 8 wherein said tip is formed of a solid material that is transparent to said laser energy.

Claim 12

The apparatus of claim 8 wherein said tip is made of sapphire.

Claim 13

The apparatus of claim 8 wherein said tool is made of a non-wetting material.

Claim 14

The apparatus of claim 11 wherein said tool is made of a dielectric material.

Claim 15

The apparatus of claim 12 wherein said tool is made of material belonging to the group which includes alumina and beryllia.

Claim 16

The apparatus of claim 5 wherein said laser beam is focused on said lead.

Claim 17

The apparatus of claim 5 wherein said pressure tip is solid and is capable of transmitting a beam of laser energy, and wherein said means for projecting a laser beam is operative to project said laser beam through said tip.

Claim 20

The method of claim 16 including the step of employing a capillary having a bore to both press the members and to apply ultrasonic energy, and wherein said step of applying a program of heat energy comprises directing a beam of laser energy through the bore of said capillary.

Claim 21

The method of claim 17 including the step of moving the capillary away from the members by a small amount to allow heated solder to flow between said members.

Claim 22

A wire bonder comprising: a support, a worktable connected to the support for carrying an object to which a wire is to be bonded, a bonder frame, means for mounting the frame to the support for motion in a first direction toward and away from the worktable, motor means for driving the frame in said direction, a transducer support, an ultrasonic transducer carried on said support, a bonder tool connected to the transducer for movement therewith, said tool comprising a capillary having a solid pressure tip for pressing a lead to be bonded against an object on the worktable, said capillary having a bore extending to the tip, said tip being transparent to laser energy, means for mounting the transducer support to the bonder frame for motion relative to the bonder frame in said direction, an optical fiber positioned in the bore and having a fiber end at said pressure tip, and a laser having a laser beam output connected to said optical fiber.

Claim 23

A wire bonder comprising: a support, a worktable connected to the support for carrying an object to which a wire is to be bonded, a bonder frame, means for mounting the frame to the support for motion in a first direction toward and away from the worktable, motor means for driving the frame in said direction, a transducer support, an ultrasonic transducer carried on said support, a bonder tool connected to the transducer for movement therewith, said tool comprising a capillary having a solid pressure tip for pressing a lead to be bonded against an object on the worktable, said capillary having a bore extending to the tip, said tip being transparent to laser energy, means for mounting the transducer support to the bonder frame for motion relative to the bonder frame in said direction, an optical fiber positioned in the bore and having a fiber end at said pressure tip, and a laser having a laser beam output connected to said optical fiber.

Claim 24

The bonder of claim 19 including means for energizing the laser and the transducer during a common short interval, whereby both heat energy and ultrasonic energy may be applied by said pressure tip to a lead pressed by the pressure tip against an object on the worktable.