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US4890150A Expired / Lapsed US ⏱️ 0.0 years remaining

Dielectric passivation

Assignee: Philips North America LLC
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Filing: 1985-12-05
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Granted: 1989-12-26
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Expires: 2005-12-05
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Abstract

Abstract A high-voltage semiconductor device is set forth having a passivation scheme able to shelter the device from both external charges and internal charges. In particular, the distribution of electric fields in the device is altered to make it less vulnerable to the presence of internal charges.

Inventors

  • 👤 Eduardo S. Vera
  • 👤 Edward H. Stupp

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 14:39
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/64; H10D30/65; H10D64/00; H10D64/118; H10W; H10W72/00; H10W72/90

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 58 words
A semiconductor device comprising a substrate layer of a first conductivity type, an epitaxial layer of a second conductivity type overlying said substrate layer, an insulator layer covering at least a portion of said epitaxial layer, and a passivating layer of a high dielectric constant on said insulating layer, said high dielectric constant being at least approximately 80.
Claim 2
Dependent Claim 58 words
A semiconductor device comprising a substrate layer of a first conductivity type, an epitaxial layer of a second conductivity type overlying said substrate layer, an insulator layer covering at least a portion of said epitaxial layer, and a passivating layer of a high dielectric constant on said insulating layer, said high dielectric constant being at least approximately 80.
Claim 3
Dependent Claim 18 words
A semiconductor device according to claim 1, wherein said passivating layer has a thickness of approximately 1 micron.
Claim 4
Dependent Claim 18 words
A semiconductor device according to claim 1 or claim 2, wherein said passivating layer is TiO 2 .
Claim 5
Dependent Claim 21 words
A semiconductor device according to claim 1 or claim 2, wherein said passivating layer has a dielectric constant of approximately 80.
Claim 6
Dependent Claim 142 words
A semiconductor device comprising a substrate layer of a first conductivity type; an epitaxial layer of a second conductivity type overlying said substrate layer; a buried layer lying between a portion of said substrate layer and said epitaxial layer, said buried layer having a higher doping of said first conductivity type; a first surface layer of said first conductivity type at a portion of said epitaxial layer above said buried layer; a second surface layer of said second conductivity type at another portion of said epitaxial layer free from said buried layer; an insulating layer over a portion of said epitaxial layer and said first and second surface layers; a passivating layer of a high dielectric constant on a portion of said insulating layer; and an electrode layer on at least portions of said insulating layer and edges of said passivating layer.
Claim 7
Dependent Claim 142 words
A semiconductor device comprising a substrate layer of a first conductivity type; an epitaxial layer of a second conductivity type overlying said substrate layer; a buried layer lying between a portion of said substrate layer and said epitaxial layer, said buried layer having a higher doping of said first conductivity type; a first surface layer of said first conductivity type at a portion of said epitaxial layer above said buried layer; a second surface layer of said second conductivity type at another portion of said epitaxial layer free from said buried layer; an insulating layer over a portion of said epitaxial layer and said first and second surface layers; a passivating layer of a high dielectric constant on a portion of said insulating layer; and an electrode layer on at least portions of said insulating layer and edges of said passivating layer.
Claim 8
Dependent Claim 18 words
A semiconductor device according to claim 5, wherein said passivating layer has a thickness of approximately 1 micron.
Claim 9
Dependent Claim 18 words
A semiconductor device according to claim 5 or claim 6, wherein said passivating layer is TiO 2 .
Claim 10
Dependent Claim 21 words
A semiconductor layer according to claim 5 or claim 6, wherein said passivating layer has a dielectric constant of approximately 80.
Claim 11
Dependent Claim 25 words
A semiconductor device according to claim 1 or claim 2, wherein said passivating layer has a dielectric constant of approximately one of 800 or 8000.
Claim 12
Dependent Claim 25 words
A semiconductor device according to claim 5 or claim 6, wherein said passivating layer has a dielectric constant of approximately one of 800 or 8000.

References Cited (Backward Citations)

US4612629A Cited
US4494134A Cited
US4639761A Cited
US4609929A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-12-25 1993-06-26 1993-12-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-12-25 1997-06-26 1997-12-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-12-25 2001-06-26 2001-12-26 $7700.00 Window Closed / Lapsed

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