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Process for forming thin film of metal sulfides

Assignee: Panasonic Holdings Corp
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Filing: 1986-01-16
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Granted: 1989-12-05
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Expires: 2006-01-16
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Abstract

Abstract This invention is designed to form thin films of metal sulfides usable in various types of electronic devices with a simple process comprising forming a layer of an organometallic compound having at least one metal-sulfur or metal-oxygen bond in the molecule on a substrate by printing or other means and then thermally decomposing the formed organometallic compound layer in an inert gas which may or may not be mixed with hydrogen sulfide.

Inventors

  • 👤 Yo Hasegawa
  • 👤 Kazuyuki Okano
  • 👤 Akira Nakanishi
  • 👤 Hiroshi Hatase

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 20:11
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/125; C23C18/1275

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 60 words
A process for forming a thin film of a metal sulfide, which comprises coating a substrate with a layer of a solution including an organometallic compound having at least one metal-sulfur bond in the molecule, and then thermally decomposing said organometallic compound layer in an inert gas mixed with hydrogen sulfide to form a thin film of a metal sulfide.
Claim 2
Dependent Claim 60 words
A process for forming a thin film of a metal sulfide, which comprises coating a substrate with a layer of a solution including an organometallic compound having at least one metal-sulfur bond in the molecule, and then thermally decomposing said organometallic compound layer in an inert gas mixed with hydrogen sulfide to form a thin film of a metal sulfide.
Claim 3
Dependent Claim 20 words
The process according to claim 1, wherein the organometallic compound having at least one metal-sulfur bond is a metal mercaptide.
Claim 4
Dependent Claim 22 words
The process according to claim 1, wherein the organometallic compound having at least one metal-sulfur bond is a thiocarboxylate of a metal.
Claim 5
Dependent Claim 22 words
The process according to claim 1, wherein the organometallic compound having at least one metalsulfur bond is a dithiocarboxylate of a metal.

References Cited (Backward Citations)

US2905574A Cited
FR1297777A Cited
US3148084A Cited
GB1009539A Cited
US3887383A Cited
US4332879A Cited
GB2049636A Cited
US4310182A Cited
US4418099A Cited
US4530742A Cited
US4492721A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-12-04 1993-06-05 1993-12-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-12-04 1997-06-05 1997-12-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-12-04 2001-06-05 2001-12-05 $7700.00 Window Closed / Lapsed

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